Patent US5149853A successfully refreshed from Google Patents.
US5149853A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Organometallic compounds
Assignee: Merck Patent GmbH
•
Filing: 1991-11-08
•
Granted: 1992-09-22
•
Expires: 2011-11-08
Abstract
Abstract In a process for the production of thin films and epitaxial layers by gas-phase deposition, intramolecularly stabilized organometallic compounds are employed as a source of metal.
Inventors
- 👤 Dietrich Erdmann
- 👤 Max E. Van Ghemen
- 👤 Ludwig Pohl
- 👤 Herbert Schumann
- 👤 Uwe Hartmann
- 👤 Wilfried Wassermann
- 👤 Meino Heyen
- 👤 Holger Jurgensen
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 10:52
CPC Classifications
C; C30; C30B; C30B25/00; C30B25/02; C07; C07F; C07F5/00; C23; C23C; C23C16/00; C23C16/06; C23C16/18; C30B29/00; C30B29/02; C30B29/10; C30B29/40
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
173 words
An organometallic compound according to the formula ##STR5## wherein M is AL, In or Ga; X' is --2--C 6 H 4 --(CH 2 ) m --, --(CH 2 ) m --2--C 6 H 4 --, --2--C 6 H 10 --(CH 2 ) m -- or --(CH 2 ) m --2-C 6 H 10 --, where m=1 or 2; Y' is --NR 3 R 4 , --PR 3 R 4 , --AsR 3 R 4 or --SbR 3 R 4 ; and R 1 , R 2 , R 3 and R 4 are each independently H, straight-chain or branched alkyl containing 1-8 carbon atoms, partially or completely fluorinated straight-chain or branched alkyl containing 1-8 carbon atoms, cycloalkyl, alkenyl or cycloalkenyl containing in each case 3-8 carbon atoms, unsubstituted phenyl or a substituted phenyl; with the proviso that R 1 , R 2 , R 3 and R 4 are not simultaneously methyl if M denotes indium, X' denotes --2--C 6 H 4 --CH 2 -- and Y' denotes --NR 3 R 4 .
Claim 2
Dependent Claim
173 words
An organometallic compound according to the formula ##STR5## wherein M is AL, In or Ga; X' is --2--C 6 H 4 --(CH 2 ) m --, --(CH 2 ) m --2--C 6 H 4 --, --2--C 6 H 10 --(CH 2 ) m -- or --(CH 2 ) m --2-C 6 H 10 --, where m=1 or 2; Y' is --NR 3 R 4 , --PR 3 R 4 , --AsR 3 R 4 or --SbR 3 R 4 ; and R 1 , R 2 , R 3 and R 4 are each independently H, straight-chain or branched alkyl containing 1-8 carbon atoms, partially or completely fluorinated straight-chain or branched alkyl containing 1-8 carbon atoms, cycloalkyl, alkenyl or cycloalkenyl containing in each case 3-8 carbon atoms, unsubstituted phenyl or a substituted phenyl; with the proviso that R 1 , R 2 , R 3 and R 4 are not simultaneously methyl if M denotes indium, X' denotes --2--C 6 H 4 --CH 2 -- and Y' denotes --NR 3 R 4 .
Claim 3
Dependent Claim
12 words
A compound according to claim 1, wherein M is In or GA.
Claim 4
Dependent Claim
14 words
A compound according to claim 1, wherein Y' is --NR 3 R 4 .
Claim 5
Dependent Claim
47 words
A compound according to claim 1, wherein R 1 to R 4 are each independently straight-chain or branched alkyl containing 1-4 carbon atoms, partially or completely fluorinated straight-chained or branched alkyl containing 1-4 carbon atoms, propenyl, butenyl, pentenyl, hexenyl, heptenyl, allyl, cyclopentyl, cyclohexyl, cyclohexenyl, or unsubstituted phenyl.
