US5030741A
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Cyclic organometallic compounds
Assignee: Merck Patent GmbH
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Filing: 1989-05-18
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Granted: 1991-07-09
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Expires: 2009-05-18
Abstract
Abstract The invention relates to cyclic organometallic compounds which are intramolecularly stabilized and also to their use to produce thin films and epitaxial layers by gas-phase deposition.
Inventors
- 👤 Dietrich Erdmann
- 👤 Ludwig Pohl
- 👤 Martin Hostalek
- 👤 Matthias Lokai
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 10:56
CPC Classifications
C; C07; C07F; C07F5/00; C07F5/06; C30; C30B; C30B25/00; C30B25/02; C07F5/061; C07F5/062; C07F9/00; C07F9/02; C07F9/547; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C30B29/00; C30B29/10; C30B29/40
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
311 words
A cyclic organometallic compound of the formula I ##STR3## wherein M is aluminum, gallium or indium; n is 1, 2, 3, 4, 5 or 6; X is --(CHR 4 ) m -- where m=1, 2, 3, 4 or 5, o--(CH 2 ) p --C 6 H 4 --(CH 2 ) q --, o--(CH 2 ) p --C 6 H 10 --(CH 2 ) q --, o--(CH 2 ) p --C 6 H 8 --(CH 2 ) q --, o--(CH 2 ) p --C 6 H 6 --(CH 2 ) q --, o--(CH 2 ) p --C 5 H 8 --(CH 2 ) q --, o--(CH 2 ) p --C 5 H 6 --(CH 2 ) q --, o--(CH 2 ) p --C 5 H 4 --(CH 2 ) q --, or o--(CH 2 ) p --C 4 H 6 --(CH 2 ) q --; X can also be a single bond if Y is --F, --CF 3 , --C 2 F 5 , --C 3 F 7 or --C 4 F 9 ; p and q are, in each case independently of each other, 0, 1, 2 or 3; R 1 , R 2 , R 3 and R 4 are, in each case independently of each other, H or an alkyl group containing 1-4 carbon atoms; Y is --NR 5 R 6 , --PR 5 R 6 , --AsR 5 R 6 , --Sb 5 R 6 , --F, --CF 3 , --C 2 F 5 , --C 3 F 7 or --C 4 F 9 ; and R 5 and R 6 are, in each case independently of each other, an alkyl group containing 1-8 carbon atoms, an alkyl group having 1-8 carbon atoms which is partially or completely fluorinated, a cycloalkyl group, alkenyl group or cycloalkenyl group having in each case 3-8 carbon atoms, or a phenyl group.
Claim 2
Dependent Claim
311 words
A cyclic organometallic compound of the formula I ##STR3## wherein M is aluminum, gallium or indium; n is 1, 2, 3, 4, 5 or 6; X is --(CHR 4 ) m -- where m=1, 2, 3, 4 or 5, o--(CH 2 ) p --C 6 H 4 --(CH 2 ) q --, o--(CH 2 ) p --C 6 H 10 --(CH 2 ) q --, o--(CH 2 ) p --C 6 H 8 --(CH 2 ) q --, o--(CH 2 ) p --C 6 H 6 --(CH 2 ) q --, o--(CH 2 ) p --C 5 H 8 --(CH 2 ) q --, o--(CH 2 ) p --C 5 H 6 --(CH 2 ) q --, o--(CH 2 ) p --C 5 H 4 --(CH 2 ) q --, or o--(CH 2 ) p --C 4 H 6 --(CH 2 ) q --; X can also be a single bond if Y is --F, --CF 3 , --C 2 F 5 , --C 3 F 7 or --C 4 F 9 ; p and q are, in each case independently of each other, 0, 1, 2 or 3; R 1 , R 2 , R 3 and R 4 are, in each case independently of each other, H or an alkyl group containing 1-4 carbon atoms; Y is --NR 5 R 6 , --PR 5 R 6 , --AsR 5 R 6 , --Sb 5 R 6 , --F, --CF 3 , --C 2 F 5 , --C 3 F 7 or --C 4 F 9 ; and R 5 and R 6 are, in each case independently of each other, an alkyl group containing 1-8 carbon atoms, an alkyl group having 1-8 carbon atoms which is partially or completely fluorinated, a cycloalkyl group, alkenyl group or cycloalkenyl group having in each case 3-8 carbon atoms, or a phenyl group.
Claim 3
Dependent Claim
12 words
A compound according to claim 1, wherein M is In or Ga.
Claim 4
Dependent Claim
13 words
A compound according to claim 1, wherein m is 2, 3 or 4.
Claim 5
Dependent Claim
14 words
A compound according to claim 1, wherein X is --(CHR 4 ) m --.
Claim 6
Dependent Claim
13 words
A compound according to claim 4, wherein m is 2, 3 or 4.
Claim 7
Dependent Claim
34 words
A compound according to claim 1, wherein either n or m is greater than 1 and one of the radicals R 3 and R 4 is an alkyl group and the other is H.
Claim 8
Dependent Claim
114 words
A compound according to claim 1, wherein X is o--(CH 2 ) p --C 6 H 4 --(CH 2 ) q --, o--(CH 2 ) p --C 6 H 10 --(CH 2 ) q --, o--(CH 2 ) p --C 6 H 8 --(CH 2 ) q --, o--(CH 2 ) p --C 6 H 6 --(CH 2 ) q --, o--(CH 2 ) p --C 5 H 8 --(CH 2 ) q --, o--(CH 2 ) p --C 5 H 6 --(CH 2 ) q --, o--(CH 2 ) p --C 5 H 4 --(CH 2 ) q --, or o--(CH 2 ) p --C 4 H 6 --(CH 2 ) q --.
