EP0376045A2
Expired / Lapsed
EP
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Method and apparatus for processing a fine pattern
Assignee: Hitachi Ltd
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Filing: 1989-12-12
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Granted: —
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Expires: 2009-12-12
Abstract
Abstract A method and apparatus for processing a fine pattern of a sample of one of an electronic device, molecular device and bioelemtn device, wherein a needle having a sharpened tip is disposed in opposed relation to the sample with a gap therebetween. A voltage is applied between the needle and the sample so as to enable a tunnel current and/or a field emission current to flow therebetween and the fine pattern is provided to correct the fine pattern by effecting at least one of removal, repositioning, annealing and film formation of at least one of individual atoms and individual molecules.
Inventors
- 👤 Hiroshi Yamaguchi
- 👤 Keiya Saito
- 👤 Tateoki Miyauchi
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-28 22:51
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/455; C23C16/45523; C23C16/45525; C23C16/45544; B; B82; B82B; B82B3/00; B82Y; B82Y30/00; B82Y40/00; C23C16/04; C23C16/047; C23C16/45527; C23C16/45536; G; G03; G03F; G03F1/00; G03F1/68; G03F1/82; G03F1/84; G03F1/86; G11; G11B; G11B9/00; G11B9/12; G11B9/14; H; H01; H01J; H01J37/00; H01J37/30; H01J37/305; H01J37/3053; H01J37/3056; H10; H10P; H10P95/00; B82Y10/00; Y; Y10; Y10S; Y10S148/00; Y10S148/045; Y10S977/00; Y10S977/84; Y10S977/849; Y10S977/855; Y10S977/856; Y10S977/857; Y10S977/859; Y10S977/86; Y10S977/868; Y10S977/869; Y10S977/875
Claims Analysis
Total Claims: 30
Claim 1
Independent Claim
102 words
A method for processing a fine pattern of a sample of one of an electronic device, molecular device and bioelement device, comprising the steps of: disposing a needle having a sharpened tip in opposed relation to the sample with a gap therebetween; applying a voltage between the needle and the sample so as to enable at least one of a tunnel current and a field emission current to flow therebetween; and processing the fine pattern to correct the fine pattern by effecting at least one of removal, repositioning, annealing and film formation of at least one of individual atoms and individual molecules.
Claim 2
Independent Claim
102 words
A method for processing a fine pattern of a sample of one of an electronic device, molecular device and bioelement device, comprising the steps of: disposing a needle having a sharpened tip in opposed relation to the sample with a gap therebetween; applying a voltage between the needle and the sample so as to enable at least one of a tunnel current and a field emission current to flow therebetween; and processing the fine pattern to correct the fine pattern by effecting at least one of removal, repositioning, annealing and film formation of at least one of individual atoms and individual molecules.
Claim 3
Dependent Claim
27 words
A method according to claim 1, further comprising the step of focusing the at least one of the tunnel current and field emission current on the sample.
Claim 4
Dependent Claim
34 words
A method according to claim 2, wherein the step of focusing includes applying one of a magnetic field and electrostatic field to the at least one of the tunnel current and field emission current.
Claim 5
Dependent Claim
29 words
A method according to claim 1, wherein the step of applying a voltage between the needle and the sample enables at least a field emission current to flow therebetween.
Claim 6
Dependent Claim
47 words
A method according to claim 1, further comprising the step of forming a gas atmosphere in the region between the needle and the sample for enabling at least one of radicalizing, ionizing and exciting electrons and one of atoms and molecules of the gas by electron collision.
Claim 7
Dependent Claim
47 words
A method according to claim 2, further comprising the step of forming a gas atmosphere in the region between the needle and the sample for enabling at least one of radicalizing, ionizing and exciting electrons and one of atoms and molecules of the gas by electron collision.
Claim 8
Dependent Claim
34 words
A method according to claim 6, wherein the step of focusing includes applying one of a magnetic field and electrostatic field to the at least one of the tunnel current and field emission current.
Claim 9
Dependent Claim
59 words
A method according to claim 1, where the sample is an insulating material formed on an electroconductive substrate, the step of applying the voltage including applying the voltage between the needle and the electroconductive substrate so as to enable at least one of the tunnel current and the field emission current flow, and effecting processing of the insulating material.
