Patent US5163832A successfully refreshed from Google Patents.
US5163832A
Expired / Lapsed
US
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Vertical heat-treating apparatus
Assignee: Tokyo Electron Ltd
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Filing: 1990-10-30
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Granted: 1992-11-17
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Expires: 2010-10-30
Abstract
Abstract A vertical heat-treating apparatus which allows effective use of an installation space and improved productivity is disclosed. In this system, a plurality of housings, each accommodated with a vertical reactor, are aligned with each other. A gas feed unit and the like are arranged in front of each housing with a space disposed therebetween for conducting maintenance work. A rail is installed along the rear side of the housings. A boat liner is located on the rail for carrying a boat to the housings. An interface mechanism including a horizontal-vertical conversion handling unit for supplying the boat in a vertical state to the boat liner is disposed near the rail.
Inventors
- 👤 Katsumi Ishii
- 👤 Shingo Watanabe
- 👤 Mitsuo Kato
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 16:57
CPC Classifications
F; F27; F27D; F27D3/00; F27D3/0084; Y; Y10; Y10S; Y10S414/00; Y10S414/135; Y10S414/14
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
171 words
A vertical heat-treating apparatus comprising: at least three first housings which are aligned side by side with each other, each of which has a closed top portion, an upper portion storing a substantially vertically extending reactor body, and a lower portion storing an elevator for vertically moving a boat supporting a plurality of plate-like objects into said reactor body; second housings for supplying at least one of a feed fluid and electric power, said second housings arranged to face said first housings with a space left therebetween for maintenance; a transfer means disposed at a front side of said first housings for transporting the boat loaded with said objects to said first housings; a boat liner, which is arranged to be movable along said transfer means, and which includes a boat mounting table for transferring the boat to said first housings; a transfer device for transferring the objects from said boat liner to said elevator; and an interface mechanism for conveying the boat loaded with the object to said boat liner.
Claim 2
Dependent Claim
171 words
A vertical heat-treating apparatus comprising: at least three first housings which are aligned side by side with each other, each of which has a closed top portion, an upper portion storing a substantially vertically extending reactor body, and a lower portion storing an elevator for vertically moving a boat supporting a plurality of plate-like objects into said reactor body; second housings for supplying at least one of a feed fluid and electric power, said second housings arranged to face said first housings with a space left therebetween for maintenance; a transfer means disposed at a front side of said first housings for transporting the boat loaded with said objects to said first housings; a boat liner, which is arranged to be movable along said transfer means, and which includes a boat mounting table for transferring the boat to said first housings; a transfer device for transferring the objects from said boat liner to said elevator; and an interface mechanism for conveying the boat loaded with the object to said boat liner.
Claim 3
Dependent Claim
30 words
An apparatus according to claim 1, further comprising a transfer mechanism disposed adjacent to said transfer means and adapted to transfer the objects to the boat in a horizontal orientation.
Claim 4
Dependent Claim
20 words
An apparatus according to claim 2, further comprising an interface mechanism disposed between said transfer mechanism and said transfer means.
Claim 5
Dependent Claim
38 words
An apparatus according to claim 4, wherein said interface mechanism comprises a rail, a strut movably disposed along said rail, and a conversion arm rotatably mounted on said strut for moving the boat between horizontal and vertical orientations.
Claim 6
Dependent Claim
40 words
An apparatus according to claim 1, wherein a front surface of said first housings, said transfer means, said boat liner and said transfer device are confined within a clean room, and said space is located outside of said clean room.
Claim 7
Dependent Claim
20 words
The apparatus of claim 1, wherein the boat liner is adapted to carry the boat in a substantially vertical state.
Claim 8
Dependent Claim
19 words
The apparatus of claim 1, wherein said transfer means is a rail installed along the plurality of first housings.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-11-17 | 1996-05-18 | 1996-11-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-11-17 | 2000-05-18 | 2000-11-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-11-17 | 2004-05-18 | 2004-11-17 | $7700.00 | Window Closed / Lapsed |