Claim 6
Dependent Claim
24 words
A compound according to claim 1, wherein said compound is 2-dimethylaminobenzyl(dimethyl)gallium, 2-dimethylaminobenzyl(dimethyl)aluminum, 2-diethylaminobenzyl(dimethyl)indium, 2-dimethylaminobenzyl(diethyl)indium, 2-diethylaminobenzyl(diethyl)gallium, 2-diethylaminobenzyl(dimethyl)gallium, 2-dimethylaminophenylmethyl(dimethyl)gallium, 2-dimethylaminophenylmethyl(dimethyl)indium, 2-diethylaminophenylmethyl(dimethyl)gallium, 2-dimethylaminophenylmethyl(dimethyl)-aluminum, 2-dimethylaminocyclohexylmethyl(dimethyl)gallium, 2-dipropylaminocyclohexylmethyl(dimethyl)aluminum, or 2-dimethylaminomethylcyclohexyl(dimethyl)indium.
Claim 7
Dependent Claim
127 words
An organometallic compound according to the formula ##STR6## wherein M' is Ga or In; X" is --(CHR 5 ) n -- where n=2, 3, 4 or 5; R 5 is H or alkyl containing 1-4 carbon atoms; Y" is --NR 3 R 4 , --PR 3 R 4 , AsR 3 R 4 , --SbR 3 R 4 , or a 5- or 6-membered heterocyclic ring where the heteroatoms are from group 5A; and R 1 , R 2 , R 3 and R 4 are independently of each other, H, straight-chain or branched alkyl containing 1-8 carbon atoms, partially or completely fluorinated straight-chain or branched alkyl containing 1-8 carbon atoms, cycloalkyl, alkenyl or cycloalkenyl containing in each case 3-8 carbon atoms, unsubstituted phenyl or substituted phenyl.
Claim 8
Dependent Claim
127 words
An organometallic compound according to the formula ##STR6## wherein M' is Ga or In; X" is --(CHR 5 ) n -- where n=2, 3, 4 or 5; R 5 is H or alkyl containing 1-4 carbon atoms; Y" is --NR 3 R 4 , --PR 3 R 4 , AsR 3 R 4 , --SbR 3 R 4 , or a 5- or 6-membered heterocyclic ring where the heteroatoms are from group 5A; and R 1 , R 2 , R 3 and R 4 are independently of each other, H, straight-chain or branched alkyl containing 1-8 carbon atoms, partially or completely fluorinated straight-chain or branched alkyl containing 1-8 carbon atoms, cycloalkyl, alkenyl or cycloalkenyl containing in each case 3-8 carbon atoms, unsubstituted phenyl or substituted phenyl.
Claim 9
Dependent Claim
12 words
A compound according to claim 6, wherein n is 3 or 4.
Claim 10
Dependent Claim
28 words
A compound according to claim 6, wherein Y" is --NR 3 R 4 , ##STR7## and R 6 is H or an alkyl radical containing 1-8 carbon atoms.
Claim 11
Dependent Claim
47 words
A compound according to claim 6, wherein R 1 to R 4 are each independently straight-chain or branched alkyl containing 1-4 carbon atoms, partially or completely fluorinated straight-chained or branched alkyl containing 1-4 carbon atoms, propenyl, butenyl, pentenyl, hexenyl, heptenyl, allyl, cyclopentyl, cyclohexyl, cyclohexenyl, or unsubstituted phenyl.
Claim 12
Dependent Claim
25 words
A compound according to claim 6, wherein said compound is: (3-dimethylaminopropyl)dimethylgallium, (3-dimethylaminopropyl)dimethylindium, (3-diethylaminopropyl)dimethylgallium, (3-diethylaminopropyl)dimethylindium, (3-diethylaminopropyl)diethylindium, (4-diethylaminobutyl)dimethylgallium, (4-diisopropylaminobutyl)dimethylindium, 2-(2-pyridyl)ethyl]dimethylindium (4-N-methyl-N-isopropylaminobutyl-diethylgallium, (4-dimethylaminobutyl)diisopropylgallium, (3-dipropylaminopropyl)diethylgallium, (3-N-propyl-N-isopropylaminopropyl)diisobutylindium, (4-dimethylaminobutyl)diethylindium, or (4-diethylaminobutyl)diethylgallium.
References Cited (Backward Citations)
US5030741A
Cited
US5099044A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-09-22 | 1996-03-23 | 1996-09-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-09-22 | 2000-03-23 | 2000-09-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-09-22 | 2004-03-23 | 2004-09-22 | $7700.00 | Window Closed / Lapsed |