US4954684A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Vertical type heat-treating apparatus and heat-treating method
Assignee: Tokyo Electron Ltd
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Filing: 1989-02-23
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Granted: 1990-09-04
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Expires: 2009-02-23
Abstract
Abstract A vertical type heat-treating apparatus has a process tube, disposed upright along the lengthwise direction, for receiving a target object to heat-treat it under a predetermined condition, and a heater, provided around the process tube, for heating the target object in the process tube. After heat treatment is executed with the heater disposed around the process tube, the heater is moved upward by an elevator away from the process tube for cooling down the inside of the process tube.
Inventors
- 👤 Kazutsugu Aoki
- 👤 Noboru Fuse
- 👤 Yoshio Sakamoto
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 15:59
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0431; H10P72/0434; F; F27; F27B; F27B5/00; F27B5/06; F27B5/14; C; C21; C21D; C21D9/00; C21D9/0006; C21D9/0018; C21D9/0062; F27B17/00; F27B17/0016; F27B17/0025; H10P72/10; H10P72/12
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
178 words
A vertical type heat-treating apparatus comprising; a process tube, disposed vertically in a lengthwise direction thereof, for receiving a support mounting target objects for treatment and treating said target objects under a predetermined condition; heating means, disposed around said process tube at a time a heat treatment is effected, for heating said target object within said process tube; and position changing means for changing a relative position of said process tube and said heating means after the heat treatment is performed, by vertically moving said process tube or said heating means such that said process tube is set to a position out of said heating means, wherein said position changing means has a moving device for moving said heating means, wherein said moving device has a vertical movement mechanism for vertically moving said heating means between a heat-treating position and a separating position located above said heat-treating position, and wherein said moving device further has a horizontal movement mechanism for moving said heating means between said separating position and a retreat position located sideways of said separating position.
Claim 2
Dependent Claim
178 words
A vertical type heat-treating apparatus comprising; a process tube, disposed vertically in a lengthwise direction thereof, for receiving a support mounting target objects for treatment and treating said target objects under a predetermined condition; heating means, disposed around said process tube at a time a heat treatment is effected, for heating said target object within said process tube; and position changing means for changing a relative position of said process tube and said heating means after the heat treatment is performed, by vertically moving said process tube or said heating means such that said process tube is set to a position out of said heating means, wherein said position changing means has a moving device for moving said heating means, wherein said moving device has a vertical movement mechanism for vertically moving said heating means between a heat-treating position and a separating position located above said heat-treating position, and wherein said moving device further has a horizontal movement mechanism for moving said heating means between said separating position and a retreat position located sideways of said separating position.
Claim 3
Dependent Claim
27 words
The apparatus according to claim 1, further comprising heat-insulating means for maintaining a temperature of said heating means when said heating means is at said retreat position.
Claim 4
Dependent Claim
25 words
The apparatus according to claim 1, further comprising inserting/removing means for inserting said target object in said process tube and removing said target object therefrom.
Claim 5
Dependent Claim
171 words
A vertical type heat-treating apparatus comprising: a process tube, disposed vertically in a lengthwise direction thereof, for receiving a support mounting target objects for treatment and treating said target objects under a predetermined condition, said process tube having a heat-treating zone and a cooling zone; heating means, disposed around said process tube, for heating said target object within said process tube, said heating means having a first heater for heating said heat-treating zone to a heat-treating temperature and a second heater for heating said cooling zone to a cooling temperature lower than said heat-treating temperature respectively provided in association with said heat-treating zone and said cooling zone in such a way that outputs of said first heater and second heater are set to predetermined values to thereby set a temperature in said heat-treating zone to said heat-treating temperature and a temperature in said cooling zone to said cooling temperature; and moving means for moving said support from said heat treating zone to said cooling zone after the heat treatment is performed.
Claim 6
Dependent Claim
171 words
A vertical type heat-treating apparatus comprising: a process tube, disposed vertically in a lengthwise direction thereof, for receiving a support mounting target objects for treatment and treating said target objects under a predetermined condition, said process tube having a heat-treating zone and a cooling zone; heating means, disposed around said process tube, for heating said target object within said process tube, said heating means having a first heater for heating said heat-treating zone to a heat-treating temperature and a second heater for heating said cooling zone to a cooling temperature lower than said heat-treating temperature respectively provided in association with said heat-treating zone and said cooling zone in such a way that outputs of said first heater and second heater are set to predetermined values to thereby set a temperature in said heat-treating zone to said heat-treating temperature and a temperature in said cooling zone to said cooling temperature; and moving means for moving said support from said heat treating zone to said cooling zone after the heat treatment is performed.
Claim 7
Dependent Claim
16 words
The apparatus according to claim 4, wherein said heat-treating heater is located below said cooling heater.
Claim 8
Dependent Claim
25 words
The apparatus according to claim 4, further comprising inserting/removing means for inserting said target object in said process tube and removing said target object therefrom.
Claim 9
Dependent Claim
197 words
A heat-treating method for use in a vertical type heat-treating apparatus having a process tube, disposed vertically in a lengthwise direction thereof, for receiving a support mounting target objects for treatment and treating said target objects under a predetermined condition, and heating means, disposed around said process tube, for heating a target object for treatment within said process tube, which method comprises the steps of: causing said heating means to form a heat-treating zone and a cooling zone to said process tube, said heat-treating zone being set to a heat-treating temperature and said cooling zone being set to a cooling temperature lower than said heat-treating temperature of said heat-treating zone; setting said target object to said heat-treating zone in said process tube and subjecting said target object to heat treatment; setting said target object to said cooling zone and cooling said target object to said cooling temperature after heat treating; and removing said target object from said process tube, wherein said heating means vertically moves to a separating position located above said process tube, including the step of horizontally moving said heating means from said separating position to a retreat position located sideways of said separating position.
Claim 10
Dependent Claim
197 words
A heat-treating method for use in a vertical type heat-treating apparatus having a process tube, disposed vertically in a lengthwise direction thereof, for receiving a support mounting target objects for treatment and treating said target objects under a predetermined condition, and heating means, disposed around said process tube, for heating a target object for treatment within said process tube, which method comprises the steps of: causing said heating means to form a heat-treating zone and a cooling zone to said process tube, said heat-treating zone being set to a heat-treating temperature and said cooling zone being set to a cooling temperature lower than said heat-treating temperature of said heat-treating zone; setting said target object to said heat-treating zone in said process tube and subjecting said target object to heat treatment; setting said target object to said cooling zone and cooling said target object to said cooling temperature after heat treating; and removing said target object from said process tube, wherein said heating means vertically moves to a separating position located above said process tube, including the step of horizontally moving said heating means from said separating position to a retreat position located sideways of said separating position.
Claim 11
Dependent Claim
15 words
The method of claim 7 wherein said cooling zone is located below said heating zone.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-09-03 | 1994-03-05 | 1994-09-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-09-03 | 1998-03-05 | 1998-09-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-09-03 | 2002-03-05 | 2002-09-04 | $7700.00 | Window Closed / Lapsed |