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US5175124A
Expired / Lapsed
US
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Process for fabricating a semiconductor device using re-ionized rinse water
Assignee: NXP USA Inc
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Filing: 1991-03-25
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Granted: 1992-12-29
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Expires: 2011-03-25
Abstract
Abstract A process for fabricating a semiconductor device uses re-ionized water, such as carbonated water, to rinse the device while preventing microcorrosion of metal layers. In one embodiment of the invention, a semiconductor wafer is provided having an overlying metal layer and a patterned layer overlying the overlying metal layer. Selected portions of the overlying metal layer are etched using the patterned layer as an etch mask. The patterned layer is removed by immersing the device in an organic solution without affecting the remaining metal layer. The device is then rinsed in a reservoir of re-ionized water to remove the organic solution from the device while preventing microcorrosion of the remaining metal layer.
Inventors
- 👤 Paul M. Winebarger
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 17:54
CPC Classifications
H; H10; H10P; H10P70/00; H10P70/20; H10P70/27; H10P70/273; H10P70/10; H10P70/15; Y; Y10; Y10S; Y10S438/00; Y10S438/906
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
145 words
A process for fabricating a semiconductor device using re-ionized rinse water to prevent metal microcorrosion, comprising the steps of: providing a semiconductor substrate; depositing a metal layer overlying the semiconductor substrate; depositing an imagable material overlying the metal layer and the semiconductor substrate; exposing selected portions of the imagable material to radiation; developing the imagable material by immersing the device in an aqueous solution such that the selected portions of the imagable material are removed; and rinsing the semiconductor device to remove the aqueous solution, wherein the step of rinsing the semiconductor device comprises the sequential steps of: rinsing the semiconductor device in a reservoir of basic solution to prevent precipitation of the imagable material; and rinsing the semiconductor device in a reservoir of re-ionized water to remove the aqueous solution and the basic solution from the device while preventing microcorrosion of the metal layer.
Claim 2
Dependent Claim
145 words
A process for fabricating a semiconductor device using re-ionized rinse water to prevent metal microcorrosion, comprising the steps of: providing a semiconductor substrate; depositing a metal layer overlying the semiconductor substrate; depositing an imagable material overlying the metal layer and the semiconductor substrate; exposing selected portions of the imagable material to radiation; developing the imagable material by immersing the device in an aqueous solution such that the selected portions of the imagable material are removed; and rinsing the semiconductor device to remove the aqueous solution, wherein the step of rinsing the semiconductor device comprises the sequential steps of: rinsing the semiconductor device in a reservoir of basic solution to prevent precipitation of the imagable material; and rinsing the semiconductor device in a reservoir of re-ionized water to remove the aqueous solution and the basic solution from the device while preventing microcorrosion of the metal layer.
Claim 3
Dependent Claim
24 words
The process of claim 1 wherein the step of depositing an imagable material comprises depositing photoresist overlying the metal layer and the semiconductor substrate.
Claim 4
Dependent Claim
24 words
The process of claim 1 wherein the step of depositing a metal layer comprises depositing a metal layer comprising copper overlying the semiconductor substrate.
Claim 5
Dependent Claim
25 words
The process of claim 3 wherein the step of depositing a metal layer comprising copper comprises depositing an aluminum-copper alloy layer overlying the semiconductor substrate.
Claim 6
Dependent Claim
30 words
The process of claim 1 wherein the step of rinsing the semiconductor device in a reservoir of re-ionized water comprises rinsing the semiconductor device in a reservoir of carbonated water.
Claim 7
Dependent Claim
74 words
The process of claim 5 wherein the step of rinsing the semiconductor device in a reservoir of carbonated water to substantially remove the aqueous solution and the basic solution from the device while substantially preventing microcorrosion of the metal layer comprises: providing a predetermined amount of de-ionized water; introducing carbon dioxide into the de-ionized water at a predetermined rate to form saturated carbonated water; and rinsing the semiconductor device in the saturated carbonated water.
Claim 8
Dependent Claim
43 words
The process of claim 1 wherein the step of rinsing the semiconductor device in a reservoir of basic solution to prevent precipitation of the imagable material comprises rinsing the semiconductor device in a reservoir of alkaline solution having a pH greater than 7.
Claim 9
Dependent Claim
47 words
The process of claim 7 wherein the step of rinsing the semiconductor device in a reservoir of alkaline solution having a pH greater than 7 comprises rinsing the semiconductor device in a reservoir of de-ionized water to which a predetermined amount of developer solution has been added.
Claim 10
Dependent Claim
107 words
A process for fabricating a semiconductor device using re-ionized rinse water to prevent metal microcorrosion, comprising the steps of: providing a semiconductor wafer having an overlying metal layer and a patterned layer overlying the overlying metal layer; etching selected portions of the overlying metal layer using the patterned layer as an etch mask; removing the patterned layer by immersing the device in an organic solution without altering remaining portions of the overlying metal layer; and then rinsing the semiconductor device in a reservoir of re-ionized water to remove the organic solution from the semiconductor device while preventing microcorrosion of the remaining portions of the overlying metal layer.
Claim 11
Dependent Claim
107 words
A process for fabricating a semiconductor device using re-ionized rinse water to prevent metal microcorrosion, comprising the steps of: providing a semiconductor wafer having an overlying metal layer and a patterned layer overlying the overlying metal layer; etching selected portions of the overlying metal layer using the patterned layer as an etch mask; removing the patterned layer by immersing the device in an organic solution without altering remaining portions of the overlying metal layer; and then rinsing the semiconductor device in a reservoir of re-ionized water to remove the organic solution from the semiconductor device while preventing microcorrosion of the remaining portions of the overlying metal layer.
