Hollow-cathode magnetron and method of making thin films

Claim 2

A hollow-cathode magnetron, comprising: a target holding means being adapted to engage a substantially cylindrically shaped target; a substantially cylindrically shaped target having a central axis therewithin and an axially disposed bore formed therethrough, said bore being coaxially formed with said central axis of said cylindrical target, said target being engaged to said target holding means; plasma forming means being disposed within said magnetron and functioning to create a plasma within said bore; magnetic means functioning to influence the location of said plasma within said bore, whereby a localized plasma zone is created proximate an arcuate wall section within said bore proximate said magnetic means, said plasma zone having a narrow, linear shape that is oriented generally parallel to said central axis, said magnetic means and said target being cooperatively disposed relative to each other such that the location of said localized plasma zone is movable within said bore.

Claim 3

A hollow-cathode magnetron as described in claim 1 wherein said target is engaged in a stationary position and said magnetic means is engaged in a movable manner relative to said target.

Claim 4

A hollow-cathode magnetron as described in claim 2 wherein said magnetic means is engaged to a first housing; said first housing being cylindrical in shape and engaged to rotate about said target in coaxial relationship with said target bore.

Claim 5

A hollow-cathode magnetron as described in claim 1 wherein said magnetic means includes at least one magnet.

Claim 6

A hollow-cathode magnetron as described in claim 4 wherein at least one of said magnets comprises a permanent bar magnet having a first longitudinal edge of one magnetic polarity and a second longitudinal edge of an opposite magnetic polarity; said first longitudinal edge being disposed in a parallel relationship relative to said central axis of said cylindrical target.

Claim 7

A hollow-cathode magnetron as described in claim 5 wherein said magnetic means includes three said permanent bar magnets being disposed adjacent to each other; each said bar magnet having a first longitudinal edge which differs in polarity from said firs longitudinal edge of each said bar magnet disposed adjacent to another said bar magnet.

Claim 8

A hollow-cathode magnetron as described in claim 1 wherein said magnetic means is disposed in a stationary position and said target is engaged in a movable manner relative to said magnetic means.

Claim 9

A hollow-cathode magnetron as described in claim 1 wherein said plasma forming means includes at least one anode and at least one cathode, said anode and said cathode having an electrical potential imposed therebetween, such that a plasma is sustained within said bore by said electrical potential.

Claim 10

A hollow-cathode magnetron as described in claim 8 wherein a sputtering shield means is disposed between said cathode and said anode, said shield means functioning to inhibit the buildup of a layer of sputtered material between said anode and said cathode, whereby the occurrence of an electrical short between said anode and said cathode is prevented.

Claim 11

A hollow-cathode magnetron as described in claim 1 wherein said magnetic means includes a plurality of electromagnets, each said electromagnet being disposed proximate said target; said magnetic means also including a sequential electromagnetic energizing means functioning to sequentially, electrically energize said electromagnets, whereby a localized magnetic field is created within said bore, and said localized magnetic field moves about said bore in direct relation to said sequential energizing means, said localized magnetic field functioning to induce the creation of said localized plasma.

Claim 12

A hollow-cathode magnetron, comprising: a target holding means being adapted to engage a substantially cylindrically shaped target, said target holding means including a target cooling means disposed therewithin; a substantially cylindrically shaped target having a central axis therewithin and an axially disposed bore formed therethrough, said bore being coaxially formed with said central axis of said cylindrical target, said target being engaged to said target holding means; plasma forming means being disposed within said magnetron and functioning to create a plasma within said bore of said target, said plasma forming means including at least one anode and at least one cathode, said anode and said cathode having an electrical potential imposed therebetween, such that a plasma is sustained within said bore by said electrical potential; magnetic means being disposed within said magnetron proximate said target and functioning to influence the location of said plasma within said bore, whereby a localized plasma zone, having a narrow, linear shape that is oriented generally parallel to said central axis, is created proximate an arcuate wall section within said bore, and the location of said localized plasma is movable within said bore; said magnetic means including at least one magnet having a first longitudinal edge of one magnetic polarity and a second longitudinal edge of an opposite magnetic polarity, said first longitudinal edge being disposed in a parallel relationship relative to said central axis of said cylindrical target.

