Automatic wafer prober having a probe scrub routine

Claim 2

In a method for scrubbing clean the probe tips of an automatic wafer prober of the type having an array of wafer probes for making electrical contact to pads on the respective die of a wafer with a planar scrubbing surface of an abrasive element disposed off of the wafer, the steps of: automatically stepping the wafer prober in a sequence to selected die on a wafer for electrically testing the probed die; automatically cleaning the probe tips by stepping the probe tips and the abrasive element at right angles relative to each other so that in response to the stepping, (a) the probe tips and the planar scrubbing surface contact and (b) while the tips and scrubbing surface contact the tips are deflected onto and along the planar scrubbing surface to produce a rubbing action which cleans the tips without damaging the tips.

Claim 3

The method of claim 1 including the steps of; automatically interrupting the prober sequence after a predetermined number of die have been probed; and automatically returning the wafer prober to the interrupted prober sequence after scrubbing of the probe tips.

Claim 4

The method of claim 2 including the step of selecting the predetermined number of die to be probed before said interruption of the probe sequence as a function of the rate at which the probe tips are expected to be fouled during probing of the particular die under test.

Claim 5

The method of claim 1 further including stepping the probe tips onto and along the planar scrubbing surface more than once.

Claim 6

In an automatic wafer prober of the type having an array of wafer probes for sequentially making electrical contact to an array of contact pads of each die to be tested on a wafer; stepping means for automatically stepping the wafer prober in a sequence to selected die on a wafer for electrically testing the probed die; and scrub block means disposed proximate the wafer for cleaning the probe tips by scrubbing the tips on a planar scrubbing surface of said scrub block means; said stepping means including means for automatically stepping the probe tips at right angles relative to the scrubbing surface so that in response to the stepping the (a) probe tips and the planar scrubbing surface contact and (b) while the tips and planar scrubbing surface contact the tips are deflected onto and along the planar scrubbing surface to produce a rubbing action which cleans the tips without damaging the tips.

Claim 7

In an automatic wafer prober of the type having an array of wafer probes for sequentially making electrical contact to an array of contact pads of each die to be tested on a wafer; stepping means for automatically stepping the wafer prober in a sequence to selected die on a wafer for electrically testing the probed die; and scrub block means disposed proximate the wafer for cleaning the probe tips by scrubbing the tips on a planar scrubbing surface of said scrub block means; said stepping means including means for automatically stepping the probe tips at right angles relative to the scrubbing surface so that in response to the stepping the (a) probe tips and the planar scrubbing surface contact and (b) while the tips and planar scrubbing surface contact the tips are deflected onto and along the planar scrubbing surface to produce a rubbing action which cleans the tips without damaging the tips.

Claim 8

The apparatus of claim 5 wherein said scrub block means includes an alignment flat for contact with a flat of the wafer for aligning the wafer in the wafer prober.

Claim 9

The apparatus of claim 5 wherein the wafer prober includes; chuck means for holding the wafer relative to the array of wafer probes; and fastener means for fixedly securing said scrub block means to said chuck means.

Claim 10

The apparatus of claim 7 wherein said fastener means positions the scrubbing surface of said scrub block means below the upper surface of the wafer under test.

Claim 11

The apparatus of claim 5 including: interrupting means for automatically interrupting the prober sequence after a predetermined number of die have been probed; and means for automatically returning the wafer prober to the interrupted prober sequence after scrubbing of the probe tips.

Claim 12

The apparatus of claim 9 including select means for selecting the predetermined number of die to be probed before interruption of the probe sequence for scrubbing of the probe tips.