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Aperture pattern-printing plate for shadow mask and method for manufacturing the same

Assignee: Toshiba Corp
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Filing: 1990-10-11
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Granted: 1992-07-28
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Expires: 2010-10-11
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Abstract

Abstract An aperture pattern-printing plate used for manufacturing a shadow mask, which comprises a transparent substrate, and an emulsion layer which is formed on the transparent substrate and which is opaque at portions corresponding to apertures of the shadow mask and transparent at other portions, wherein the emulsion layer is overlaid with at least one of the following a substantially-amorphous, transparent scratch-preventing film obtained by hydrolysis and condensation of metal alcoholate and having a thickness of not more than 1.5 μm, and a foreign matter-preventing film formed substantially of silicone and having a thickness of not more than 0.5 μm. The foreign matter-preventing film is formed on the scratch-preventing film if the foreign matter-preventing film and scratch-preventing film are both formed.

Inventors

  • 👤 Yasuhisa Ohtake
  • 👤 Yasushi Magaki

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-08 11:51
CPC Classifications
H; H01; H01J; H01J29/00; H01J29/02; H01J29/06; H01J29/07; H01J9/00; H01J9/02; H01J9/14; H01J9/142; G; G03; G03C; G03C11/00; G03C11/08; Y; Y10; Y10S; Y10S428/00; Y10S428/901; Y10T; Y10T428/00; Y10T428/24; Y10T428/24802; Y10T428/26; Y10T428/263; Y10T428/264; Y10T428/265; Y10T428/31504; Y10T428/31652; Y10T428/31663