Claim 13

A hollow-cathode magnetron, comprising: a target holding means being adapted to engage a substantially cylindrically shaped target, said target holding means including a target cooling means disposed therewithin; a substantially cylindrically shaped target having a central axis therewithin and an axially disposed bore formed therethrough, said bore being coaxially formed with said central axis of said cylindrical target, said target being engaged to said target holding means; plasma forming means being disposed within said magnetron and functioning to create a plasma within said bore of said target, said plasma forming means including at least one anode and at least one cathode, said anode and said cathode having an electrical potential imposed therebetween, such that a plasma is sustained within said bore by said electrical potential; magnetic means being disposed within said magnetron proximate said target and functioning to influence the location of said plasma within said bore, whereby a localized plasma zone, having a narrow, linear shape that is oriented generally parallel to said central axis, is created proximate an arcuate wall section within said bore, and the location of said localized plasma is movable within said bore; said magnetic means including at least one magnet having a first longitudinal edge of one magnetic polarity and a second longitudinal edge of an opposite magnetic polarity, said first longitudinal edge being disposed in a parallel relationship relative to said central axis of said cylindrical target.

Claim 14

A hollow-cathode magnetron as described in claim 11 wherein said target is engaged in a stationary position and said magnetic means is engaged in a movable manner relative to said target.

Claim 15

A hollow-cathode magnetron as described in claim 12 wherein said magnetic means is engaged to a first housing; said first housing being cylindrical in shape and engaged to rotate about said target in coaxial relationship with said target bore.

Claim 16

A hollow-cathode magnetron as described in claim 11 wherein said magnetic means includes three said permanent bar magnets being disposed adjacent to each other; each said magnet having a first longitudinal edge which differs in polarity from said first longitudinal edge of each adjacent magnet.

Claim 17

A hollow-cathode magnetron as described in claim 11 wherein said magnetic means is disposed in a stationary position and said target is engaged in a movable manner relative to said magnetic means.

Claim 18

A hollow-cathode magnetron as described in claim 11 wherein a sputtering shield means is disposed between said cathode and said anode, said shield means functioning to inhibit the buildup of a layer of sputtered material between said anode and said cathode whereby the occurrence of an electrical short between said anode and said cathode is prevented.

Claim 19

A hollow-cathode magnetron as described in claim 11 wherein said magnetic means includes a plurality of electromagnets, each said electromagnet being disposed proximate said target; said magnetic means also including a sequential electromagnetic energizing means functioning to sequentially, electrically energize said electromagnets, whereby a localized magnetic field is created within said bore, and said localized magnetic field moves about said bore in direct relation to said sequential energizing means, said localized magnetic field functioning to induce the creation of said localized plasma.

Claim 20

A hollow-cathode magnetron, comprising: an input section, said input section being formed as a hollow cylindrical structure having an end cap that is removably sealingly engaged thereto; an input spool means, said input spool means being adapted for holding a spooled quantity of a continuous material that is to be coated within said magnetron, said input spool means being removably engaged within said input section; an output section, said output section being formed as a hollow cylindrical structure having an end cap that is removably sealingly engaged thereto; an output spool means, said output spool means being adapted for holding a spooled quantity of a continuous material that has been coated within said magnetron, said output spool means being removably engaged within said output section; a deposition section, said deposition section being disposed in pneumatic communication between said input section and said output section, whereby a low pressure environment may be established and maintained throughout said input section, said deposition section and said output section; said continuous material extending from said input spool through said deposition section to said output spool; a target means, said target means being cylindrical in shape and having a central axis and a target sputtering bore formed therethrough in coaxial alignment with said central axis of said target means; a target holding means, said target holding means being disposed within said deposition section and functioning to hold said target means within said deposition section; plasma forming means, said plasma forming means including an electrical means for the establishment of an electrical potential between said target holding means on the one hand and said input section and said outputs section on the other hand; magnetic means, said magnetic means being engaged within said deposition section and functioning to influence the location of said plasma within said bore of said target, whereby a localized plasma zone, having a narrow, linear shape that is oriented generally parallel to said central axis, is created proximate an arcuate wall section within said bore; said magnetic means and said target means being cooperatively disposed relative to each other, such that the location of said localized plasma is movable within said bore.

