Process for forming deposited film

Claim 1

A process for forming a crystalline deposited film on a substrate surface in a film forming space, which comprises: (a) preparing the surface on which spaced crystal nuclei are present for forming said crystalline deposited film by arranging said crystal nuclei at a desired position on said surface; (b) forming said crystalline deposited film on said surface of said substrate by separately introducing into said film forming space an activated species (A) formed by decomposition of a compound (SX) containing silicon and a halogen and an activated species (B) formed from a chemical substance for film formation which is chemically mutually reactive with said activated species (A) and said activated species (A) being formed in an activation space (A) different from the film forming space, and said activated species (B) being formed in an activation space (B) different from the film forming space, to form a mixture and effect chemical reaction therebetween to thereby effect the formation of the crystalline deposited film, said crystalline deposited film having a surface; (c) producing an etching action on the crystalline deposited film by exposing the crystalline deposited film surface to a gaseous substance (E) capable of effecting an etching action thereon, and thereby effecting crystal growth in a specific face direction.