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US5139904A
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Method of producing high resolution and reproducible patterns
Assignee: International Business Machines Corp
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Filing: 1990-04-16
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Granted: 1992-08-18
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Expires: 2010-04-16
Abstract
Abstract A method of producing high-resolution and reproducible patterns, typically polysilicon ultra-fine lines. According to a preferred embodiment of the method, a layer of a standard radiation-sensitive resist is applied over a polysilicon layer formed on a substrate. The photoresist is delineated as is standard in conventional UV lithography equipment to produce a first resist pattern. The structure is then placed in reactive ion etching (RIE) equipment and the resist pattern is isotropically eroded to reduce overall dimensions. The etched thickness (dTH) is accurately measured by interferometric techniques, so that the corresponding lateral dimension reduction (dW) is continuously monitored. The etching is terminated when the appropriate lateral dimension reduction has been obtained to produce a second resist pattern of the desired final width (LWf). The second resist pattern (17a') is then anisotropically transferred to the underlying polysilicon layer by reactive ion etching. Finally, the second resist pattern is removed to leave the desired polysilicon pattern having the desired final width (LWf).
Inventors
- 👤 Bernard Auda
- 👤 Roland Chanclou
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 06:10
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/26; H; H10; H10D; H10D64/00; H10D64/01; H10D64/013; H10D64/01302; H10D64/01304; H10D64/01326; H10P; H10P50/00; H10P50/20; H10P50/26; H10P50/264; H10P50/266; H10P50/267; H10P50/268; H10P50/71; H10P76/00; H10P76/20; H10P76/204; H10P76/2041; G03F7/40
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
122 words
A method of producing high-resolution and reproducible patterns in a structure comprising a layer of an etchable material formed on a substrate, comprising the steps of: (a) forming a radiation-sensitive film on said layer; (b) patterning said radiation-sensitive film to produce a first resist pattern of a first width (LWe); (c) isotropically etching said first resist pattern to reduce both lateral and vertical dimensions; (d) continuously monitoring the vertical dimension reduction by accurately measuring the etched thickness (dTH); (e) correlating the corresponding lateral dimension reduction (dW); and (f) terminating said etching step when the appropriate lateral dimension reduction (dWf) has been obtained to produce a second derived resist pattern having the final desired width (LWf) controllably less than the first width (LWe).
Claim 2
Independent Claim
122 words
A method of producing high-resolution and reproducible patterns in a structure comprising a layer of an etchable material formed on a substrate, comprising the steps of: (a) forming a radiation-sensitive film on said layer; (b) patterning said radiation-sensitive film to produce a first resist pattern of a first width (LWe); (c) isotropically etching said first resist pattern to reduce both lateral and vertical dimensions; (d) continuously monitoring the vertical dimension reduction by accurately measuring the etched thickness (dTH); (e) correlating the corresponding lateral dimension reduction (dW); and (f) terminating said etching step when the appropriate lateral dimension reduction (dWf) has been obtained to produce a second derived resist pattern having the final desired width (LWf) controllably less than the first width (LWe).
Claim 3
Dependent Claim
30 words
The method of claim 1, wherein said step of isotropically etching the first resist pattern is achieved in an RIE tool operating at high pressure to produce isotropic etch conditions.
Claim 4
Dependent Claim
25 words
The method of claim 2, wherein the operating conditions are: 97 cc O 2 , 3 cc CF 4 , 100 mTorrs and 1350 W.
Claim 5
Dependent Claim
37 words
The method of claim 1, further including the step of unidirectionally transferring the second derived resist pattern to said underlying layer of etchable material to produce the final desired pattern therein with the final desired width (LWf).
Claim 6
Dependent Claim
17 words
The method of claim 4, further including the step of stripping away the second derived resist pattern.
Claim 7
Dependent Claim
23 words
The method of claim 4, wherein said step of unidirectionally transferring the second derived resist pattern includes anisotropic etching in an RIE tool.
Claim 8
Dependent Claim
49 words
The method of claim 6, wherein said step of isotropically etching the first resist pattern is achieved in an RIE tool operating at high pressure to produce isotropic etch conditions, and further wherein said steps of unidirectionally transferring and of isotropically etching are completed in the same RIE tool.
