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US5214282A
Expired / Lapsed
US
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Method and apparatus for processing a minute portion of a specimen
Assignee: Hitachi Ltd
•
Filing: 1991-05-30
•
Granted: 1993-05-25
•
Expires: 2011-05-30
Abstract
Abstract An image of a specimen which is to be processed is detected by a near-field optical scanning microscope. An image with extremely high resolution for identifying a minute portion of several tens nm is detected. The detected minute portion is processed by, for example, a tunnel current of a scanning tunneling microscope.
Inventors
- 👤 Hiroshi Yamaguchi
- 👤 Minori Noguchi
- 👤 Makiko Kohno
- 👤 Toshihiko Nakata
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 12:08
CPC Classifications
G; G01; G01Q; G01Q30/00; G01Q30/02; B; B82; B82Y; B82Y20/00; B82Y35/00; G01Q60/00; G01Q60/18; G01Q60/22; H; H01; H01J; H01J37/00; H01J37/26; H01J37/28; G01N; G01N25/00; G01N25/18; Y; Y10; Y10S; Y10S977/00; Y10S977/84; Y10S977/849; Y10S977/855; Y10S977/859; Y10S977/86; Y10S977/861; Y10S977/862; Y10S977/875; Y10S977/879
Claims Analysis
Total Claims: 95
Claim 1
Independent Claim
51 words
A method for processing a minute portion comprising the steps of: detecting a minute portion on an element or substrate of an electron device by a near-field optical scanning microscope; and subjecting the detected minute portion to at least one of processing, film forming and annealing by a scanning tunneling microscope.
Claim 2
Independent Claim
51 words
A method for processing a minute portion comprising the steps of: detecting a minute portion on an element or substrate of an electron device by a near-field optical scanning microscope; and subjecting the detected minute portion to at least one of processing, film forming and annealing by a scanning tunneling microscope.
Claim 3
Dependent Claim
46 words
A method according to claim 1, wherein the step of detecting a near-field optical scanning microscope includes utilizing a near-field optical scanning microscope tip having a glass portion with a metal thin film coated thereon and a transparent conductive layer formed on the metal thin film
Claim 4
Dependent Claim
44 words
A method according to claim 2, wherein the transparent conductive layer of the near-field optical scanning microscope tip has a refractive index substantially equal to a medium disposed between the near-field optical scanning microscope tip and the element or substrate of the electron device.
Claim 5
Dependent Claim
96 words
A method according to claim 1, wherein the steps of detecting and subjecting includes positioning the element or substrate with respect to the near-field optical scanning microscope for detecting a minute portion thereof, moving one of the element or substrate of the electron device and the near-field optical scanning microscope and the scanning tunnelling microscope with respect to one another so that the scanning tunnelling microscope and element or substrate of the electron device are positioned for subjecting the minute portion to at least one of processing, film forming and annealing by the scanning tunnelling microscope.
Claim 6
Dependent Claim
56 words
A method according to claim 4, wherein the step of moving includes utilizing a tilting mechanism which maintains a predetermined relation of the near-field optical scanning microscope to the element or substrate of the electron device upon movement of the element or substrate of the electron device and scanning tunnelling microscope with respect to one another.
Claim 7
Dependent Claim
43 words
A method according to claim 1, wherein the electron device is a memory device and the step of subjecting includes one of removal and addition of an atom from or to the minute portion of the element or substrate of the memory device.
Claim 8
Dependent Claim
21 words
A method according to claim 6, wherein the element of the memory device is a Langumuir-Blodgett's film formed on a substrate.
Claim 9
Independent Claim
66 words
A method for processing a minute portion comprising the steps of: detecting roughly an element or substrate of an electron device by a scanning electron microscope; detecting a minute portion on the element or substrate of the electron device by a near-field optical scanning microscope; and subjecting the detected minute portion to at least one of processing, film forming and annealing by a scanning tunneling microscope.
