Patent US5155340A successfully refreshed from Google Patents.
US5155340A
Expired / Lapsed
US
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Thin high temperature heater
Assignee: Mitsubishi Electric Corp
•
Filing: 1990-07-11
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Granted: 1992-10-13
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Expires: 2010-07-11
Abstract
Abstract A thin high temperature heater includes an adhesive layer of Ti disposed an insulating substrate and a resistor layer of a Ti compound disposed the adhesive layer.
Inventors
- 👤 Noriko Morita
- 👤 Susumu Hoshinouchi
- 👤 Yoshihiko Kusakabe
- 👤 Minoru Kobayashi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 21:00
CPC Classifications
H; H01; H01J; H01J1/00; H01J1/02; H01J1/13; H01J1/20; H01J1/22; H01J9/00; H01J9/02; H01J9/08; H01J2201/00; H01J2201/28; H01J2201/2803; H01J2201/2878
Claims Analysis
Total Claims: 27
Claim 1
Independent Claim
52 words
A thin high temperature heater comprising: an electrically insulating substrate; an adhesive layer selected from the group consisting of V, Cr, Y, La, Zr, Nb, and Hf disposed on said substrate; and a resistor layer selected from the group consisting of TiC, TiN, TiCN, and mixtures thereof disposed on said adhesive layer.
Claim 2
Dependent Claim
52 words
A thin high temperature heater comprising: an electrically insulating substrate; an adhesive layer selected from the group consisting of V, Cr, Y, La, Zr, Nb, and Hf disposed on said substrate; and a resistor layer selected from the group consisting of TiC, TiN, TiCN, and mixtures thereof disposed on said adhesive layer.
Claim 3
Independent Claim
51 words
A method for manufacturing a thin high temperature heater comprising successively forming an adhesive layer selected from the group consisting of V, Cr, Y, La, Zr, Nb, and Hf and a resistor layer selected from the group consisting of TiC, TiN, TiCN, and mixtures thereof and disposed on the adhesive layer.
Claim 4
Independent Claim
51 words
A method for manufacturing a thin high temperature heater comprising successively forming an adhesive layer selected from the group consisting of V, Cr, Y, La, Zr, Nb, and Hf and a resistor layer selected from the group consisting of TiC, TiN, TiCN, and mixtures thereof and disposed on the adhesive layer.
Claim 5
Independent Claim
51 words
A method for manufacturing a thin high temperature heater comprising successively forming an adhesive layer selected from the group consisting of V, Cr, Y, La, Zr, Nb, and Hf and a resistor layer selected from the group consisting of TiC, TiN, TiCN, and mixtures thereof and disposed on the adhesive layer.
Claim 6
Independent Claim
51 words
A method for manufacturing a thin high temperature heater comprising successively forming an adhesive layer selected from the group consisting of V, Cr, Y, La, Zr, Nb, and Hf and a resistor layer selected from the group consisting of TiC, TiN, TiCN, and mixtures thereof and disposed on the adhesive layer.
Claim 7
Dependent Claim
22 words
A thin high temperature heater in accordance with claim 1, wherein said adhesive layer is no more than 10 nm in thickness.
Claim 8
Dependent Claim
28 words
A method for manufacturing a thin high temperature heater in accordance with claim 2 including depositing said adhesive layer to a thickness of no more than 10 nm.
Claim 9
Dependent Claim
28 words
A method for manufacturing a thin high temperature heater in accordance with claim 3 including depositing said adhesive layer to a thickness of no more than 10 nm.
Claim 10
Dependent Claim
67 words
A thin high temperature heater comprising: an electrically insulating substrate; an adhesive layer selected from the group consisting of Ti, V, Cr, Y, La, Zr, Nb, and Hf disposed on said substrate; an adhesive relaxation layer selected from the group consisting of TiC, TiN, TiCN, and mixtures thereof and disposed on said adhesive layer; and a heating element comprising a metal disposed on said adhesive relaxation layer.
Claim 11
Dependent Claim
67 words
A thin high temperature heater comprising: an electrically insulating substrate; an adhesive layer selected from the group consisting of Ti, V, Cr, Y, La, Zr, Nb, and Hf disposed on said substrate; an adhesive relaxation layer selected from the group consisting of TiC, TiN, TiCN, and mixtures thereof and disposed on said adhesive layer; and a heating element comprising a metal disposed on said adhesive relaxation layer.