Claim 12
Dependent Claim
30 words
The process of claim 9 wherein the step of providing a semiconductor wafer having an overlying metal layer comprises providing a semiconductor wafer having an overlying metal layer comprising copper.
Claim 13
Dependent Claim
32 words
The process of claim 10 wherein the step of providing a semiconductor wafer having an overlying metal layer comprises providing a semiconductor wafer having an overlying metal layer comprising aluminum and copper.
Claim 14
Dependent Claim
24 words
The process of claim 9 wherein the step of rinsing the semiconductor device in re-ionized water comprises rinsing the semiconductor device in carbonated water.
Claim 15
Dependent Claim
45 words
The process of claim 9 wherein the step of providing a semiconductor wafer having an overlying metal layer and a patterned layer overlying the metal layer comprises providing a semiconductor wafer having an overlying metal layer and a patterned photoresist layer overlying the metal layer.
Claim 16
Dependent Claim
142 words
A process for fabricating a semiconductor device using re-ionized rinse water to prevent metal microcorrosion, comprising the steps of: providing a semiconductor wafer having an overlying metal layer; depositing photoresist on the overlying metal layer; exposing selective portions of the photoresist to radiation; developing the photoresist in an aqueous solution to remove the portions of photoresist exposed to radiation; and rinsing the semiconductor device to remove the aqueous solution, wherein the step of rinsing the semiconductor device comprises the sequential steps of: rinsing the semiconductor device in a reservoir of alkaline solution to remove the aqueous solution from the semiconductor device and to prevent precipitation of the aqueous solution; and rinsing the semiconductor device in a reservoir of saturated carbonated water to remove traces of the aqueous solution and the alkaline solution from the semiconductor device without corroding the overlying metal layer.
Claim 17
Dependent Claim
142 words
A process for fabricating a semiconductor device using re-ionized rinse water to prevent metal microcorrosion, comprising the steps of: providing a semiconductor wafer having an overlying metal layer; depositing photoresist on the overlying metal layer; exposing selective portions of the photoresist to radiation; developing the photoresist in an aqueous solution to remove the portions of photoresist exposed to radiation; and rinsing the semiconductor device to remove the aqueous solution, wherein the step of rinsing the semiconductor device comprises the sequential steps of: rinsing the semiconductor device in a reservoir of alkaline solution to remove the aqueous solution from the semiconductor device and to prevent precipitation of the aqueous solution; and rinsing the semiconductor device in a reservoir of saturated carbonated water to remove traces of the aqueous solution and the alkaline solution from the semiconductor device without corroding the overlying metal layer.
Claim 18
Dependent Claim
36 words
The process of claim 14 wherein the step of rinsing the semiconductor device in a reservoir of alkaline solution comprises rinsing the semiconductor device in a reservoir of alkaline solution having a pH greater than 7.
Claim 19
Dependent Claim
141 words
A process for fabricating a semiconductor device using re-ionized rinse water to prevent metal microcorrosion, comprising the steps of: providing a semiconductor wafer having an overlying metal layer; depositing photoresist on the overlying metal layer; exposing selective portions of the photoresist to radiation; developing the photoresist in an aqueous solution to remove the portions of photoresist exposed to radiation; rinsing the semiconductor device in a reservoir of alkaline solution to remove the aqueous solution from the semiconductor device and to prevent precipitation of the aqueous solution; rinsing the semiconductor device in a reservoir of de-ionized water for a predetermined period of time; and after rinsing in de-ionized water, rinsing the semiconductor device in a reservoir of saturated carbonated water to remove any traces of the aqueous solution and the alkaline solution from the semiconductor device without corroding the overlying metal layer.
Claim 20
Dependent Claim
141 words
A process for fabricating a semiconductor device using re-ionized rinse water to prevent metal microcorrosion, comprising the steps of: providing a semiconductor wafer having an overlying metal layer; depositing photoresist on the overlying metal layer; exposing selective portions of the photoresist to radiation; developing the photoresist in an aqueous solution to remove the portions of photoresist exposed to radiation; rinsing the semiconductor device in a reservoir of alkaline solution to remove the aqueous solution from the semiconductor device and to prevent precipitation of the aqueous solution; rinsing the semiconductor device in a reservoir of de-ionized water for a predetermined period of time; and after rinsing in de-ionized water, rinsing the semiconductor device in a reservoir of saturated carbonated water to remove any traces of the aqueous solution and the alkaline solution from the semiconductor device without corroding the overlying metal layer.
Claim 21
Dependent Claim
45 words
The process of claim 16 wherein the step of rinsing the semiconductor device in a reservoir of de-ionized water for a predetermined period of time comprises rinsing the semiconductor device in a reservoir of de-ionized water for a period of time less than thirty seconds.
References Cited (Backward Citations)
JPS587831A
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JPS59168446A
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JPS60876A
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JPS60165726A
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JPS61268391A
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US5025597A
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US4997746A
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-12-29 | 1996-06-29 | 1996-12-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-12-29 | 2000-06-29 | 2000-12-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-12-29 | 2004-06-29 | 2004-12-29 | $7700.00 | Window Closed / Lapsed |