Claim 10
Dependent Claim
47 words
A method according to claim 8, further comprising the steps of disposing at least one electrode plate for polarization in the region around the needle and spaced from the insulating material, and applying a voltage to the at least one electrode plate for polarizing the insulating material.
Claim 11
Dependent Claim
95 words
A method according to claim 5, further comprising the steps of separating one of an atom and molecule of the gas and depositing one of the atom and molecule of the gas on the sample, effecting relative movement of the needle and the sample in a first direction, separating one of another atom and molecule of the gas and depositing the one of the separated another atom and molecule adjacent the one of the deposited atom and molecule so as to form a film layer of one of individual atoms and molecules on the sample.
Claim 12
Dependent Claim
82 words
A method according to claim 10, further comprising the steps of effecting relative movement of the needle and the tip in a second direction and separating one of a gas atom and molecule and depositing the one of the separated gas atom and molecule adjacent one of the gas atom and molecule separated and deposited in the first direction so as to effect film formation of one of separated atoms and molecules on the sample extending in the first and second directions.
Claim 13
Dependent Claim
144 words
A method according to claim 10, wherein the step of forming a gas atmosphere, separating and depositing includes forming a gas atmosphere of a first gas to effect film formation of one of atoms and molecules of the first gas, stopping supply of the first gas and supplying a second gas to the region of the needle and the sample, separating one of an atom and molecule of the second gas and depositing the separated one of the atom and molecule of the second gas on the film layer of one of deposited atoms and molecules of the first gas, and effecting relative movement of the sample and needle in at least the first direction so as to effect film formation of one of atoms and molecules of the second gas on the film of one of atoms and molecules of the first gas.
Claim 14
Dependent Claim
21 words
A method according to claim 10, wherein the gas is one of a metallic compound gas and a non-metallic compound gas.
Claim 15
Dependent Claim
80 words
A method according to claim 1, wherein the sample is a substrate having an impurity implanted therein, the impurity being non-electrically activated in an unannealed state, and effecting annealing of one of individual atoms and molecules by irradiation of at least one of the tunnel current and field emission current to a local area of the substrate so as to effect a change in the electrical characteristics by electrically activating one of individual atoms and molecules of the implanted impurity.
Claim 16
Dependent Claim
170 words
A method according to claim 1, wherein the step of applying a voltage between the needle and the sample includes applying a voltage of a first polarity to the needle and an opposite polarity to the sample so as to cause an electron to flow from the needle to the sample to ionize one of an atom and molecule of the sample and cause movement of the one of the atom to the needle for adherence thereat, effecting relative movement of the needle and the sample, reversing the polarity of the voltage applied to the needle and the sample so that the opposite polarity voltage is applied to the needle and the first polarity voltage is applied to the sample so as to cause ionization of the one of the atom and molecule adhered to the needle and movement of the one of the ionized atom and molecule to the sample surface for deposit and adherence thereon, thereby enabling repositioning of one of an atom and molecule of the sample.
Claim 17
Dependent Claim
43 words
A method according to claim 1, wherein the step of processing includes at least one of removal, repositioning, annealing and film formation utilizing one of a single atom and a single molecule of the one of the electronic device, molecular device and bioelement.
Claim 18
Independent Claim
107 words
An apparatus for processing a fine pattern of a sample of one of an electronic device, molecular device and bioelement device, comprising: an electroconductive needle having a sharpened tip disposed in opposed relation to the sample with a gap therebetween; means for applying a voltage between the needle and the sample so as to enable at least one of a tunnel current and a field emission current to flow therebetween; and means for processing the fine pattern of the sample to correct the fine pattern by effecting at least one of removal, repositioning, annealing and film formation of at least one of individual atoms and individual molecules.
Claim 19
Independent Claim
107 words
An apparatus for processing a fine pattern of a sample of one of an electronic device, molecular device and bioelement device, comprising: an electroconductive needle having a sharpened tip disposed in opposed relation to the sample with a gap therebetween; means for applying a voltage between the needle and the sample so as to enable at least one of a tunnel current and a field emission current to flow therebetween; and means for processing the fine pattern of the sample to correct the fine pattern by effecting at least one of removal, repositioning, annealing and film formation of at least one of individual atoms and individual molecules.