Claim 12
Independent Claim
69 words
A method for manufacturing a thin high temperature heater comprising successively forming an adhesive layer selected from the group consisting of Ti, V, Cr, Y, La, Zr, Nb, and Hf and an adhesive relaxation layer selected from the group consisting of TiC, TiN, TiCN, and mixtures thereof and disposed on the adhesive layer at a temperature below the transformation temperature of the α to β phase transformation of Ti.
Claim 13
Independent Claim
69 words
A method for manufacturing a thin high temperature heater comprising successively forming an adhesive layer selected from the group consisting of Ti, V, Cr, Y, La, Zr, Nb, and Hf and an adhesive relaxation layer selected from the group consisting of TiC, TiN, TiCN, and mixtures thereof and disposed on the adhesive layer at a temperature below the transformation temperature of the α to β phase transformation of Ti.
Claim 14
Independent Claim
72 words
A method for manufacturing a thin high temperature heater comprising successively forming an adhesive layer selected from the group consisting of Ti, V, Cr, Y, La, Zr, Nb, and Hf and an adhesive relaxation layer selected from the group consisting of TiC, TiN, TiCN, and mixtures thereof and disposed on the adhesive layer at a temperature at least equal to the transformation temperature of the α to β phase transformation of Ti.
Claim 15
Independent Claim
72 words
A method for manufacturing a thin high temperature heater comprising successively forming an adhesive layer selected from the group consisting of Ti, V, Cr, Y, La, Zr, Nb, and Hf and an adhesive relaxation layer selected from the group consisting of TiC, TiN, TiCN, and mixtures thereof and disposed on the adhesive layer at a temperature at least equal to the transformation temperature of the α to β phase transformation of Ti.
Claim 16
Dependent Claim
22 words
A thin high temperature heater in accordance with claim 7, wherein said adhesive layer is no more than 10 nm in thickness.
Claim 17
Dependent Claim
28 words
A method for manufacturing a thin high temperature heater in accordance with claim 8 including depositing said adhesive layer to a thickness of no more than 10 nm.
Claim 18
Dependent Claim
28 words
A method for manufacturing a thin high temperature heater in accordance with claim 9 including depositing said adhesive layer to a thickness of no more than 10 nm.
Claim 19
Dependent Claim
39 words
A thin high temperature heater comprising: an electrically insulating substrate; a Ti adhesive layer disposed on said substrate; and a resistor layer selected from the group consisting of TiC, TiN, TiCN, and mixtures thereof disposed on said adhesive layer.
Claim 20
Dependent Claim
39 words
A thin high temperature heater comprising: an electrically insulating substrate; a Ti adhesive layer disposed on said substrate; and a resistor layer selected from the group consisting of TiC, TiN, TiCN, and mixtures thereof disposed on said adhesive layer.
Claim 21
Independent Claim
54 words
A method for manufacturing a thin high temperature heater comprising successively forming a Ti adhesive layer and a resistor layer selected from the group consisting of TiC, TiN, TiCN, and mixtures thereto and disposed on the adhesive layer at a temperature below the transformation temperature of the α to β phase transformation of Ti.
Claim 22
Independent Claim
54 words
A method for manufacturing a thin high temperature heater comprising successively forming a Ti adhesive layer and a resistor layer selected from the group consisting of TiC, TiN, TiCN, and mixtures thereto and disposed on the adhesive layer at a temperature below the transformation temperature of the α to β phase transformation of Ti.
Claim 23
Independent Claim
57 words
A method for manufacturing a thin high temperature heater comprising successively forming a Ti adhesive layer and a resistor layer selected from the group consisting of TiC, TiN, TiCN, and mixtures thereof and disposed on the adhesive layer at a temperature at least equal to the transformation temperature of the α to β0 phase transformation of Ti.
Claim 24
Independent Claim
57 words
A method for manufacturing a thin high temperature heater comprising successively forming a Ti adhesive layer and a resistor layer selected from the group consisting of TiC, TiN, TiCN, and mixtures thereof and disposed on the adhesive layer at a temperature at least equal to the transformation temperature of the α to β0 phase transformation of Ti.
Claim 25
Dependent Claim
19 words
The thin high temperature heater of claim 7 wherein said substrate is selected from the group consisting of alumina
Claim 26
Dependent Claim
19 words
The method of claim 8 wherein said substrate is selected from the group consisting of alumina and aluminum nitrade.
Claim 27
Dependent Claim
19 words
The method of claim 9 wherein said substrate is selected from the group consisting of alumina and aluminum nitrade.
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