Claim 10
Independent Claim
66 words
A method for processing a minute portion comprising the steps of: detecting roughly an element or substrate of an electron device by a scanning electron microscope; detecting a minute portion on the element or substrate of the electron device by a near-field optical scanning microscope; and subjecting the detected minute portion to at least one of processing, film forming and annealing by a scanning tunneling microscope.
Claim 11
Dependent Claim
43 words
A method according to claim 8, wherein the electron device is a memory device and the step of subjecting includes one of removal and addition of an atom from or to the minute portion of the element or substrate of the memory device.
Claim 12
Dependent Claim
21 words
A method according to claim 9, wherein the element of the memory device is a Langumuir-Blodgett's film formed on a substrate.
Claim 13
Independent Claim
51 words
A method for processing a minute portion comprising the steps of: detecting a minute portion on an element or substrate of an electron device by a scanning tunneling microscope; and subjecting the detected minute portion to at least one of processing, film forming and annealing by a near-field optical scanning microscope.
Claim 14
Independent Claim
51 words
A method for processing a minute portion comprising the steps of: detecting a minute portion on an element or substrate of an electron device by a scanning tunneling microscope; and subjecting the detected minute portion to at least one of processing, film forming and annealing by a near-field optical scanning microscope.
Claim 15
Dependent Claim
43 words
A method according to claim 11, wherein the electron device is a memory device and the step of subjecting includes one of removal and addition of an atom from or to the minute portion of the element or substrate of the memory device.
Claim 16
Dependent Claim
21 words
A method according to claim 12, wherein the element of the memory device is a Langumuir-Blodgett's film formed on a substrate.
Claim 17
Independent Claim
66 words
A method for processing a minute portion comprising the steps of: detecting roughly an element or substrate of an electron device by a scanning electron microscope; detecting a minute portion on the element or substrate of the electron device by a scanning tunneling microscope; and subjecting the detected minute portion to at least one of processing, film forming and annealing by a near-field optical scanning microscope.
Claim 18
Independent Claim
66 words
A method for processing a minute portion comprising the steps of: detecting roughly an element or substrate of an electron device by a scanning electron microscope; detecting a minute portion on the element or substrate of the electron device by a scanning tunneling microscope; and subjecting the detected minute portion to at least one of processing, film forming and annealing by a near-field optical scanning microscope.
Claim 19
Dependent Claim
43 words
A method according to claim 14, wherein the electron device is a memory device and the step of subjecting includes one of removal and addition of an atom from or to the minute portion of the element or substrate of the memory device.
Claim 20
Dependent Claim
21 words
A method according to claim 15, wherein the element of the memory device is a Langumuir-Blodgett's film formed on a substrate.
Claim 21
Independent Claim
55 words
A method for processing a minute portion comprising the steps of: detecting a minute portion on an element or substrate of an electron device by a near-field optical scanning microscope; and subjecting the detected minute portion to at least one of sputtering, CVD film forming and ion beam implantation by a focused ion beam-processing system.
Claim 22
Independent Claim
55 words
A method for processing a minute portion comprising the steps of: detecting a minute portion on an element or substrate of an electron device by a near-field optical scanning microscope; and subjecting the detected minute portion to at least one of sputtering, CVD film forming and ion beam implantation by a focused ion beam-processing system.
Claim 23
Independent Claim
70 words
A method for processing a minute portion comprising the steps of: detecting roughly an element or substrate of an electron device by a scanning electron microscope; detecting a minute portion on the element or substrate of the electron device by a near-field optical scanning microscope; and subjecting the detected minute portion to at least one of sputtering, CVD film forming and ion beam implantation by a focused ion beam-processing system.
Claim 24
Independent Claim
70 words
A method for processing a minute portion comprising the steps of: detecting roughly an element or substrate of an electron device by a scanning electron microscope; detecting a minute portion on the element or substrate of the electron device by a near-field optical scanning microscope; and subjecting the detected minute portion to at least one of sputtering, CVD film forming and ion beam implantation by a focused ion beam-processing system.
