US5220279A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Probe apparatus
Assignee: Tokyo Electron Ltd
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Filing: 1992-06-12
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Granted: 1993-06-15
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Expires: 2012-06-12
Abstract
Abstract A probe apparatus has a mount on which the object to be examined is placed, a large number of vertical probe needles, brought into contact with electrode pads of the object to be examined, for measuring the electrical characteristics of the object to be examined, and a cleaning block including a cleaning member for removing waste adhered to the vertical probe needles, the cleaning member including a cloth which is made up of extra fine fibers. Using the cleaning member, waste and the like adhered to the vertical probe needles can be removed, ensuring the long life of the vertical probe needles.
Inventors
- 👤 Yasusi Nagasawa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 14:21
CPC Classifications
G; G01; G01R; G01R1/00; G01R1/02; G01R1/06; G01R1/067; G01R1/073; G01R1/07307; G01R1/07314; H; H10; H10P; H10P72/00; H10P72/50
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
77 words
A probe apparatus comprising: a mount on which an object to be examined is placed; a large number of vertical probe needles, being brought into contact with electrode pads of the object to be examined, for measuring electrical characteristics of the object to be examined; and a cleaning block including a cleaning member for removing waste adhered to said vertical probe needles; wherein said cleaning member comprises a cloth which is made up of extra fine fibers.
Claim 2
Dependent Claim
77 words
A probe apparatus comprising: a mount on which an object to be examined is placed; a large number of vertical probe needles, being brought into contact with electrode pads of the object to be examined, for measuring electrical characteristics of the object to be examined; and a cleaning block including a cleaning member for removing waste adhered to said vertical probe needles; wherein said cleaning member comprises a cloth which is made up of extra fine fibers.
Claim 3
Dependent Claim
39 words
The probe apparatus according to claim 1, wherein said cleaning block further includes an elastic member for absorbing pressure which is applied to said vertical probe needles when said vertical probe needles and said cleaning member contact each other.
Claim 4
Dependent Claim
14 words
The probe apparatus according to claim 2, wherein said elastic member is a spring.
Claim 5
Dependent Claim
15 words
The probe apparatus according to claim 1, wherein said cleaning block further includes lift means.
Claim 6
Dependent Claim
30 words
The probe apparatus according to claim 4, wherein said lift means is one of an air cylinder driven by a solenoid valve and a gear mechanism driven by a motor.
Claim 7
Dependent Claim
27 words
The probe apparatus according to claim 1, further comprising suction means, arranged in the vicinity of said cleaning member, for removing waste caught by said cleaning member.
Claim 8
Dependent Claim
25 words
The probe apparatus according to claim 1, wherein said cleaning block can be disassembled, and said cleaning member can be exchanged for a new one.
Claim 9
Dependent Claim
20 words
The probe apparatus according to claim 1, wherein said extra fine fibers are made of polyamide resin or polyester resin.
Claim 10
Dependent Claim
45 words
The probe apparatus according to claim 1, further comprising control means for detecting the position of said vertical probe needles and said cleaning member relative to each other and for controlling upward and downward movement of said cleaning member in accordance with the detection result.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-06-14 | 1996-12-14 | 1997-06-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-06-14 | 2000-12-14 | 2001-06-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-06-14 | 2004-12-14 | 2005-06-15 | $7700.00 | Window Closed / Lapsed |