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US5197077A Expired / Lapsed US ⏱️ 0.0 years remaining

Low divergence laser

Assignee: McDonnell Douglas Corp
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Filing: 1992-02-28
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Granted: 1993-03-23
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Expires: 2012-02-28
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Abstract

Abstract A semiconductor ridge diode laser, capable of providing a single mode, high power laser output having a low divergence in the far field, comprised of a plurality of semiconductor layers having three quantum wells therein. The layers of the diode laser are doped such that the PN junction occurs in or near the center quantum well. A pair of graded index layers surround each quantum well to provide transverse optical confinement. In addition to linear grading of the index of refraction in the graded index layers, stepped changes in the index of refracton or other profile types changes such as a parabolic grading may also be used. The P-side of the diode laser is etched to form a ridge with which electrical contact may be maintained to confine the optical signals laterally. Such semiconductor laser structures with the depth of the PN junction an appropriate transverse distance from the bottom surface of the ridge such that current supplied may spread have an increase in emission spot size in the near field and a decrease in the far field divergence in both the transverse and the lateral direction. The spacing and the width of the quantum wells must be such that the emission spot size in the transverse direction is increased so as to decrease the divergence in the transverse direction while allowing sufficient optical coupling and operation of the fundamental transverse mode while suppressing higher order modes.

Inventors

  • 👤 Charlton M. Harding
  • 👤 Ying-Chih Chen
  • 👤 Richard J. Dalby
  • 👤 Robert G. Waters

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-06 14:53
CPC Classifications
H; H01; H01S; H01S5/00; H01S5/40; H01S5/4025; H01S5/4031; H01S5/4043; B; B82; B82Y; B82Y20/00; H01S2301/00; H01S2301/18; H01S5/20; H01S5/22; H01S5/30; H01S5/34; H01S5/3409; H01S5/3428

