US4007295A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Olefin-SO2 copolymer film adhesion to a substrate
Assignee: RCA Corp
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Filing: 1975-07-28
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Granted: 1977-02-08
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Expires: 1995-07-28
Abstract
Abstract To improve the adherence of an olefin-SO 2 copolymer film employed as an electron beam resist to a metallic substrate, a thin film of gold is first applied to the substrate. The resulting bond is strong enough to withstand exposure to electron beams, development of the resist film and electroplating of the film witout undercutting, lifting or distortion of the film.
Inventors
- 👤 Eugene Samuel Poliniak
- 👤 Richard Joseph Himics
- 👤 Henry Wielicki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 16:42
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/09; G03F7/11; G03F7/039; G11; G11B; G11B11/00; G11B11/03; G11B11/05; G11B23/00; G11B23/0057; Y; Y10; Y10S; Y10S430/00; Y10S430/143
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
99 words
In the method of fabricating a video disc record whereby a grooved copper recording master is coated with an olefin-SO 2 copolymer electron beam resist, the electron beam resist is exposed to a video signal-modulated beam of electrons produced by a scanning electron microscope, developed with a developer solvent to form a geometric surface relief pattern in the bottom of the groove, and electroplated with nickel to form a stamping master negative of said recording master, the improvement which comprises applying a layer of gold onto the grooved copper recording master prior to applying the olefin-SO 2 copolymer resist.
Claim 2
Dependent Claim
99 words
In the method of fabricating a video disc record whereby a grooved copper recording master is coated with an olefin-SO 2 copolymer electron beam resist, the electron beam resist is exposed to a video signal-modulated beam of electrons produced by a scanning electron microscope, developed with a developer solvent to form a geometric surface relief pattern in the bottom of the groove, and electroplated with nickel to form a stamping master negative of said recording master, the improvement which comprises applying a layer of gold onto the grooved copper recording master prior to applying the olefin-SO 2 copolymer resist.
Claim 3
Dependent Claim
18 words
A method according to claim 1 wherein the gold layer is from about 1000 to 2000 angstroms thick.
Claim 4
Dependent Claim
14 words
A method according to claim 1 wherein the gold layer is applied by evaporation.
Claim 5
Dependent Claim
30 words
A method according to claim 1 wherein prior to said gold layer a first layer of chromium about 200 to 500 angstroms thick is evaporated onto the grooved recording master.
Claim 6
Dependent Claim
27 words
A method according to claim 1 wherein a layer of gold about 1000 to 5000 angstroms thick is applied to the developed resist layer prior to electroplating.
Claim 7
Dependent Claim
15 words
A method according to claim 1 wherein the electron beam resist is 1-methylcyclopentene-SO 2 copolymer.
Claim 8
Dependent Claim
40 words
A method according to claim 2 wherein prior to said gold layer a first layer of chromium about 200 to 500 angstroms thick is evaporated onto the grooved recording master and wherein the electron beam resist is 1-methylcyclopentene-SO 2 copolymer.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1980-02-08 | 1980-08-09 | 1981-02-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1984-02-08 | 1984-08-09 | 1985-02-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1988-02-08 | 1988-08-09 | 1989-02-08 | $7700.00 | Window Closed / Lapsed |