Claim 9
Dependent Claim
18 words
A compound according to claim 1, wherein p and q are independently of each other, 1 or 2.
Claim 10
Dependent Claim
23 words
A compound according to claim 1, wherein one or the radical p and q is 0 and the other is 1 or 2.
Claim 11
Dependent Claim
12 words
A compound according to claim 1, wherein the group --X--Y is ##STR4##
Claim 12
Dependent Claim
34 words
A compound according to claim 1, wherein X is a single bond and Y is --F, --CF 3 , --C 2 F 5 , --C 3 F 7 or --C 4 F 9 .
Claim 13
Dependent Claim
14 words
A compound according to claim 1, wherein Y is --NR 5 R 6 .
Claim 14
Dependent Claim
18 words
A compound according to claim 1, wherein Y is --F, --CF 3 or --C 2 F 5 .
Claim 15
Dependent Claim
40 words
A compound according to claim 1, wherein R 5 and R 6 are each independently straight chain or branched alkyl groups having 1-4 carbon atoms or partially or completely fluorinated straight chain or branched alkyl groups having 1-4 carbon atoms.
Claim 16
Dependent Claim
22 words
A compound according to claim 1, wherein either or both R 5 and R 6 are alkenyl groups having 3-5 carbon atoms.
Claim 17
Dependent Claim
38 words
1-galla-1-(3-dimethylaminopropyl)cyclopentane, 1-galla-1-(2-dimethylaminoethyl)cyclopentane, 1-inda-1-(3-diethylaminopropyl)cyclopentane, 1-alumina-1-(3-dimethylaminopropyl)cyclopentane, 1-galla-1-(3-dimethylaminopropyl)cyclobutane, 1-inda-1-(2-diethylaminoethyl)cyclobutane, 1-alumina-1-(4-dimethylaminobutyl)cyclobutane, 1-galla-1-(o-dimethylaminobenzyl)cyclobutane, 1-alumina-1-(o-diethylaminobenzyl)cyclopentane, 1-alumina-1-(o-diethylaminobenzyl)cyclohexane, 1-inda-1-(o-diisopropylaminobenzyl)cyclobutane, 1-inda-1-(o-dimethylaminobenzyl)cyclopentane, 1-inda-1-(o-dimethylaminobenzyl)cyclohexane, 1-galla-1-(o-dimethylaminobenzyl)cyclopentane, 1-galla-1-(o-diethylaminobenzyl)cyclohexane, 1-galla-1-(o-dipropylaminobenzyl)cycloheptane, 1-inda-1-(o-dibutylaminobenzyl)cyclopentane, 1-inda-1-(o-diethylaminobenzyl)cyclohexane, 1-inda-1-(o-dimethylaminobenzyl)cyclooctane, 1-alumina-1-(o-di-isopropylaminobenzyl)cyclohexane, 1-alumina-1-(2-o-dimethylaminophenylethyl)cyclopentane, 1-alumina-1-(2-o-diethylaminophenylethyl)cyclobutane, 1-galla-1-trifluoromethylcyclopentane, 1-galla-1-trifluoromethylcyclohexane, 1-inda-1-trifluoromethylcyclohexane, 1-inda-1-fluorocyclopentane, 1-alumina-1-pentafluoroethylcyclohexane, 1-galla-1-pentafluoroethylcyclopentane, 1-galla-1-fluorocycloheptane, 1-alumina-1-fluorocyclohexane or 1-galla-1-heptafluoropropylcyclopentane, each a compound of claim 1.
Claim 18
Dependent Claim
88 words
A compound according to claim 1, wherein said compound is of the formula: 1-galla-1-(X-PR 5 R 6 )cyclopentane, 1-galla-1-(X-PR 5 R 6 )cyclobutane, 1-galla-1-(X-PR 5 P 6 )cyclohexane, 1-alumina-1-(X-PR 5 P 6 )cyclopentane, 1-alumina-1l-(X-PR 5 R 6 )cyclohexane, 1-inda-1-(X-PR 5 R 6 )cyclopentane, 1-inda-1-(X-AsR 5 R 6 )cyclohexane, 1-inda-1-(X-AsR 5 R 6 )cyclopentane, 1-inda-1-(X-SbR 5 R 6 )cyclopentane, 1-alumina-1-(X-AsR 5 R 6 )cycloheptane, 1-galla-1-(X-SbR 5 R 6 )cyclooctane, 1-galla-1-(X-CF 3 )cyclobutane, 1-galla-1-(X-F)cyclopentane, 1-galla-1-(X-C 2 F 5 )cyclopentane, 1-inda-1-(X-C 3 F 7 )cyclohexane or 1-galla-1(X-C 4 F 9 )cyclopentane.
Claim 19
Dependent Claim
13 words
A compound according to claim 1, wherein said compound is 1-galla-1-(3-dimethylaminopropyl)-cyclohexane or 1-galla-1-(3-dimethylaminopropyl)-cyclopentane.
References Cited (Backward Citations)
US4621147A
Cited
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