Claims Analysis

Total Claims: 12
Claim 1
Independent Claim 210 words
A semiconductor laser diode, comprising: (a) a semiconductor substrate; (b) a plurality of semiconductor layers, positioned upon said semiconductor substrate, comprising: (1) a center quantum well for propagating optical signals along an axis of propagation, said center quantum well having a PN junction proximate thereto; (2) first and second quantum wells symmetrically disposed about said center quantum well for propagating optical signals along an axis of propagation; and (3) a plurality of semiconductor layers having a graded index of refraction, said graded index layers disposed adjacent to each of said quantum wells such that the propagating optical signals within each of said quantum wells are confined in a direction transverse to said axes of propagation; (c) a ridge structure formed upon said plurality of semiconductor layers for providing confinement to said propagating optical signals in a direction lateral to said axes of propagation, said ridge structure having an upper mesa and a base; and (d) a means for supplying electrical current between said upper mesa of said ridge structure and said substrate such that optical signals will be propagated within each of said quantum wells; wherein the transverse distance between said PN junction and said base of said ridge structure is sufficient to allow significant spreading of said electrical current.
Claim 2
Dependent Claim 210 words
A semiconductor laser diode, comprising: (a) a semiconductor substrate; (b) a plurality of semiconductor layers, positioned upon said semiconductor substrate, comprising: (1) a center quantum well for propagating optical signals along an axis of propagation, said center quantum well having a PN junction proximate thereto; (2) first and second quantum wells symmetrically disposed about said center quantum well for propagating optical signals along an axis of propagation; and (3) a plurality of semiconductor layers having a graded index of refraction, said graded index layers disposed adjacent to each of said quantum wells such that the propagating optical signals within each of said quantum wells are confined in a direction transverse to said axes of propagation; (c) a ridge structure formed upon said plurality of semiconductor layers for providing confinement to said propagating optical signals in a direction lateral to said axes of propagation, said ridge structure having an upper mesa and a base; and (d) a means for supplying electrical current between said upper mesa of said ridge structure and said substrate such that optical signals will be propagated within each of said quantum wells; wherein the transverse distance between said PN junction and said base of said ridge structure is sufficient to allow significant spreading of said electrical current.
Claim 3
Dependent Claim 32 words
A semiconductor laser diode as recited in claim 1, wherein said plurality of semiconductor layers are comprised of alloys of Al x Ga 1-x As wherein x varies from 0 to 1.0.
Claim 4
Dependent Claim 37 words
A semiconductor laser diode as recited in claim 1, wherein said central quantum well and said first and second quantum wells are comprised of a material selected from the group consisting of GaAs, AlGaAs, InGaAs, and InAlGaAs.
Claim 5
Dependent Claim 28 words
A semiconductor laser diode as recited in claim 1, wherein said transverse distance between said PN junction and said base of said ridge structure is approximately 2 μml.
Claim 6
Dependent Claim 37 words
A semiconductor laser diode as recited in claim 1, wherein the transverse distances between said first quantum well and said center quantum well and between said second quantum well and said center quantum well are substantially equal.
Claim 7
Dependent Claim 39 words
A semiconductor laser diode as recited in claim 5, wherein said transverse distances between said first quantum well and said center quantum well and between said second quantum well and said center quantum well are each approximately 1 μm.
Claim 8
Dependent Claim 21 words
A semiconductor laser diode as recited in claim 1, wherein the width of said center quantum well is approximately 100 Angstroms.
Claim 9
Dependent Claim 24 words
A semiconductor laser diode as recited in claim 7, wherein the width of each of said first and second quantum wells are substantially equal.
Claim 10
Dependent Claim 24 words
A semiconductor laser diode as recited in claim 8, wherein the width of each of said first and second quantum wells are 50 Angstroms.
Claim 11
Dependent Claim 264 words
A semiconductor laser diode, comprising: (a) a semiconductor substrate comprised of GaAs; (b) a plurality of semiconductor layers comprised of alloys of Al x Ga 1-x As wherein x varies from 0 to 1.0, positioned upon said semiconductor substrate, comprising: (1) a center quantum well for propagating optical signals along an axis of propagation, said center quantum well having a PN junction proximate thereto and a width of approximately 100 Angstroms; (2) first and second quantum wells symmetrically disposed about said center quantum well for propagating optical signals along an axis of propagation, each of said first and second quantum wells having a width of approximately 50 Angstroms and positioned approximately 1 μm in a direction transverse to said axes of propagation from said center quantum well; and (3) a plurality of semiconductor layers having a graded index of refraction, said graded index layers disposed adjacent to each of said quantum wells such that the propagating optical signals within each of said quantum wells are confined in a direction transverse to said axes of propagation; (c) a ridge structure formed upon said plurality of semiconductor layers for providing confinement to said propagating optical signals in a direction lateral to said axes of propagation, said ridge structure having an upper mesa and a base; and (d) a means for supplying electrical current between said upper mesa of said ridge structure and said substrate such that optical signals will be propagated within each of said quantum wells; wherein the transverse distance between said PN junction and said base of said ridge structure is approximately 2 μm.
Claim 12
Dependent Claim 264 words
A semiconductor laser diode, comprising: (a) a semiconductor substrate comprised of GaAs; (b) a plurality of semiconductor layers comprised of alloys of Al x Ga 1-x As wherein x varies from 0 to 1.0, positioned upon said semiconductor substrate, comprising: (1) a center quantum well for propagating optical signals along an axis of propagation, said center quantum well having a PN junction proximate thereto and a width of approximately 100 Angstroms; (2) first and second quantum wells symmetrically disposed about said center quantum well for propagating optical signals along an axis of propagation, each of said first and second quantum wells having a width of approximately 50 Angstroms and positioned approximately 1 μm in a direction transverse to said axes of propagation from said center quantum well; and (3) a plurality of semiconductor layers having a graded index of refraction, said graded index layers disposed adjacent to each of said quantum wells such that the propagating optical signals within each of said quantum wells are confined in a direction transverse to said axes of propagation; (c) a ridge structure formed upon said plurality of semiconductor layers for providing confinement to said propagating optical signals in a direction lateral to said axes of propagation, said ridge structure having an upper mesa and a base; and (d) a means for supplying electrical current between said upper mesa of said ridge structure and said substrate such that optical signals will be propagated within each of said quantum wells; wherein the transverse distance between said PN junction and said base of said ridge structure is approximately 2 μm.

References Cited (Backward Citations)

JPS59181084A Cited
JPS6083389A Cited
JPS62257781A Cited
US4955030A Cited
US5040186A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1996-03-22 1996-09-21 1997-03-23 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2000-03-22 2000-09-21 2001-03-23 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2004-03-22 2004-09-21 2005-03-23 $7700.00 Window Closed / Lapsed

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