Claims Analysis

Total Claims: 30
Claim 1
Independent Claim 86 words
An aperture pattern-printing plate used for manufacturing a shadow mask, comprising: a transparent substrate; an emulsion layer which is formed on the transparent substrate and which is opaque at portions corresponding to apertures of the shadow mask and is transparent at other portions; and a foreign matter sticking preventing film, of a thickness in the range of 0.05 to 0.5 μm, which is formed on the emulsion layer, is substantially constituted by a silicone film obtained by coating a silicone oil diluted with an organic solvent.
Claim 2
Dependent Claim 86 words
An aperture pattern-printing plate used for manufacturing a shadow mask, comprising: a transparent substrate; an emulsion layer which is formed on the transparent substrate and which is opaque at portions corresponding to apertures of the shadow mask and is transparent at other portions; and a foreign matter sticking preventing film, of a thickness in the range of 0.05 to 0.5 μm, which is formed on the emulsion layer, is substantially constituted by a silicone film obtained by coating a silicone oil diluted with an organic solvent.
Claim 3
Dependent Claim 49 words
An aperture pattern-printing plate according to claim 1, wherein said silicone film is formed by coating the emulsion layer with a silicone oil, said silicone oil containing a dimethyl siloxane or a dimethyl trisiloxane in which part of Si atoms are bonded to an alkyl group or allyl group.
Claim 4
Dependent Claim 34 words
An aperture pattern-printing plate according to claim 1, further comprising a protective film interposed between said emulsion layer and said foreign matter-preventing film, said protective film being substantially formed of gelatin and a hardener.
Claim 5
Dependent Claim 80 words
An aperture pattern-printing plate used for manufacturing a shadow mask, comprising: a transparent substrate; an emulsion layer which is formed on the transparent substrate and which is opaque at portions corresponding to apertures of the shadow mask and is transparent at other portions; and scratch-preventing film which is formed on the emulsion layer, is substantially formed of a transparent amorphous material obtiend by hydrolysis and condensation of a metal alcoholate, and has a thickness of 0.3 μm to 1.5 μm.
Claim 6
Dependent Claim 80 words
An aperture pattern-printing plate used for manufacturing a shadow mask, comprising: a transparent substrate; an emulsion layer which is formed on the transparent substrate and which is opaque at portions corresponding to apertures of the shadow mask and is transparent at other portions; and scratch-preventing film which is formed on the emulsion layer, is substantially formed of a transparent amorphous material obtiend by hydrolysis and condensation of a metal alcoholate, and has a thickness of 0.3 μm to 1.5 μm.
Claim 7
Dependent Claim 28 words
An aperture pattern-printing plate according to claim 4, wherein said metal alcoholate includes one kind of metallic element selected from the group including iron, titanium, zirconium, and silicon.
Claim 8
Dependent Claim 26 words
An aperture pattern-preventing plate according to claim 4, wherein said metal alcoholate is one kind of alcoholate selected from the group including methylate, ehtylate, and butylate.
Claim 9
Dependent Claim 48 words
An aperture pattern-printing plate according to claim 4, wherein said scratch-preventing film is formed by repeatedly coating the emulsion layer with an amorphous material layer a number of times, such that the amorphous material layer formed by one-time coating is in the range of 0.3 to 0.5 μm.
Claim 10
Dependent Claim 120 words
An aperture pattern-printing plate used for manufacturing a shadow mask, comprising: a transparent substrate; an emulsion layer which is formed on the transparent substrate and which is opaque at portions corresponding to apertures of the shadow mask and is transparent at other portions; and a scratch-preventing film which is formed on the emulsion layer, which is substantially formed of a transparent amorphous material obtained by hydrolysis and condensation of a metal alcoholate, and has a thickness of 0.3 μm to 1.5 μm; and a foreign matter sticking preventing film which is formed on the scratch-preventing layer, which is substantially constituted by a silicone film and has a thickness sufficient to prevent foreign matter sticking and not more than 0.5 μm.
Claim 11
Dependent Claim 120 words
An aperture pattern-printing plate used for manufacturing a shadow mask, comprising: a transparent substrate; an emulsion layer which is formed on the transparent substrate and which is opaque at portions corresponding to apertures of the shadow mask and is transparent at other portions; and a scratch-preventing film which is formed on the emulsion layer, which is substantially formed of a transparent amorphous material obtained by hydrolysis and condensation of a metal alcoholate, and has a thickness of 0.3 μm to 1.5 μm; and a foreign matter sticking preventing film which is formed on the scratch-preventing layer, which is substantially constituted by a silicone film and has a thickness sufficient to prevent foreign matter sticking and not more than 0.5 μm.
Claim 12
Dependent Claim 24 words
An aperture pattern-printing plate according to claim 8, wherein said foreign matter-preventing film has a thickness in the range of 0.05 to 0.5 μm.
Claim 13
Dependent Claim 49 words
An aperture pattern-printing plate according to claim 8, wherein said silicone film is formed by coating the emulsion layer with a silicone oil, said silicone oil containing a dimethyl siloxane or a dimethyl trisiloxane in which part of Si atoms are bonded to an alkyl group and/or allyl group.
Claim 14
Dependent Claim 28 words
An aperture pattern-printing plate according to claim 8, wherein said metal alcoholate includes one kind of metallic element selected from the group including iron, titanium, zirconium, and silicon.
Claim 15
Dependent Claim 26 words
An aperture pattern-preventing plate according to claim 8, wherein said metal alcoholate is one kind of alcoholate selected from the group including methylate, ethylate, and butylate.
Claim 16
Dependent Claim 23 words
An aperture pattern-printing plate according to claim 8, wherein said scratch-preventing film has a thickness in the range of 0.5 to 1.0 μm.
Claim 17
Dependent Claim 47 words
An aperture pattern-printing plate according to claim 8, wherein said scratch-preventing film is formed by coating the emulsion layer with an amorphous material layer a number of times, such that the amorphous material layer formed by one-time coating is in the range of 0.3 to 0.5 μm.
Claim 18
Independent Claim 106 words
