US3748522A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Integrated vacuum circuits
Assignee: SRI International Inc
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Filing: 1972-05-17
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Granted: 1973-07-24
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Expires: 1992-05-17
Abstract
Abstract An integrated circuit operative in vacuum and having all circuit elements formed in coplanar fashion on a single surface of a substrate to provide superior performance even in the presence of adverse environmental conditions. The circuit is especially adapted to microminiaturization and includes a unique electron discharge device having coplanar electrodes easily formed on a substrate surface by relatively simple film deposition techniques.
Inventors
- 👤 D Geppert
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 04:39
CPC Classifications
H; H01; H01J; H01J19/00; H01J19/78
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
121 words
An electron discharge device comprising: a substrate of electrically insulative material and having a surface for support of a film pattern thereon; a first electrode formed as a conductive film on said substrate surface and having an electron emissive coating thereon; a second electrode formed as a conductive film on said substrate surface in spaced relationship with said first electrode and having an electron emissive coating thereon; means for heating said substrate to an operating temperature such that thermionic emission occurs from said first and second electrodes; the spacing between said first and second electrodes and the area of each of said electrodes being such to provide a predetermined thermionic diode resistance; and means for maintaining said device in a vacuum.
Claim 2
Dependent Claim
121 words
An electron discharge device comprising: a substrate of electrically insulative material and having a surface for support of a film pattern thereon; a first electrode formed as a conductive film on said substrate surface and having an electron emissive coating thereon; a second electrode formed as a conductive film on said substrate surface in spaced relationship with said first electrode and having an electron emissive coating thereon; means for heating said substrate to an operating temperature such that thermionic emission occurs from said first and second electrodes; the spacing between said first and second electrodes and the area of each of said electrodes being such to provide a predetermined thermionic diode resistance; and means for maintaining said device in a vacuum.
References Cited (Backward Citations)
US3119041A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-07-23 | 1977-01-22 | 1977-07-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-07-23 | 1981-01-22 | 1981-07-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-07-23 | 1985-01-22 | 1985-07-24 | $7700.00 | Window Closed / Lapsed |