High CF4 flow-reactive ion etch for aluminum patterning

Claim 2

A process for anisotropic etching of aluminum, comprising the steps of: forming a plasma gas mixture having a carbon containing gas and Cl 2 wherein said concentration ratio of said carbon containing gas to said Cl 2 is at least 2:1 ; and subjecting said aluminum to said plasma gas mixture.

Claim 3

The process defined by claim 1 wherein said carbon containing gas of said plasma gas mixture is CF 4 .

Claim 4

The process defined by claim 1 wherein said plasma gas mixture is further comprised of BCl 3 .

Claim 5

The process defined by claim 3 wherein said plasma gas mixture has a ratio of BCl 3 to carbon containing gas of approximately 1:1.

Claim 6

The process defined by claim 4, further including a step of introducing helium into said plasma gas mixture.

Claim 7

A process for anisotropic etching of an aluminum layer in an etcher during a fabrication of a semiconductor device, comprising the steps of: forming a layer of photoresist on a predetermined surface of said aluminum layer; subjecting said aluminum layer to a gas mixture of chlorine gas and carbon containing gas wherein said gas mixture has a carbon containing gas to chlorine gas concentration ratio of at least 2:1 in said etcher; said carbon containing gases forming a carbonaceous film along side walls developed during said etching process and preventing etching of said side walls; said photoresist layer preventing said chlorine gas from etching said aluminum layer except where said aluminum is exposed; applying RF power to electrodes wherein said gas mixture forms a plasma; and etching said aluminum until an underlying layer is exposed.

Claim 8

A process for anisotropic etching of an aluminum layer in an etcher during a fabrication of a semiconductor device, comprising the steps of: forming a layer of photoresist on a predetermined surface of said aluminum layer; subjecting said aluminum layer to a gas mixture of chlorine gas and carbon containing gas wherein said gas mixture has a carbon containing gas to chlorine gas concentration ratio of at least 2:1 in said etcher; said carbon containing gases forming a carbonaceous film along side walls developed during said etching process and preventing etching of said side walls; said photoresist layer preventing said chlorine gas from etching said aluminum layer except where said aluminum is exposed; applying RF power to electrodes wherein said gas mixture forms a plasma; and etching said aluminum until an underlying layer is exposed.

Claim 9

The process defined by claim 6 wherein said plasma gas mixture is further comprised of BCl 3 molecules.

Claim 10

The process defined by claim 7 wherein said plasma gas mixture is comprised of approximately as much BCl 3 as carbon containing gas.

Claim 11

The process defined by claim 8, further including a step of introducing helium into said gas mixture.

Claim 12

The process defined by claim 6, wherein said RF power is continuously adjusted so that a self-bias of typically between 200-300 volts is maintained.

Claim 13

The process defined by claim 10 wherein said aluminum layer is formed by a sputtering process.

Claim 14

The process defined by claim 6, wherein said carbon containing gas is selected from the group consisting of CF 4 and CHF 3 .

Claim 15

A process for etching an aluminum film layer in a reactive ion etcher during a fabrication of a semiconductor device, comprising the steps of: forming a layer of photoresist on a predetermined surface of said aluminum film layer; placing said semiconductor device between electrodes in said reactive ion etcher; subjecting said aluminum film layer to a mixture of Cl 2 , CF 4 and BCl 3 at approximately 150-250 sccm of total flow at approximately 20-50 millitorr of pressure wherein said gas mixture has a concentration ratio of CF 4 :Cl 2 of at least 2:1; applying an electrical power to said gas mixture to form a plasma and adjusting said electrical power in order to maintain a self-bias of between 200-300 volts; and etching said aluminum until an underlying layer is exposed and detected using an optical emission end point detection technique.

Claim 16

A process for etching an aluminum film layer in a reactive ion etcher during a fabrication of a semiconductor device, comprising the steps of: forming a layer of photoresist on a predetermined surface of said aluminum film layer; placing said semiconductor device between electrodes in said reactive ion etcher; subjecting said aluminum film layer to a mixture of Cl 2 , CF 4 and BCl 3 at approximately 150-250 sccm of total flow at approximately 20-50 millitorr of pressure wherein said gas mixture has a concentration ratio of CF 4 :Cl 2 of at least 2:1; applying an electrical power to said gas mixture to form a plasma and adjusting said electrical power in order to maintain a self-bias of between 200-300 volts; and etching said aluminum until an underlying layer is exposed and detected using an optical emission end point detection technique.

Claim 17

The process defined by claim 13 wherein said plasma gas mixture has approximately a 1:1 ratio of BCl 3 and CF 4 .

Claim 18

The process defined by claim 14 further including a step of introducing helium into said plasma gas mixture.

Claim 19

The process defined by claim 13 wherein said end point detection technique monitors the radiation intensity at 370 nanometers.