Probe device

Abstract

Abstract PURPOSE:To effectively sharpen a probe stylus by so providing that the polishing surface of a polisher perpendicularly cross the contacting face of the stylus. CONSTITUTION:After a vacuum sucking base 5 arrives at the lower side of a probe card 2 by a vacuum sucking base moving unit 6, the base 5 is elevationally moved by a vacuum attraction elevational moving unit 7. A polisher 8 for polishing the sidewall 1b of the end 1a of a probe stylus 1 of a probe card 2 is sucked fixedly to the base 5. The polisher 8 has a ceramic polishing piece 8a formed in a trapezoidal sectional and a disk 8b provided in the vacuum sucking direction of the base 5 on the bottom of the piece 8a to obliquely cross the inner wall 1b surrounded by the ends 1a of a plurality of styluses 1 of the card 2. Other polisher 9 has a ceramic polishing piece 8a formed in an inverted trapezoidal sectional recess and a disc 9b provided in the vacuum sucking direction of the base 5 on the bottom of the piece 9a to obliquely cross the outer wall 1c surrounded by the ends 1a of the styluses 1 of the card 2.

Inventors

• 👤 Yuichi Abe

Bibliographic Details