Claim 25
Independent Claim
46 words
A method for analyzing a minute portion comprising the steps of: detecting a minute portion on an element or substrate of an electron device by a near-field optical scanning microscope; and analyzing the detected minute portion by a scanning tunneling microscope or a scanning tunneling analyzer.
Claim 26
Independent Claim
46 words
A method for analyzing a minute portion comprising the steps of: detecting a minute portion on an element or substrate of an electron device by a near-field optical scanning microscope; and analyzing the detected minute portion by a scanning tunneling microscope or a scanning tunneling analyzer.
Claim 27
Independent Claim
61 words
A method for analyzing a minute portion comprising the steps of: detecting roughly an element or substrate of an electron device by a scanning electron microscope; detecting a minute portion on the element or substrate of the electron device by a near-field optical scanning microscope; and analyzing the detected minute portion by a scanning tunneling microscope or a scanning tunneling analyzer.
Claim 28
Independent Claim
61 words
A method for analyzing a minute portion comprising the steps of: detecting roughly an element or substrate of an electron device by a scanning electron microscope; detecting a minute portion on the element or substrate of the electron device by a near-field optical scanning microscope; and analyzing the detected minute portion by a scanning tunneling microscope or a scanning tunneling analyzer.
Claim 29
Independent Claim
41 words
A method for analyzing a minute portion comprising the steps of: detecting a minute portion on an element or substrate of an electron device by a scanning tunneling microscope; and analyzing the detected minute portion by a near-field optical scanning microscope.
Claim 30
Independent Claim
41 words
A method for analyzing a minute portion comprising the steps of: detecting a minute portion on an element or substrate of an electron device by a scanning tunneling microscope; and analyzing the detected minute portion by a near-field optical scanning microscope.
Claim 31
Independent Claim
56 words
A method for analyzing a minute portion comprising the steps of: detecting roughly an element or substrate of an electron device by a scanning electron microscope; detecting a minute portion on the element or substrate of the electron device by a scanning tunneling microscope; and analyzing the detected minute portion by a near-field optical scanning microscope.
Claim 32
Independent Claim
56 words
A method for analyzing a minute portion comprising the steps of: detecting roughly an element or substrate of an electron device by a scanning electron microscope; detecting a minute portion on the element or substrate of the electron device by a scanning tunneling microscope; and analyzing the detected minute portion by a near-field optical scanning microscope.
Claim 33
Independent Claim
65 words
An apparatus or processing a minute portion comprising: a near-field optical scanning microscope for detecting a minute portion on an element or substrate of an electron device; and a scanning tunneling microscope for subjecting the detected minute portion to at least one of processing, film forming and annealing on the basis of the information on the minute portion detected by said near-field optical scanning microscope.
Claim 34
Independent Claim
65 words
An apparatus or processing a minute portion comprising: a near-field optical scanning microscope for detecting a minute portion on an element or substrate of an electron device; and a scanning tunneling microscope for subjecting the detected minute portion to at least one of processing, film forming and annealing on the basis of the information on the minute portion detected by said near-field optical scanning microscope.
Claim 35
Dependent Claim
41 words
An apparatus according to claim 23, wherein the near-field optical scanning microscope includes a near-field optical scanning microscope tip having a glass portion with a metal thin film coated thereon and a transparent conductive layer formed on the metal thin film.
Claim 36
Dependent Claim
44 words
An apparatus according to claim 24, wherein the transparent conductive layer of the near-field optical scanning microscope tip has a refractive index substantially equal to a medium disposed between the near-field optical scanning microscope tip and the element or substrate of the electron device.
Claim 37
Dependent Claim
99 words
An apparatus according to claim 23, further comprising means for positioning the element or substrate of the electron device with respect to the near-field optical scanning microscope for detecting a minute portion thereof, and means for moving one of the element or substrate of the electron device and the near-field optical scanning microscope and the scanning tunnelling microscope with respect to one another so that the scanning tunnelling microscope and element or substrate of the electron device are positioned for subjecting the minute portion to at least one of processing, film forming and annealing by the scanning tunnelling microscope.