Claim 21

A hollow-cathode magnetron, comprising: an input section, said input section being formed as a hollow cylindrical structure having an end cap that is removably sealingly engaged thereto; an input spool means, said input spool means being adapted for holding a spooled quantity of a continuous material that is to be coated within said magnetron, said input spool means being removably engaged within said input section; an output section, said output section being formed as a hollow cylindrical structure having an end cap that is removably sealingly engaged thereto; an output spool means, said output spool means being adapted for holding a spooled quantity of a continuous material that has been coated within said magnetron, said output spool means being removably engaged within said output section; a deposition section, said deposition section being disposed in pneumatic communication between said input section and said output section, whereby a low pressure environment may be established and maintained throughout said input section, said deposition section and said output section; said continuous material extending from said input spool through said deposition section to said output spool; a target means, said target means being cylindrical in shape and having a central axis and a target sputtering bore formed therethrough in coaxial alignment with said central axis of said target means; a target holding means, said target holding means being disposed within said deposition section and functioning to hold said target means within said deposition section; plasma forming means, said plasma forming means including an electrical means for the establishment of an electrical potential between said target holding means on the one hand and said input section and said outputs section on the other hand; magnetic means, said magnetic means being engaged within said deposition section and functioning to influence the location of said plasma within said bore of said target, whereby a localized plasma zone, having a narrow, linear shape that is oriented generally parallel to said central axis, is created proximate an arcuate wall section within said bore; said magnetic means and said target means being cooperatively disposed relative to each other, such that the location of said localized plasma is movable within said bore.

Claim 22

A hollow-cathode magnetron as described in claim 18 wherein said target means is engaged in a stationary position and said magnetic means is engaged in a movable manner relative to said stationary target means.

Claim 23

A hollow-cathode magnetron as described in claim 19 wherein said magnetic means is engaged to a first housing, said first housing being cylindrical in shape and engaged to rotate about said target means in coaxial relationship with said target bore; a second housing, said second housing being statically engaged within said deposition section; said first housing being rotatably engaged to said second housing.

Claim 24

A hollow-cathode magnetron as described in claim 18 wherein said magnetic means includes at least one magnet.

Claim 25

A hollow-cathode magnetron as described in claim 21 wherein at least one of said magnets comprises a permanent bar magnet having a first longitudinal edge of one magnetic polarity and a second longitudinal edge of an opposite magnetic polarity; said first longitudinal edge being disposed in a parallel relationship relative to said central axis of said cylindrical bore.

Claim 26

A hollow-cathode magnetron as described in claim 22 wherein said magnetic means includes three said permanent bar magnets being disposed adjacent to each other; each said magnet having a first longitudinal edge which differs in polarity from said first longitudinal edge of each adjacent magnet.

Claim 27

A hollow-cathode magnetron as described in claim 18 wherein said magnetic means is disposed in a stationary position and said target is engaged in a movable manner relative to said magnetic means.

Claim 28

A hollow-cathode magnetron as described in claim 18 wherein said input section and said output section are electrically connected to each function as an anode and said target holding means is electrically connected to function as a cathode, said anodes and said cathode having an electrical potential imposed therebetween, such that a plasma is sustained within said bore by said electrical potential.

Claim 29

A hollow-cathode magnetron as described in claim 25 wherein a sputtering shield means is disposed between said target means and said anode, said shield means functioning to inhibit the buildup of a layer of sputtered material between said anode and said cathode whereby the occurrence of an electrical short between said anode and said cathode is prevented.

