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US5139923A
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Method for improving adhesion of a resist layer to a metallic layer and electrolessly plating a wiring pattern thereon
Assignee: Hitachi Ltd
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Filing: 1991-01-03
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Granted: 1992-08-18
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Expires: 2011-01-03
Abstract
Abstract In conducting wiring by masking the portion other than the portion to be wired of a metallic laminate with a photoresist for plating and subjecting only the portion to be wired to pattern plating, the provision of a noble metal layer made of gold, platinum or the like, or a metallic layer made of a metal having a larger ionization tendency than that of a metal used in the pattern plating on the metallic layer constituting the undercoat of the photoresist for plating enables the peeling of the resist for plating to be prevented and excellent fine wiring to be conducted.
Inventors
- 👤 Ritsuji Toba
- 👤 Kanji Murakami
- 👤 Mineo Kawamoto
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 21:26
CPC Classifications
H; H05; H05K; H05K3/00; H05K3/40; H05K3/42; H05K3/425; H05K3/427; H05K3/10; H05K3/108; H05K3/38; H05K3/382; H05K3/384; H05K2201/00; H05K2201/03; H05K2201/0302; H05K2201/0317; H05K2201/0332; H05K2201/0335; H05K2201/0341; H05K2201/0347; H05K2203/00; H05K2203/03; H05K2203/0315; H05K2203/07; H05K2203/0703; H05K2203/072; H05K2203/0723; H05K2203/11; H05K2203/1157; H05K3/385
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
165 words
A method for improving the adhesion of a resist material on an insulating board having a first metallic layer on the surface thereof and for providing a wiring pattern by electroless plating with copper, comprising the steps of: a) depositing a second metallic layer of at least one element, or an alloy containing at least 5% by weight of at least one element, selected from the group consisting of aluminum, zinc, tin, chromium, iron, nickel and cobalt, said second metallic layer having a higher ionization tendency than that of copper which is to be electroless plated and that of said first metallic layer, on said first metallic layer, causing said resist material to adhere better thereto than said first metallic layer; b) depositing said resist material on said second metallic layer at areas other than areas to be plated with a wiring pattern; c) electroless plating a wiring pattern with copper on the areas of said second metallic layer not deposited with said resist material.
Claim 2
Independent Claim
165 words
A method for improving the adhesion of a resist material on an insulating board having a first metallic layer on the surface thereof and for providing a wiring pattern by electroless plating with copper, comprising the steps of: a) depositing a second metallic layer of at least one element, or an alloy containing at least 5% by weight of at least one element, selected from the group consisting of aluminum, zinc, tin, chromium, iron, nickel and cobalt, said second metallic layer having a higher ionization tendency than that of copper which is to be electroless plated and that of said first metallic layer, on said first metallic layer, causing said resist material to adhere better thereto than said first metallic layer; b) depositing said resist material on said second metallic layer at areas other than areas to be plated with a wiring pattern; c) electroless plating a wiring pattern with copper on the areas of said second metallic layer not deposited with said resist material.
Claim 3
Dependent Claim
19 words
A method according to claim 1, wherein the thickness of said second metallic layer is 1 μm or less.
Claim 4
Dependent Claim
15 words
A method according to claim 1, wherein said second metallic layer is formed by plating.
Claim 5
Dependent Claim
32 words
A method according to claim 1, wherein the surface of said first metallic layer constituting the undercoat of said second metallic layer or the surface of said second metallic layer is coarsened.
Claim 6
Dependent Claim
35 words
A method according to claim 1, wherein said second metallic layer at said areas not deposited with said resist material to which electroless plating is to be applied is removed prior to the electroless plating.
Claim 7
Dependent Claim
23 words
A method according to claim 1, further comprising a step of surface activation for electroless plating prior to forming said second metallic layer.
Claim 8
Dependent Claim
34 words
A method according to claim 1, wherein said first metallic layer has a circuit pattern prior to the formation of the resist for plating and the circuit portion is further formed by electroless plating.
Claim 9
Dependent Claim
28 words
A method according to claim 1, further comprising a step of removing the resist for plating and an unnecessary metallic layer after the completion of said electroless plating.
Claim 10
Dependent Claim
13 words
A method according to claim 1, wherein said first metallic layer comprises copper.
Claim 11
Dependent Claim
24 words
A method according to claim 9, wherein the surface of said first metallic layer made of copper is oxidized and then reduced for coarsening.
Claim 12
Dependent Claim
34 words
A method according to claim 10, wherein said oxidation is conducted with a treating solution containing a chlorite and said reduction is conducted electrically or chemically with a treating solution comprising an amineborane solution.
Claim 13
Dependent Claim
28 words
A method according to claim 9, wherein a thin copper layer is formed over said first copper metallic layer which constitutes an undercoat of said second metallic layer.
Claim 14
Dependent Claim
18 words
A method according to claim 12, wherein said thin copper layer is formed by electroplating or electroless plating.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-08-18 | 1996-02-17 | 1996-08-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-08-18 | 2000-02-17 | 2000-08-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-08-18 | 2004-02-17 | 2004-08-18 | $7700.00 | Window Closed / Lapsed |