Patent US5111042A successfully refreshed from Google Patents.
US5111042A
Expired / Lapsed
US
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Method and apparatus for generating particle beams
Assignee: BTG International Ltd
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Filing: 1988-10-28
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Granted: 1992-05-05
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Expires: 2008-10-28
Abstract
Abstract A source of atomic or molecular particles includes a source of ionized particles (1), an extraction electrode (2) and an einzel lens (3) to focus a beam of particles. A Wien filter (4) selects particles in said beam having a predetermined velocity and a charge exchange cell (7) neutralizes the ionized particles prior to the extraction of non-ionized particles from the beam.
Inventors
- 👤 John L. Sullivan
- 👤 Ning-Sheng Xu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 07:09
CPC Classifications
H; H05; H05H; H05H3/00; H05H3/02
Claims Analysis
Total Claims: 26
Claim 1
Independent Claim
89 words
A source of atomic or molecular particles comprising: a source of ionized particles; means for removing a beam of said ionized particles from said source; focusing means for focusing said beam of particles to form a focused beam of particles; filter means for selecting particles in said focused beam having a predetermined velocity; and charge exchange means for permitting neutralization of charge on said ionized particles, wherein said charge exchange means maintains a pressure at least two orders of magnitude higher than that of adjacent parts of the system.
Claim 2
Dependent Claim
89 words
A source of atomic or molecular particles comprising: a source of ionized particles; means for removing a beam of said ionized particles from said source; focusing means for focusing said beam of particles to form a focused beam of particles; filter means for selecting particles in said focused beam having a predetermined velocity; and charge exchange means for permitting neutralization of charge on said ionized particles, wherein said charge exchange means maintains a pressure at least two orders of magnitude higher than that of adjacent parts of the system.
Claim 3
Dependent Claim
22 words
A source of atomic or molecular particles as claimed in claim 1, wherein said source produces a pulsed beam of ionized particles.
Claim 4
Dependent Claim
38 words
A source of atomic or molecular particles as claimed in claim 2, wherein said filter means includes a neutral dump comprising a Wien filter which allows only one value of ion velocity to pass at a given time.
Claim 5
Dependent Claim
24 words
A source of atomic or molecular particles as claimed in claim 3 further comprising means for deflecting the ions emerging from the Wien filter.
Claim 6
Dependent Claim
34 words
A source of atomic or molecular particles as claimed in either claim 1 or 2, wherein said source includes an ionization cell which creates ions in said beam of ionized particles by electron impact.
Claim 7
Dependent Claim
25 words
A source of atomic or molecular particles as claimed in claim 5 further comprising an extraction electrode for extracting said ions from the ionization cell.
Claim 8
Dependent Claim
30 words
A source of atomic or molecular particles as claimed in claim 6 wherein said focusing means comprises an einzel lens for focusing said ions after extraction from the ionization cell.
Claim 9
Dependent Claim
38 words
A source of atomic or molecular particles as claimed in claim 7, wherein said filter means includes a neutral dump comprising a Wien filter which allows only one value of ion velocity to pass at a given time.
Claim 10
Dependent Claim
24 words
A source of atomic or molecular particles as claimed in claim 8 further comprising means for deflecting the ions emerging from the Wien filter.
Claim 11
Dependent Claim
33 words
A source of atomic or molecular particles as claimed in claim 9, wherein said deflecting means deflects the ions emerging from the Wien filter at an angle of about 5° from the previous.
Claim 12
Dependent Claim
38 words
A source of atomic or molecular particles as claimed in claim 6, wherein said filter means includes a neutral dump comprising a Wien filter which allows only one value of ion velocity to pass at a given time.
Claim 13
Dependent Claim
24 words
A source of atomic or molecular particles as claimed in claim 13 further comprising means for deflecting the ions emerging from the Wien filter.
Claim 14
Dependent Claim
38 words
A source of atomic or molecular particles as claimed in claim 5, wherein said filter means includes a neutral dump comprising a Wien filter which allows only one value of ion density to pass at a given time.
Claim 15
Dependent Claim
24 words
A source of atomic or molecular particles as claimed in claim 11 further comprising means for deflecting the ions emerging from the Wien filter.
Claim 16
Dependent Claim
36 words
A source of atomic or molecular particles as claimed in claim 1 further comprising a Bruch telefocus lens to focus ions in said focused beam which have passed said filter means, through said charge exchange means.
Claim 17
Dependent Claim
37 words
A source of atomic or molecular particles as claimed in claim 15, wherein a region occupied by the Bruch telefocus lens is held under high vacuum conditions in order to minimize the probability of charge exchange therein.
Claim 18
Dependent Claim
30 words
A source of atomic or molecular particles as claimed in claim 1, wherein the charge exchange means performs one of a resonance or an electron capture charge exchange process therein.
Claim 19
Dependent Claim
26 words
A source of atomic or molecular particles as claimed in claim 1, wherein said pressure maintained by said charge exchange means is about 10 -3 mbar.
Claim 20
Dependent Claim
51 words
A source of atomic or molecular particles as claimed in claim 1, wherein the charge exchange means includes a set of heatable filaments and a set of electrodes which are located opposite one another and substantially parallel to a trajectory of a beam to neutralize ions by an electron capture mechanism.
Claim 21
Dependent Claim
39 words
A source of atomic or molecular particles as claimed in claim 1, further comprising an exit aperture incorporating a set of deflection plates to remove residual ions from the beam which has been neutralized by said charge exchange means.
Claim 22
Dependent Claim
28 words
A source of atomic or molecular particles as claimed in claim 1, further comprising an exit aperture incorporating a set of deflection plates to scan an ion beam.
Claim 23
Dependent Claim
25 words
A source of atomic or molecular particles as claimed in claim 1, wherein a source of ionized particles includes a heated filament and a grid.
Claim 24
Dependent Claim
29 words
A source of atomic or molecular particles as claimed in claim 1, further comprising stigmator means adjacent said focusing means, to correct for astigmatism resulting from non-uniform field effects.
Claim 25
Dependent Claim
27 words
A source of atomic or molecular particles as claimed in claim 1, wherein the stigmator means comprises a pair of quadruples displaced by 45° from one another.
Claim 26
Dependent Claim
22 words
A source of atomic or molecular particles as claimed in claim 1, further comprising scanning means to generate a raster format beam.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-05-05 | 1995-11-04 | 1996-05-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-05-05 | 1999-11-04 | 2000-05-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-05-05 | 2003-11-04 | 2004-05-05 | $7700.00 | Window Closed / Lapsed |