A method of manufacturing an aperture pattern-printing plate used for making a shadow mask, comprising the steps of: preparing a transparent substrate which has an emulsion layer formed on one principal surface thereof; forming a shadow mask pattern in the emulsion layer such that those portions corresponding to apertures of the shadow mask are opaque and other portions are transparent; coating an alcoholic solution of a metal alcoholate over the emulsion layer in which the shadow mask pattern is formed; forming a transparent amorphous glassy film by drying the alcoholic solution coated over the emulsion layer; and forming a scratch-preventing film by heat-curing the glassy film.
Claim 19
Independent Claim 106 words
A method of manufacturing an aperture pattern-printing plate used for making a shadow mask, comprising the steps of: preparing a transparent substrate which has an emulsion layer formed on one principal surface thereof; forming a shadow mask pattern in the emulsion layer such that those portions corresponding to apertures of the shadow mask are opaque and other portions are transparent; coating an alcoholic solution of a metal alcoholate over the emulsion layer in which the shadow mask pattern is formed; forming a transparent amorphous glassy film by drying the alcoholic solution coated over the emulsion layer; and forming a scratch-preventing film by heat-curing the glassy film.
Claim 20
Dependent Claim 26 words
A method according to claim 15, wherein said metal alcoholate includes one kind of metallic element selected from the group including iron, titanium, zirconium, and silicon.
Claim 21
Dependent Claim 24 words
A method according to claim 15, wherein said metal alcoholate is one kind of alcoholate selected from the group including methylate, ethylate, and butylate.
Claim 22
Dependent Claim 45 words
A method according to claim 15, wherein said scratch-preventing film is formed by coating the emulsion layer with an amorphous material layer a number of times, such that the amorphous material layer formed by one-time coating is in the range of 0.3 to 0.5 μm.
Claim 23
Dependent Claim 23 words
A method according to claim 15, wherein said amorphous film is heat-cured at a temperature in the range of 60° to 180° C.
Claim 24
Independent Claim 108 words
A method of manufacturing an aperture pattern-printing plate used for making a shadow mask, comprising the steps of: preparing a transparent substrate which has an emulsion layer formed on one principal surface thereof; forming a shadow mask pattern in the emulsion layer such that those portions corresponding to apertures of the shadow mask are opaque and other portions are transparent; coating the emulsion layer, in which the shadow mask pattern is formed, with a silicone oil obtained by modifying a dimethyl silicone polymer; forming a silicone film by drying the silicone oil coated on the emulsion layer; and forming a foreign matter-preventing film by curing the silicone film.
Claim 25
Independent Claim 108 words
A method of manufacturing an aperture pattern-printing plate used for making a shadow mask, comprising the steps of: preparing a transparent substrate which has an emulsion layer formed on one principal surface thereof; forming a shadow mask pattern in the emulsion layer such that those portions corresponding to apertures of the shadow mask are opaque and other portions are transparent; coating the emulsion layer, in which the shadow mask pattern is formed, with a silicone oil obtained by modifying a dimethyl silicone polymer; forming a silicone film by drying the silicone oil coated on the emulsion layer; and forming a foreign matter-preventing film by curing the silicone film.
Claim 26
Dependent Claim 36 words
A method according to claim 20, wherein said silicone oil contains a dimethyl siloxane or a dimethyl trisiloxane in which part of Si atoms are bonded to alkyl groups and another part bonded to allyl groups.
Claim 27
Dependent Claim 35 words
A method according to claim 20, further comprising the step of: forming a protective film between the emulsion layer and the foreign matter-preventing film, said protective film being substantially formed of gelatin and a hardener.
Claim 28
Dependent Claim 27 words
A method according to claim 20, wherein said silicone film is cured by baking the same at a temperature in the range of 50° to 150° C.
Claim 29
Independent Claim 145 words
A method of manufacturing an aperture pattern-printing plate used for making a shadow mask, comprising the steps of: preparing a transparent substrate which has an emulsion layer formed on one principal surface thereof; forming a shadow mask pattern in the emulsion layer such that those portions corresponding to apertures of the shadow mask are opaque and other portions are transparent; coating the emulsion layer, in which the shadow mask pattern is formed, with an alcoholic solution of a metal alcoholate; forming a transparent amorphous glassy film by drying the alcoholic solution coated on the emulsion layer; forming a scratch-preventing film by heat-curing the glassy film; coating the scratch-preventing film with a silicone oil obtained by modifying a dimethyl silicone polymer; forming a silicone film by drying the silicone oil coated on the scratch-preventing film; and forming a foreign matter-preventing film by curing the silicone film.
Claim 30
Independent Claim 145 words
A method of manufacturing an aperture pattern-printing plate used for making a shadow mask, comprising the steps of: preparing a transparent substrate which has an emulsion layer formed on one principal surface thereof; forming a shadow mask pattern in the emulsion layer such that those portions corresponding to apertures of the shadow mask are opaque and other portions are transparent; coating the emulsion layer, in which the shadow mask pattern is formed, with an alcoholic solution of a metal alcoholate; forming a transparent amorphous glassy film by drying the alcoholic solution coated on the emulsion layer; forming a scratch-preventing film by heat-curing the glassy film; coating the scratch-preventing film with a silicone oil obtained by modifying a dimethyl silicone polymer; forming a silicone film by drying the silicone oil coated on the scratch-preventing film; and forming a foreign matter-preventing film by curing the silicone film.

References Cited (Backward Citations)

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USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1995-07-28 1996-01-27 1996-07-28 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1999-07-28 2000-01-27 2000-07-28 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2003-07-28 2004-01-27 2004-07-28 $7700.00 Window Closed / Lapsed

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