Claim 38
Dependent Claim
53 words
An apparatus according to claim 26, wherein the moving means includes a tilting mechanism which a predetermined relation of the near-field optical scanning microscope to the element or substrate of the electron device upon movement of the element or substrate of the electron device and scanning tunnelling microscope with respect to one another.
Claim 39
Dependent Claim
48 words
An apparatus according to claim 23, wherein said apparatus further comprises a vacuum chamber in which the element or substrate of the electron device is disposed, and the respective principal parts of said near-field optical scanning microscope and said scanning tunneling microscope are installed in said vacuum chamber.
Claim 40
Dependent Claim
15 words
An apparatus according to claim 28, wherein said vacuum chamber has a processing gas inlet.
Claim 41
Dependent Claim
23 words
An apparatus according to claim 28, wherein said apparatus further comprises a specimen table with a driving unit disposed in said vacuum chamber.
Claim 42
Dependent Claim
115 words
An apparatus according to claim 23, wherein said apparatus further comprises: a vacuum chamber with a gas exhausting unit and a processing gas inlet; a specimen table in said vacuum chamber for mounting the element or substrate of the electron device; a driving unit for driving said specimen table in X, Y and Z directions by rough and minute steps; and a scanning electron microscope for roughly detecting a portion of the element or substrate of the electron device, and wherein said near-field optical scanning microscope detects the minute portion on the element or substrate of the electron device on the basis of the rough information on the portion detected by said scanning electron microscope.
Claim 43
Dependent Claim
41 words
An apparatus according to claim 23, wherein said apparatus further comprises means for rotating at least one of tips of said near-field optical scanning microscope and said scanning tunneling microscope round an end point of said at least one of tips.
Claim 44
Independent Claim
93 words
An apparatus for processing a minute portion comprising: a scanning electron microscope for roughly detecting an element or substrate of an electron device; a near-field optical scanning microscope for detecting a minute portion on the element or substrate of the electron device on the basis of the rough information detected by said scanning electron microscope; and a scanning tunneling microscope for subjecting the detected minute portion to at least one of processing, film forming and annealing on the basis of the information on the minute portion detected by said near-field optical scanning microscope.
Claim 45
Independent Claim
93 words
An apparatus for processing a minute portion comprising: a scanning electron microscope for roughly detecting an element or substrate of an electron device; a near-field optical scanning microscope for detecting a minute portion on the element or substrate of the electron device on the basis of the rough information detected by said scanning electron microscope; and a scanning tunneling microscope for subjecting the detected minute portion to at least one of processing, film forming and annealing on the basis of the information on the minute portion detected by said near-field optical scanning microscope.
Claim 46
Independent Claim
64 words
An apparatus for processing a minute portion comprising: a scanning tunneling microscope for detecting a minute portion on an element or substrate of an electron device; and a near-field optical scanning microscope for subjecting the detected minute portion to at least one of processing, film forming and annealing on the basis of the information on the minute portion detected by said scanning tunneling microscope.
Claim 47
Independent Claim
64 words
An apparatus for processing a minute portion comprising: a scanning tunneling microscope for detecting a minute portion on an element or substrate of an electron device; and a near-field optical scanning microscope for subjecting the detected minute portion to at least one of processing, film forming and annealing on the basis of the information on the minute portion detected by said scanning tunneling microscope.
Claim 48
Dependent Claim
41 words
An apparatus according to claim 34, wherein said apparatus further comprises means for rotating at least one of tips of said scanning tunneling microscope and said near-field optical scanning microscope round an end point of said at least one of tips.