Claim 20
Dependent Claim
26 words
An apparatus according to claim 17, further comprising means for focusing the at least one of the tunnel current and field emission current on the sample.
Claim 21
Dependent Claim
36 words
An apparatus according to claim 18, wherein the means for focusing includes means for applying one of a magnetic field and electrostatic field to the at least one of the tunnel current and field emission current.
Claim 22
Dependent Claim
46 words
An apparatus according to claim 17, further comprising means for forming a gas atmosphere in the region between the needle and the sample for enabling at least one of radicalizing, ionizing and exciting electrons and one of atoms and molecules of the gas by electron collision.
Claim 23
Dependent Claim
63 words
An apparatus according to claim 17, where the sample is an insulating material formed on an electroconductive substrate and further comprising at least one electrode plate for enabling polarization being disposed in the region around the needle and spaced from the insulating material, and polarization voltage means for applying a voltage to the at least one electrode plate for polarizing the insulating material.
Claim 24
Dependent Claim
103 words
An apparatus according to claim 20, wherein the processing means includes means for separating one of an atom and molecule of the gas and for depositing the one of the atom and molecule of the gas on the sample, means for effecting relative movement of the needle and the sample in a first direction, the separating means separating one of another atom and molecule of the gas and depositing the separated one of the atom and molecule adjacent the deposited one of the atom and molecule so as to effect a film layer of one of individual atoms and molecules on the sample.
Claim 25
Dependent Claim
85 words
An apparatus according to claim 22, wherein the movement means effects relative movement of the needle and the tip in a second direction and the separating means enables separating one of a gas atom and molecule and depositing the separated one of the gas atom and molecule adjacent one of a gas atom and molecule separated and deposited in the first direction so as to effect film formation of one of separated atoms and molecules on the sample extending in the first and second directions.
Claim 26
Dependent Claim
152 words
An apparatus according to claim 22, wherein the means for forming a gas atmosphere includes means for forming a gas atmosphere of a first gas to enable film formation of one of atoms and molecules of the first gas, means for stopping supply of the first gas and means for supplying a second gas to the region of the needle and the sample, the separating means separating one of an atom and molecule of the second gas and depositing one of the atom and molecule of the second gas on the film layer of the deposited one of atoms and molecules of the first gas, the movement means effecting relative movement of the sample and needle in at least the first direction so as to effect film formation of one of atoms and molecules of the second gas on the film layer of one of atoms and molecules of the first gas.
Claim 27
Dependent Claim
83 words
An apparatus according to claim 17, wherein the sample is a substrate having an impurity implanted therein, the impurity being non-electrically activated in an unannealed state, and the processing means enables annealing of one of individual atoms and molecules by the at least one of the tunnel current and field emission current irradiated to a local area of the substrate so as to effect a change in the electrical characteristics by electrically activating one of individual atoms and molecules of the implanted impurity.
Claim 28
Dependent Claim
178 words
An apparatus according to claim 17, wherein the means for applying a voltage between the needle and the sample includes means for applying a voltage of a first polarity to the needle and an opposite polarity to the sample so as to cause an electron to flow from the needle to the sample to ionize one of an atom and molecule of the sample and cause movement of the one of the atom and molecule to the needle for adherence thereat, means for effecting relative movement of the needle and the sample and means for reversing the polarity of the voltage applied to the needle and the sample so that the opposite polarity voltage is applied to the needle and the first polarity voltage is applied to the sample so as to cause ionization of one of the atom and molecule adhered to the needle and movement of the one of the ionized atom and molecule to the sample surface for deposit and adherence thereon, thereby enabling repositioning of one of an atom and molecule of the sample.
Claim 29
Dependent Claim
44 words
An apparatus according to claim 17, further comprising means for detecting a portion of the fine pattern to be corrected, and disposing means responsive to the detecting means for positioning the needle in relation to the portion of the fine pattern to be corrected.
Claim 30
Dependent Claim
56 words
An apparatus according to claim 27, wherein the detecting means includes at least one of an optical microscope, electron microscope, scanning tunnelling microscope and a laser gauge, and further comprising means for moving the sample with respect to the detecting means so as to enable detection of the portion of the fine pattern to be corrected.
References Cited (Backward Citations)
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