US5227013A
Expired / Lapsed
US
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Forming via holes in a multilevel substrate in a single step
Assignee: Samsung Electronics Co Ltd
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Filing: 1991-07-25
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Granted: 1993-07-13
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Expires: 2011-07-25
Abstract
Abstract A method for forming via holes in a multilayer structure in a single step. The invention includes disposing over a base a first layer comprising first metal lines beneath a first dielectric, disposing over the first layer a second layer comprising second metal lines beneath a second dielectric such that a portion of each first metal line is not beneath any second metal line, and forming via holes which extend through the second dielectric to the second metal lines and through the second dielectric and the first dielectric to the portions of the first metal lines. Thereafter conductive metal can be deposited in the via holes. The method is particularly well suited for fabricating copper/polymer substrates.
Inventors
- 👤 Nalin Kumar
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 22:31
CPC Classifications
H; H05; H05K; H05K3/00; H05K3/0011; H05K3/0017; H05K3/0026; H05K3/0032; H05K3/0035; H10; H10W; H10W70/00; H10W70/01; H10W70/05; H10W70/095; H05K1/00; H05K1/02; H05K1/03; H05K1/0393; H05K2201/00; H05K2201/01; H05K2201/0137; H05K2201/0166; H05K2201/09; H05K2201/09209; H05K2201/095; H05K2201/09509; H05K2201/09518; H05K2201/09563; H05K2201/09818; H05K2201/09845; H05K2203/00; H05K2203/05; H05K2203/0548; H05K2203/0554; H05K2203/13; H05K2203/1333; H05K2203/1338; H05K3/002; H05K3/0041; H05K3/40; H05K3/4038; H05K3/4076; Y; Y10; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/49117; Y10T29/49124; Y10T29/49155
Claims Analysis
Total Claims: 54
Claim 1
Independent Claim
184 words
A method of forming every via hole in a multilevel substrate in a single step, comprising: disposing over a base a first layer comprising first metal lines beneath a first dielectric; disposing over the first layer a second layer comprising second metal lines beneath a second dielectric such that portions of selected first metal lines are not beneath any second metal line; and then forming a plurality of via holes by applying an etch, the dielectrics and metal lines having sufficiently different physical properties to assure that the etch attacks the dielectrics but is blocked by the metal lines without deforming the metal lines to any significant degree whereby the metal lines provide a barrier to the etch, so as to form the via holes wherein some via holes extend through the second dielectric and terminate at the top surfaces of selected second metal lines while other via holes extend through the first and second dielectrics and terminate at the top surfaces of said portions of the first metal lines, thereby forming each of the via holes in the substrate in a single step.
Claim 2
Independent Claim
184 words
A method of forming every via hole in a multilevel substrate in a single step, comprising: disposing over a base a first layer comprising first metal lines beneath a first dielectric; disposing over the first layer a second layer comprising second metal lines beneath a second dielectric such that portions of selected first metal lines are not beneath any second metal line; and then forming a plurality of via holes by applying an etch, the dielectrics and metal lines having sufficiently different physical properties to assure that the etch attacks the dielectrics but is blocked by the metal lines without deforming the metal lines to any significant degree whereby the metal lines provide a barrier to the etch, so as to form the via holes wherein some via holes extend through the second dielectric and terminate at the top surfaces of selected second metal lines while other via holes extend through the first and second dielectrics and terminate at the top surfaces of said portions of the first metal lines, thereby forming each of the via holes in the substrate in a single step.
Claim 3
Dependent Claim
21 words
The method of claim 1 wherein the via hole sidewalls are vertical and the first and second metal lines are horizontal.
Claim 4
Dependent Claim
14 words
The method of claim 1 wherein the first and second dielectrics are inorganic materials.
Claim 5
Dependent Claim
23 words
The method of claim 3 wherein the inorganic material is selected from the group consisting of silicon oxide, aluminum oxide and aluminum nitride.
Claim 6
Dependent Claim
13 words
The method of claim 1 wherein the first and second dielectrics are polymers.