Claim 49
Independent Claim
92 words
An apparatus for processing a minute portion comprising: a scanning electron microscope for roughly detecting an element or substrate of an electron device; a scanning tunneling microscope for detecting a minute portion on the element or substrate of the electron device on the basis of the rough information detected by said scanning electron microscope; and a near-field optical scanning microscope for subjecting the detected minute portion to at least one of processing, film forming and annealing on the basis of the information on the minute portion detected by said scanning tunneling microscope.
Claim 50
Independent Claim
92 words
An apparatus for processing a minute portion comprising: a scanning electron microscope for roughly detecting an element or substrate of an electron device; a scanning tunneling microscope for detecting a minute portion on the element or substrate of the electron device on the basis of the rough information detected by said scanning electron microscope; and a near-field optical scanning microscope for subjecting the detected minute portion to at least one of processing, film forming and annealing on the basis of the information on the minute portion detected by said scanning tunneling microscope.
Claim 51
Independent Claim
69 words
An apparatus for processing a minute portion comprising: a near-field optical scanning microscope for detecting a minute portion on an element or substrate of an electron device; and a focused ion beam-processing system for subjecting the detected minute portion to at least one of sputtering, CVD film forming and ion beam implantation on he basis of the information on the minute portion detected by said near-field optical scanning microscope.
Claim 52
Independent Claim
69 words
An apparatus for processing a minute portion comprising: a near-field optical scanning microscope for detecting a minute portion on an element or substrate of an electron device; and a focused ion beam-processing system for subjecting the detected minute portion to at least one of sputtering, CVD film forming and ion beam implantation on he basis of the information on the minute portion detected by said near-field optical scanning microscope.
Claim 53
Independent Claim
97 words
An apparatus for processing a minute portion comprising: a scanning electron microscope for roughly detecting an element or substrate of an electron device; a near-field optical scanning microscope for detecting a minute portion on the element or substrate of the electron device on the basis of the rough information detected by said scanning electron microscope; and a focused ion beam-processing system for subjecting the detected minute portion to at least one of sputtering, CVD film forming and ion beam implantation on the basis of the information on the minute portion detected by said near-field optical scanning microscope.
Claim 54
Independent Claim
97 words
An apparatus for processing a minute portion comprising: a scanning electron microscope for roughly detecting an element or substrate of an electron device; a near-field optical scanning microscope for detecting a minute portion on the element or substrate of the electron device on the basis of the rough information detected by said scanning electron microscope; and a focused ion beam-processing system for subjecting the detected minute portion to at least one of sputtering, CVD film forming and ion beam implantation on the basis of the information on the minute portion detected by said near-field optical scanning microscope.
Claim 55
Dependent Claim
53 words
An apparatus according to claim 38, wherein said apparatus further comprises a vacuum chamber in which the element or substrate of the electron device is disposed, and the respective principal parts of said scanning electron microscope, said near-field optical scanning microscope and said focused ion beam-processing system are installed in said vacuum chamber.
Claim 56
Dependent Claim
29 words
An apparatus according to claim 39, wherein said apparatus further comprises means for rotating a tip of said near-field optical scanning microscope round an end point of said tip.
Claim 57
Independent Claim
60 words
An apparatus for analyzing a minute portion comprising: a near-field optical scanning microscope for detecting a minute portion on an element or substrate of an electron device; and a scanning tunneling microscope or a scanning tunneling analyzer for analyzing the detected minute portion on the basis of the information on the minute portion detected by said near-field optical scanning microscope.
Claim 58
Independent Claim
60 words
An apparatus for analyzing a minute portion comprising: a near-field optical scanning microscope for detecting a minute portion on an element or substrate of an electron device; and a scanning tunneling microscope or a scanning tunneling analyzer for analyzing the detected minute portion on the basis of the information on the minute portion detected by said near-field optical scanning microscope.
Claim 59
Independent Claim
88 words
An apparatus for analyzing a minute portion comprising: a scanning electron microscope for roughly detecting an element or substrate of an electron device; a near-field optical scanning microscope for detecting a minute portion on the element or substrate of the electron device on the basis of the rough information detected by said scanning electron microscope; and a scanning tunneling microscope or a scanning tunneling analyzer for analyzing the detected minute portion on the basis of the information on the minute portion detected by said near-field optical scanning microscope.