Claim 30

A hollow-cathode magnetron as described in claim 18 wherein said magnetic means includes a plurality of electromagnets, each said electromagnet being disposed proximate said target; said magnetic means also including a sequential electromagnetic energizing means functioning to sequentially, electrically energize said electromagnets, whereby a localized magnetic field is created within said bore, and said localized magnetic field moves about said bore in direct relation to said sequential energizing means, said localized magnetic field functioning to induce the creation of said localized plasma.

Claim 31

A sputtering shield for engagement within a sputtering device proximate a sputtering target for preventing electrical shorts between electrically active elements within said sputtering device, comprising: a base, said base comprising a portion of said shield, and being formed for engagement within said sputtering device adjacent to said target; a leg portion, said leg portion extending from said base; said leg portion projecting into a space between said target and at least one of said electrically active elements to create a shielded electrically active element, whereby the deposition of sputtered material from said target upon said shielded electrically active element is inhibited.

Claim 32

A sputtering shield for engagement within a sputtering device proximate a sputtering target for preventing electrical shorts between electrically active elements within said sputtering device, comprising: a base, said base comprising a portion of said shield, and being formed for engagement within said sputtering device adjacent to said target; a leg portion, said leg portion extending from said base; said leg portion projecting into a space between said target and at least one of said electrically active elements to create a shielded electrically active element, whereby the deposition of sputtered material from said target upon said shielded electrically active element is inhibited.

Claim 33

A sputtering shield as described in claim 28 wherein said leg portion is disposed in a spaced apart position relative to said shielded electrically active element.

Claim 36

A method for depositing a film as described in claim 30 wherein said step of moving said localized plasma includes the steps of: creating a localized magnetic field proximate a portion of said inner surface of said bore, and moving said inner surface and said magnetic field relative to each other, whereby said localized plasma will follow said magnetic field, such that those portions of said inner surface proximate said magnetic field are exposed to said plasma.

Claim 37

A method for depositing a film as described in claim 31 wherein said step of creating said localized magnetic field includes the steps of: engaging a magnetic field generating means proximate a portion of said cylindrical target; and said step of moving said inner surface relative to said localized magnetic field includes the steps of: fixedly engaging said target, and movably engaging said magnetic field generating means relative to said target.

Claim 38

A method for depositing a film as described in claim 32 wherein said step of movably engaging said magnetic field generating means includes the steps of: fixedly engaging said magnetic field generating means to a movable housing, said movable housing being engaged to rotate about said cylindrical target.

Claim 39

A method for depositing a film as described in claim 33 wherein said magnetic field generating means includes at least one magnet, said magnet being engaged to said housing such that a long, narrow, magnetic field is created within said bore, the length of said field being disposed in a parallel orientation relative to the central axis of said cylindrical target.

Claim 40

A method for depositing a thin film as described in claim 31 wherein said step of creating said localized magnetic field includes the step of: engaging a magnetic field generating means proximate a portion of said cylindrical target; and said step of moving said inner surface relative to said localized magnetic field includes the steps of: fixedly engaging said magnetic field generating means, and movably engaging said target relative to said magnetic field generating mans.

Claim 41

A method for depositing a film as described in claim 31 wherein said step of creating said localized magnetic field includes the steps of: engaging a magnetic field generating means proximate to and surrounding said cylindrical target; and said step of moving said inner surface relative to said localized magnetic field includes the steps of: fixedly engaging said target, and electrically energizing portions of said magnetic field generating means in a sequential manner about said target, whereby said magnetic field is localized relative to portions of said target and moves about said target in direct relation to said sequential activation of said magnetic field generating means.

Claim 42

A method for depositing a film as described in claim 36 wherein said magnetic field generating means includes a plurality of electromagnets, each said electromagnet being disposed proximate said target, such that said target is surrounded by said plurality of electromagnets; a sequential activation device, said sequential activation device being engaged in electrical connection with said plurality of electromagnets and functioning to activate said electromagnets in a sequential pattern around said target.