Claim 7
Dependent Claim
11 words
The method of claim 5 wherein the polymers are plasma deposited.
Claim 8
Dependent Claim
16 words
The method of claim 6 wherein the polymers are polymerized from a material comprising a monomer.
Claim 9
Dependent Claim
22 words
The method of claim 1 wherein the first and second metal lines are selected from the group consisting of copper and tungsten.
Claim 10
Dependent Claim
14 words
The method of claim 1 wherein the first and second metal lines are copper.
Claim 11
Dependent Claim
38 words
The method of claim 1, further comprising depositing a first adhesive metal layer between the first metal lines and the base, and depositing a second adhesive metal layer between the second metal lines and the first dielectric layer.
Claim 12
Dependent Claim
23 words
The method of claim 10 wherein the first and second adhesive metals are selected from the group consisting of tantalum, chromium and titanium.
Claim 13
Dependent Claim
40 words
The method of claim 1, further comprising depositing a first protective metal layer between the first metal lines and the first dielectric layer, and depositing a second protective metal layer between the second metal lines and the second dielectric layer.
Claim 14
Dependent Claim
23 words
The method of claim 12 wherein the first and second protective metals are selected from the group consisting of tantalum, chromium and titanium.
Claim 15
Dependent Claim
12 words
The method of claim 1 wherein the via holes are formed anisotropically.
Claim 16
Dependent Claim
38 words
The method of claim 14 wherein forming the via holes further comprises, providing a patterned mask over the second dielectric, applying a dry etch through openings in the mask to form the via holes, and stripping the mask.
Claim 17
Dependent Claim
44 words
The method of claim 15, wherein providing the patterned mask further comprises, depositing a metal layer over the second dielectric, depositing a resist mask on and selectively exposing the metal layer, and wet chemical etching the exposed metal layer to form the patterned mask.
Claim 18
Dependent Claim
21 words
The method of claim 16 wherein the patterned mask is selected from the group consisting of chromium, aluminum, copper and tungsten.
Claim 19
Dependent Claim
14 words
The method of claim 15 wherein the dry etch is a reactive ion etch.
Claim 20
Dependent Claim
13 words
The method of claim 15 wherein the dry etch is a plasma etch.
Claim 21
Dependent Claim
14 words
The method of claim 14 wherein the via holes are formed by laser drilling.
Claim 22
Dependent Claim
12 words
The method of claim 20 wherein the laser is an excimer laser.
Claim 23
Dependent Claim
16 words
The method of claim 1, further comprising depositing a conductive via metal in the via holes.
Claim 24
Dependent Claim
14 words
The method of claim 22 wherein the via metal completely fills the via holes.
Claim 25
Dependent Claim
12 words
The method of claim 22 wherein the via metal is electrolessly deposited.
Claim 26
Dependent Claim
26 words
The method of claim 24 wherein prior to electroless deposition an initiator is deposited in the via holes by one of chemical vapor deposition or sputtering.
Claim 27
Dependent Claim
17 words
The method of claim 22 wherein the via metal is deposited by one of chemical vapor deposition.
Claim 28
Dependent Claim
22 words
The method of claim 22 wherein the via metal is selected from the group consisting of copper, tungsten, nickel and nickel alloys.
Claim 29
Dependent Claim
51 words
The method of claim 22 wherein via metal in a single via hole electrically connects a first metal line in said single via hole to a second metal line in said single via hole, said single via hole further comprising a vertical portion above but not below the second metal line.
Claim 30
Dependent Claim
49 words
The method of claim 22, further including depositing a routing metal on conductive via metal in separate via holes and on the second dielectric to form a continuous metal link between the via metal in the separate via holes, thereby electrically connecting metal lines in the separate via holes.
Claim 31
Dependent Claim
13 words
The method of claim 1 wherein the base comprises an integrated circuit chip.