Claim 60
Independent Claim
88 words
An apparatus for analyzing a minute portion comprising: a scanning electron microscope for roughly detecting an element or substrate of an electron device; a near-field optical scanning microscope for detecting a minute portion on the element or substrate of the electron device on the basis of the rough information detected by said scanning electron microscope; and a scanning tunneling microscope or a scanning tunneling analyzer for analyzing the detected minute portion on the basis of the information on the minute portion detected by said near-field optical scanning microscope.
Claim 61
Independent Claim
54 words
An apparatus for analyzing a minute portion comprising: a scanning tunneling microscope for detecting a minute portion on an element or substrate of an electron device; and a near-field optical scanning microscope for analyzing the detected minute portion on the basis of the information on the minute portion detected by said scanning tunneling microscope.
Claim 62
Independent Claim
54 words
An apparatus for analyzing a minute portion comprising: a scanning tunneling microscope for detecting a minute portion on an element or substrate of an electron device; and a near-field optical scanning microscope for analyzing the detected minute portion on the basis of the information on the minute portion detected by said scanning tunneling microscope.
Claim 63
Dependent Claim
30 words
An apparatus for analyzing a minute portion according to claim 43 wherein light for the above near-field optical scanning microscope is a laser beam with a wide wave length band.
Claim 64
Dependent Claim
25 words
An apparatus for analyzing a minute portion according to claim 43 wherein light for the above near-field optical scanning microscope is a dye laser beam.
Claim 65
Independent Claim
82 words
An apparatus for analyzing a minute portion comprising: a scanning electron microscope for roughly detecting an element or substrate of an electron device; a scanning tunneling microscope for detecting a minute portion on the element or substrate of the electron device on the basis of the rough information detected by said scanning electron microscope; and a near-field optical scanning microscope for analyzing the detected minute portion on the basis of the information on the minute portion detected by said scanning tunneling microscope.
Claim 66
Independent Claim
82 words
An apparatus for analyzing a minute portion comprising: a scanning electron microscope for roughly detecting an element or substrate of an electron device; a scanning tunneling microscope for detecting a minute portion on the element or substrate of the electron device on the basis of the rough information detected by said scanning electron microscope; and a near-field optical scanning microscope for analyzing the detected minute portion on the basis of the information on the minute portion detected by said scanning tunneling microscope.
Claim 67
Independent Claim
52 words
A method for processing a minute portion comprising the steps of: detecting the minute portion of an element or substrate of an electron device by a near-field optical scanning microscope; and subjecting the detected minute portion to at least one of processing, film forming and annealing by the near-field optical scanning microscope.
Claim 68
Independent Claim
52 words
A method for processing a minute portion comprising the steps of: detecting the minute portion of an element or substrate of an electron device by a near-field optical scanning microscope; and subjecting the detected minute portion to at least one of processing, film forming and annealing by the near-field optical scanning microscope.
Claim 69
Dependent Claim
43 words
A method according to claim 47, wherein the steps of detecting and subjecting include utilizing a near-field optical scanning microscope tip having a glass portion with a metal thin film coated thereon and a transparent conductive layer formed on the metal thin film.
Claim 70
Dependent Claim
46 words
A method according to claim 48, wherein the transparent conductive layer of the near-field optical scanning microscope tip has a refractive index substantially equal to that of a medium disposed between the near-field optical scanning microscope tip and the element or substrate of the electron device.
Claim 71
Independent Claim
67 words
A method for processing a minute portion comprising the steps of: detecting roughly an element or substrate of an electron device by a scanning electron microscope; detecting a minute portion of the element or substrate of the electron device by a near-field optical scanning microscope; and subjecting the detected minute portion to at least one of processing, film forming and annealing by the near-field optical scanning microscope.
