US4588676A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Photoexposing a photoresist-coated sheet in a vacuum printing frame
Assignee: RCA Licensing Corp
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Filing: 1983-06-24
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Granted: 1986-05-13
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Expires: 2003-06-24
Abstract
Abstract A method for exposing a layer of photoresist on a sheet includes positioning the sheet in a vacuum printing frame comprising a glass plate carrying an opaque master pattern of metal or metal oxide. With the pattern opposite the coating, the frame is evacuated and the layer is exposed. The pattern has a substantially-uniform thickness in the range of about 0.5±0.2 micrometer. To reduce the times for evacuating and devacuating the frame, the pattern side of the glass plate carries an array of light-transparent islands up to about 3.0-micrometer thick. An overcoating of wax on the islands is a further aid.
Inventors
- 👤 John J. Moscony
- 👤 Thomas J. Michielutti
- 👤 Charles M. Wetzel
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 12:26
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/20; G03F7/2002; G03F7/2014; C; C23; C23F; C23F1/00; C23F1/02; H; H01; H01J; H01J9/00; H01J9/02; H01J9/14; H01J9/142; Y; Y10; Y10S; Y10S430/00; Y10S430/162
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
151 words
A method for exposing a coating of photoresist on a sheet, said method including positioning the coated sheet in a vacuum printing frame, said frame including a photographic printing plate comprising an opaque master pattern on one major surface of a transparent support, said pattern being positioned opposite said coating, evacuating said frame to a low pressure whereby said pattern and said coating are pressed towards one another, exposing said coating to actinic radiation through said pattern, and then devacuating said frame, said opaque pattern consisting essentially of a layer having a substantially uniform thickness in the range of about 0.5±0.2 micrometer, and said printing plate carries a coating of islands of light-transmitting rubbery material over opaque portions of said master pattern, said islands being separated from each other in the non-opaque portions of said master pattern to provide continuous paths therebetween for shortening times for said evacuating and devacuating steps.
Claim 2
Independent Claim
151 words
A method for exposing a coating of photoresist on a sheet, said method including positioning the coated sheet in a vacuum printing frame, said frame including a photographic printing plate comprising an opaque master pattern on one major surface of a transparent support, said pattern being positioned opposite said coating, evacuating said frame to a low pressure whereby said pattern and said coating are pressed towards one another, exposing said coating to actinic radiation through said pattern, and then devacuating said frame, said opaque pattern consisting essentially of a layer having a substantially uniform thickness in the range of about 0.5±0.2 micrometer, and said printing plate carries a coating of islands of light-transmitting rubbery material over opaque portions of said master pattern, said islands being separated from each other in the non-opaque portions of said master pattern to provide continuous paths therebetween for shortening times for said evacuating and devacuating steps.
Claim 3
Dependent Claim
30 words
The method defined in claim 1 wherein said islands have substantially uniform thickness up to about 3.0 micrometers and cover all of the opaque portions of said opaque master pattern.
Claim 4
Dependent Claim
27 words
The method defined in claim 2 wherein said islands additionally overlap over narrow transparent areas adjacent and peripheral to the opaque portions of said opaque master pattern.
Claim 5
Dependent Claim
18 words
The method defined in claim 1 wherein the tops of said islands carry a thin overcoating of wax.
Claim 6
Dependent Claim
17 words
The method defined in claim 4 wherein said overcoating has a thickness of up to 0.1 micrometer.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-05-12 | 1989-11-11 | 1990-05-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-05-12 | 1993-11-11 | 1994-05-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-05-12 | 1997-11-11 | 1998-05-13 | $7700.00 | Window Closed / Lapsed |