Claim 32
Dependent Claim
111 words
The method of claim 30, wherein the base comprises a plurality of integrated circuit chips and a base dielectric positioned between the chips and the first metal lines, the integrated circuit chips comprise conductive pads, the base dielectric and the pads have sufficiently different physical properties to assure that the etch attacks the base dielectric but is blocked by the pads without deforming the pads to any significant degree whereby the pads provide a barrier to the etch, selected pads are not beneath any first or second metal line, and selected via holes extend through the base, first and second dielectrics and terminates at the top surfaces of the selected pads.
Claim 33
Dependent Claim
16 words
The metal of claim 31, further comprising depositing a conductive via metal in the via holes.
Claim 34
Dependent Claim
62 words
The method of claim 32 wherein a first pad on a first integrated circuit chip is connected to a second pad on a second integrated circuit chip by a continuous conductive path comprising via metal in a first via hole deposited on the first pad, a second metal line, and via metal in a second via hole deposited on the second pad.
Claim 35
Dependent Claim
68 words
The method of claim 32 wherein a first pad on a first integrated circuit chip is connected to a second pad on a second integrated circuit chip by a continuous conductive path comprising via metal deposited in a first via hole on the first pad, routing metal deposited on the top surface of the substrate, and via metal in a second via hole deposited on the second pad.
Claim 36
Dependent Claim
50 words
The method of claim 34 wherein the continuous conductive path consists of the via metal in the first via hole deposited on the first pad, the routing metal deposited on the top surface of the substrate, and the via metal in the second via hole deposited on the second pad.
Claim 37
Dependent Claim
130 words
The method of claim 32, wherein the first metal lines are spaced parallel lines, the second metal lines are spaced parallel lines approximately orthogonal to the first metal lines, and a first pad on a first integrated circuit chip is connected to a second pad on a second integrated circuit chip by a continuous conductive path comprising via metal in a first via hole deposited on the first pad, a first metal line connected to the via metal in the first via hole, via metal in a second via hole connected to the first metal line, a second metal line connected to the via metal in the second via hole, and via metal in a third via hole connected to the second metal line and deposited on the second pad.
Claim 38
Dependent Claim
21 words
The method of claim 36 wherein the pads are aluminum, the metal lines are copper, and the dielectrics are a polymer.
Claim 39
Dependent Claim
11 words
The method of claim 37 wherein the base dielectric is kapton.
Claim 40
Dependent Claim
12 words
The method of claim 38 wherein the base is an alumina frame.
Claim 41
Dependent Claim
18 words
The method of claim 30 wherein conductive pads on the integrated circuit chip are exposed by via holes.
Claim 42
Independent Claim
245 words
A method of forming conductive vias in a multilevel substrate, including forming every via hole to receive a conductor in a single step, comprising the following steps in the sequence set forth: disposing a first layer comprising first horizontal copper lines covered by a first polymer on a base; disposing a second layer comprising second horizontal copper lines covered by a second polymer on the first layer such that a portion of each first copper line is not beneath any second copper line; forming a plurality of vertical via holes in the top of the second polymer by applying an etch, the polymers and copper lines having sufficiently different physical properties to assure that the etch attacks the polymers but is blocked by the copper lines without deforming the copper lines to any significant degree whereby the copper lines provide a barrier to the etch, so as to form all the via holes in the substrate in a single etch step wherein some via holes extend through only the second polymer and terminate at the top surfaces of the second copper lines while other via holes extend through both the first and second polymers and terminate at the top surfaces of said portions of the first copper lines, thereby exposing both the first and second copper lines; and depositing a conductive material in all the via holes to form conductive vias from the first and second copper lines to the top of the second polymer.