Claim 72
Independent Claim
67 words
A method for processing a minute portion comprising the steps of: detecting roughly an element or substrate of an electron device by a scanning electron microscope; detecting a minute portion of the element or substrate of the electron device by a near-field optical scanning microscope; and subjecting the detected minute portion to at least one of processing, film forming and annealing by the near-field optical scanning microscope.
Claim 73
Dependent Claim
43 words
A method according to claim 50, wherein the steps of detecting and subjecting include utilizing a near-field optical scanning microscope tip having a glass portion with a metal thin film coated thereon and a transparent conductive layer formed on the metal thin film.
Claim 74
Dependent Claim
46 words
A method according to claim 51, wherein the transparent conductive layer of the near-field optical scanning microscope tip has a refractive index substantially equal to that of a medium disposed between the near-field optical scanning microscope tip and the element or substrate of the electron device.
Claim 75
Independent Claim
133 words
A method for processing a minute portion comprising the steps of: roughly detecting a portion of an element or substrate of an electron device and a tip of a near-field optical scanning microscope by a scanning electron microscope; correcting a position displacement between the detected portion of the element of substrate of the electron device and the detected tip of the near-field optical scanning microscope in a view of the scanning electron microscope; detecting a minute portion of the element or substrate of the electron device by a near-field optical scanning microscope on the basis of the rough information detected by the scanning electron microscope; and adjusting a precise position of the detected minute portion of the element or substrate of the electron device in a view of the near-field optical scanning microscope.
Claim 76
Independent Claim
133 words
A method for processing a minute portion comprising the steps of: roughly detecting a portion of an element or substrate of an electron device and a tip of a near-field optical scanning microscope by a scanning electron microscope; correcting a position displacement between the detected portion of the element of substrate of the electron device and the detected tip of the near-field optical scanning microscope in a view of the scanning electron microscope; detecting a minute portion of the element or substrate of the electron device by a near-field optical scanning microscope on the basis of the rough information detected by the scanning electron microscope; and adjusting a precise position of the detected minute portion of the element or substrate of the electron device in a view of the near-field optical scanning microscope.
Claim 77
Dependent Claim
37 words
A method according to claim 53, wherein the tip of the near-field optical scanning microscope has a glass portion with a metal thin film coated thereon and a transparent conductive layer formed on the metal thin film.
Claim 78
Dependent Claim
45 words
A method according to claim 54, wherein the transparent conductive layer of the near-field optical scanning microscope tip has a refractive index substantially equal to that of a medium disposed between the near-field optical scanning microscope tip and the element or substrate of the electron.
Claim 79
Independent Claim
173 words
A method for processing a minute portion comprising the steps of: roughly detecting a portion of an element or substrate of an electron device and a tip of a near-field optical scanning microscope by a scanning electron microscope; correcting a position displacement between the detected portion of the element or substrate of the electron device and the detected tip of the near-field optical scanning microscope in a view of the scanning electron microscope; detecting a minute portion of the element or substrate of the electron device by the near-field optical scanning microscope on the basis of the rough information on the portion detected by the scanning electron microscope; adjusting a precise position of the detected minute portion of the element or substrate of the electron device in a view of the near-field optical scanning microscope; and subjecting the position-adjusted minute portion of the element or substrate of the electron device to at least one of processing, film forming and annealing by one of the near-field optical scanning microscope and a scanning tunneling microscope.
Claim 80
Independent Claim
173 words
A method for processing a minute portion comprising the steps of: roughly detecting a portion of an element or substrate of an electron device and a tip of a near-field optical scanning microscope by a scanning electron microscope; correcting a position displacement between the detected portion of the element or substrate of the electron device and the detected tip of the near-field optical scanning microscope in a view of the scanning electron microscope; detecting a minute portion of the element or substrate of the electron device by the near-field optical scanning microscope on the basis of the rough information on the portion detected by the scanning electron microscope; adjusting a precise position of the detected minute portion of the element or substrate of the electron device in a view of the near-field optical scanning microscope; and subjecting the position-adjusted minute portion of the element or substrate of the electron device to at least one of processing, film forming and annealing by one of the near-field optical scanning microscope and a scanning tunneling microscope.