Claim 9
Dependent Claim
52 words
The method of claim 1, wherein said step of patterning said radiation-sensitive film comprises the steps of: exposing said film to UV radiation through a mask having the desired configuration in conventinal UV lithography equipment operating at the limit of resolution specifications; and developing said film to produce the first resist pattern.
Claim 10
Dependent Claim
72 words
The method of claim 1, wherein said step of monitoring the vertical dimension reduction comprises the steps of: selecting a short wavelength of a species that is produced by the glow discharge that illuminates the structure during the step of isotropically etching; observing the glow discharge at normal incidence through a spectrometer tuned on the selected wavelength; and continuously monitoring the output signal produced by said spectrometer to measure the etched thickness.
Claim 11
Independent Claim
110 words
A method of producing high-resolution and reproducible patterns in a structure comprising a layer of an etchable material formed on a substrate, comprising the steps of: (a) patterning said layer to produce a first pattern of a first width (LWe); (b) isotropically etching the first pattern to reduce both lateral and vertical dimensions; (c) continuously monitoring the vertical dimension reduction by accurately measuring the etched thickness (dTH); (d) correlating the corresponding lateral dimension reduction (dW); and (e) terminating said etching step when the appropriate lateral dimension reduction (dWf) has been obtained to produce a second derived pattern having the final desired width (LWf) controllably less than the first width (LWe).
Claim 12
Independent Claim
110 words
A method of producing high-resolution and reproducible patterns in a structure comprising a layer of an etchable material formed on a substrate, comprising the steps of: (a) patterning said layer to produce a first pattern of a first width (LWe); (b) isotropically etching the first pattern to reduce both lateral and vertical dimensions; (c) continuously monitoring the vertical dimension reduction by accurately measuring the etched thickness (dTH); (d) correlating the corresponding lateral dimension reduction (dW); and (e) terminating said etching step when the appropriate lateral dimension reduction (dWf) has been obtained to produce a second derived pattern having the final desired width (LWf) controllably less than the first width (LWe).
Claim 13
Dependent Claim
81 words
The method of claim 10, wherein said step of patterning comprises the steps of: (i) forming a radiation-sensitive film on said layer of etchable material; (ii) exposing said film to UV radiation through a mask having the desired configuration in conventional UV lithography equipment operating at the limit of resolution specifications; (iii) developing said film to produce a first resist pattern; and (iv) unidirectionally transferring the first resist pattern to said underlying layer of etchable material to produce the first pattern.
Claim 14
Independent Claim
119 words
A method for detecting an intermediate end point in the dry etching of a structure, which includes a pattern formed on a layer, when the desired lateral dimension reduction of the pattern is attained, said method comprising the steps of: (a) exposing the pattern to an etching medium within an etching chamber; (b) selecting a characteristic wavelength of a species produced during etching in the glow discharge; (c) observing the selected wavelength at normal incidence of the pattern through a spectrometer; (d) continuously monitoring the vertical dimension reduction by measuring the etched thickness (dTH); (e) correlating the corresponding lateral dimension reduction (dW); and (f) terminating said exposing step when the lateral dimension reduction has reached the desired value (dWf).
Claim 15
Independent Claim
119 words
A method for detecting an intermediate end point in the dry etching of a structure, which includes a pattern formed on a layer, when the desired lateral dimension reduction of the pattern is attained, said method comprising the steps of: (a) exposing the pattern to an etching medium within an etching chamber; (b) selecting a characteristic wavelength of a species produced during etching in the glow discharge; (c) observing the selected wavelength at normal incidence of the pattern through a spectrometer; (d) continuously monitoring the vertical dimension reduction by measuring the etched thickness (dTH); (e) correlating the corresponding lateral dimension reduction (dW); and (f) terminating said exposing step when the lateral dimension reduction has reached the desired value (dWf).
References Cited (Backward Citations)
US3873361A
Cited
US4003044A
Cited
US3997367A
Cited
US4198261A
Cited
US4415402A
Cited
US4419809A
Cited
US4419810A
Cited
US4430791A
Cited
US4648937A
Cited
USRE33622E
Cited
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