Claim 43
Independent Claim
245 words
A method of forming conductive vias in a multilevel substrate, including forming every via hole to receive a conductor in a single step, comprising the following steps in the sequence set forth: disposing a first layer comprising first horizontal copper lines covered by a first polymer on a base; disposing a second layer comprising second horizontal copper lines covered by a second polymer on the first layer such that a portion of each first copper line is not beneath any second copper line; forming a plurality of vertical via holes in the top of the second polymer by applying an etch, the polymers and copper lines having sufficiently different physical properties to assure that the etch attacks the polymers but is blocked by the copper lines without deforming the copper lines to any significant degree whereby the copper lines provide a barrier to the etch, so as to form all the via holes in the substrate in a single etch step wherein some via holes extend through only the second polymer and terminate at the top surfaces of the second copper lines while other via holes extend through both the first and second polymers and terminate at the top surfaces of said portions of the first copper lines, thereby exposing both the first and second copper lines; and depositing a conductive material in all the via holes to form conductive vias from the first and second copper lines to the top of the second polymer.
Claim 44
Dependent Claim
15 words
The method of claim 41 wherein the via holes are formed individually by laser drilling.
Claim 45
Dependent Claim
16 words
The method of claim 41 wherein the via holes are formed concurrently by anisotropic dry etching.
Claim 46
Dependent Claim
17 words
The method of claim 41 wherein the first and second copper lines are patterned by wet etching.
Claim 47
Dependent Claim
17 words
The method of claim 41 wherein said first metal lines are pads on an integrated circuit chip.
Claim 48
Dependent Claim
29 words
The method of claim 41, further including mounting a plurality of integrated circuit chips on the surface of the substrate after depositing the conductive material in the via holes.
Claim 49
Independent Claim
212 words
A method of forming every via hole in a multilevel substrate in a single step, comprising the following steps in the sequence set forth: depositing a plurality of first metal lines on a base; depositing a first dielectric layer over the first metal lines; depositing a plurality of second metal lines on the first dielectric layer such that selected first metal lines comprise uncovered portions without any second metal line directly above; depositing a second dielectric layer over the second metal lines; and then forming via holes by applying an etch, the dielectrics and metal lines having sufficiently different physical properties to assure that the etch attacks the dielectrics but is blocked by the metal lines without deforming the metal lines to any significant degree whereby the metal lines provide a barrier to the etch thereby forming via holes at the top of the second dielectric which extend through the second dielectric and terminate at the top surfaces of selected second metal lines concurrently with forming other via holes which extend through the second dielectric and the first dielectric and terminate at the top surfaces of the uncovered portions of the first metal lines, thereby forming each of the via holes in the substrate with a single etch in a single step.
Claim 50
Independent Claim
212 words
A method of forming every via hole in a multilevel substrate in a single step, comprising the following steps in the sequence set forth: depositing a plurality of first metal lines on a base; depositing a first dielectric layer over the first metal lines; depositing a plurality of second metal lines on the first dielectric layer such that selected first metal lines comprise uncovered portions without any second metal line directly above; depositing a second dielectric layer over the second metal lines; and then forming via holes by applying an etch, the dielectrics and metal lines having sufficiently different physical properties to assure that the etch attacks the dielectrics but is blocked by the metal lines without deforming the metal lines to any significant degree whereby the metal lines provide a barrier to the etch thereby forming via holes at the top of the second dielectric which extend through the second dielectric and terminate at the top surfaces of selected second metal lines concurrently with forming other via holes which extend through the second dielectric and the first dielectric and terminate at the top surfaces of the uncovered portions of the first metal lines, thereby forming each of the via holes in the substrate with a single etch in a single step.
Claim 51
Independent Claim
312 words
A method of forming every via hole in a multilevel substrate in a single step, comprising: depositing a plurality of first metal lines on a base; depositing a first dielectric layer over the first metal lines and base; depositing a plurality of second metal lines on the first dielectric layer such that each first metal line comprises an uncovered portion without any second metal line above; depositing a second dielectric layer over the second metal lines and the first dielectric layer; depositing a plurality of third metal lines on the second dielectric layer such that each second metal line comprises an uncovered portion without any third metal line above and the uncovered portions of the first metal lines are not covered by any third metal line; depositing a third dielectric layer over the third metal lines and the second dielectric layer; depositing a plurality of fourth metal lines on the third dielectric layer such that each third metal line comprises an uncovered portion without any fourth metal line above, and the uncovered portions of the second and first metal lines are not covered by any fourth metal line; depositing a fourth dielectric layer over the fourth metal lines and the third dielectric layer; and forming each of the via holes in the substrate in a single step by applying an etch, the dielectrics and metal lines having sufficiently different physical properties to assure that the etch attacks the dielectrics but is blocked by the metal lines without deforming the metal lines to any significant degree whereby the metal lines provide a barrier to the etch, so that the via holes extend from the top of the fourth dielectric layer to the top surfaces of the fourth metal lines and the top surfaces of uncovered portions of the third, second and first metal lines wherein separate via holes extend to separate metal lines.