Claim 81
Dependent Claim
37 words
A method according to claim 56, wherein the tip of the near-field optical scanning microscope has a glass portion with a metal thin film coated thereon and a transparent conductive layer formed on the metal thin film.
Claim 82
Dependent Claim
24 words
A method according to claim 57, wherein the tip of the near-field optical scanning microscope further has a tip for the scanning tunneling microscope.
Claim 83
Dependent Claim
29 words
A method according to claim 58, wherein the tip for the scanning tunneling microscope is arranged on a center axis of the tip of the near-field optical scanning microscope.
Claim 84
Dependent Claim
46 words
A method according to claim 59, wherein the transparent conductive layer of the near-field optical scanning microscope tip has a refractive index substantially equal to that of a medium disposed between the near-field optical scanning microscope tip and the element or substrate of the electron device.
Claim 85
Dependent Claim
46 words
A method according to claim 57, wherein the transparent conductive layer of the near-field optical scanning microscope tip has a refractive index substantially equal to that of a medium disposed between the near-field optical scanning microscope tip and the element or substrate of the electron device.
Claim 86
Dependent Claim
46 words
A method according to claim 58, wherein the transparent conductive layer of the near-field optical scanning microscope tip has a refractive index substantially equal to that of a medium disposed between the near-field optical scanning microscope tip and the element or substrate of the electron device.
Claim 87
Dependent Claim
72 words
A near-field optical scanning microscope comprising: a near-field optical microscope tip; a supporting mechanism for rotatably supporting said tip, said supporting mechanism having a rotation axis located at the same level as a surface of a specimen; and an optical system for guiding light to said tip, said optical system being supported by said supporting mechanism, wherein the light is introduced into said optical system along the rotation axis of said mechanism.
Claim 88
Dependent Claim
72 words
A near-field optical scanning microscope comprising: a near-field optical microscope tip; a supporting mechanism for rotatably supporting said tip, said supporting mechanism having a rotation axis located at the same level as a surface of a specimen; and an optical system for guiding light to said tip, said optical system being supported by said supporting mechanism, wherein the light is introduced into said optical system along the rotation axis of said mechanism.
Claim 89
Dependent Claim
32 words
A tip for a near-field optical scanning microscope comprising: a glass tip; a metal thin film coated on said glass tip; and a transparent conductive layer formed on said metal thin film.
Claim 90
Dependent Claim
32 words
A tip for a near-field optical scanning microscope comprising: a glass tip; a metal thin film coated on said glass tip; and a transparent conductive layer formed on said metal thin film.
Claim 91
Dependent Claim
21 words
A tip according to claim 64, wherein a protrusion for flowing a tunnel current is formed on said transparent conductive layer.
Claim 92
Dependent Claim
18 words
A tip according to claim 65, wherein said protrusion is formed on a center axis of the tip.
Claim 93
Dependent Claim
30 words
A tip according to claim 66, wherein a refractive index of said transparent conductive layer is substantially equal to that of a medium disposed between the tip and a specimen.
Claim 94
Dependent Claim
30 words
A tip according to claim 65, wherein a refractive index of said transparent conductive layer is substantially equal to that of a medium disposed between the tip and a specimen.
Claim 95
Dependent Claim
30 words
A tip according to claim 64, wherein a refractive index of said transparent conductive layer is substantially equal to that of a medium disposed between the tip and a specimen.
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EP0352789A2
Cited
WO1990004753A1
Cited
EP0376045A2
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-05-24 | 1996-11-23 | 1997-05-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-05-24 | 2000-11-23 | 2001-05-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-05-24 | 2004-11-23 | 2005-05-25 | $7700.00 | Window Closed / Lapsed |