Claim 52
Independent Claim
312 words
A method of forming every via hole in a multilevel substrate in a single step, comprising: depositing a plurality of first metal lines on a base; depositing a first dielectric layer over the first metal lines and base; depositing a plurality of second metal lines on the first dielectric layer such that each first metal line comprises an uncovered portion without any second metal line above; depositing a second dielectric layer over the second metal lines and the first dielectric layer; depositing a plurality of third metal lines on the second dielectric layer such that each second metal line comprises an uncovered portion without any third metal line above and the uncovered portions of the first metal lines are not covered by any third metal line; depositing a third dielectric layer over the third metal lines and the second dielectric layer; depositing a plurality of fourth metal lines on the third dielectric layer such that each third metal line comprises an uncovered portion without any fourth metal line above, and the uncovered portions of the second and first metal lines are not covered by any fourth metal line; depositing a fourth dielectric layer over the fourth metal lines and the third dielectric layer; and forming each of the via holes in the substrate in a single step by applying an etch, the dielectrics and metal lines having sufficiently different physical properties to assure that the etch attacks the dielectrics but is blocked by the metal lines without deforming the metal lines to any significant degree whereby the metal lines provide a barrier to the etch, so that the via holes extend from the top of the fourth dielectric layer to the top surfaces of the fourth metal lines and the top surfaces of uncovered portions of the third, second and first metal lines wherein separate via holes extend to separate metal lines.
Claim 53
Independent Claim
211 words
A method of forming every via hole in a multilevel substrate in a single step, comprising the following steps in the sequence set forth: depositing a plurality of first horizontal copper lines on a planar base; depositing a first planar dielectric layer over the first copper lines and the base; depositing a plurality of second horizontal copper lines, approximately orthogonal to the first copper lines, on the first dielectric layer such that portions of each first copper line are not directly below any second copper line; depositing a second planar dielectric layer over the second copper lines and the first dielectric layer; and forming vertical via holes by applying an etch, the dielectrics and copper lines having sufficiently different physical properties to assure that the etch attacks the dielectrics but is blocked by the copper lines whereby the copper lines provide an etch stop, with some vertical via holes extending through only the second dielectric to expose the top surfaces of second copper lines and other vertical via holes extending through both the second dielectric and the first dielectric to expose the top surfaces of said portions of the first copper lines without deforming any copper lines, thereby forming each of the via holes in the substrate in a single step.
Claim 54
Independent Claim
211 words
A method of forming every via hole in a multilevel substrate in a single step, comprising the following steps in the sequence set forth: depositing a plurality of first horizontal copper lines on a planar base; depositing a first planar dielectric layer over the first copper lines and the base; depositing a plurality of second horizontal copper lines, approximately orthogonal to the first copper lines, on the first dielectric layer such that portions of each first copper line are not directly below any second copper line; depositing a second planar dielectric layer over the second copper lines and the first dielectric layer; and forming vertical via holes by applying an etch, the dielectrics and copper lines having sufficiently different physical properties to assure that the etch attacks the dielectrics but is blocked by the copper lines whereby the copper lines provide an etch stop, with some vertical via holes extending through only the second dielectric to expose the top surfaces of second copper lines and other vertical via holes extending through both the second dielectric and the first dielectric to expose the top surfaces of said portions of the first copper lines without deforming any copper lines, thereby forming each of the via holes in the substrate in a single step.
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