US3757114A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Atoms or molecules apparatus and method for measuring the intensity of a beam of neutral
Assignee: AT&T Inc
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Filing: 1972-03-08
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Granted: 1973-09-04
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Expires: 1992-03-08
Abstract
Abstract The intensity of a beam of neutral particles traveling at velocities of up to 3.4 X 107 cm/sec may be monitored by inserting a precalibrated target in the path of the beam, and measuring the intensity of photon emissions which result from collision of the particles with the target. The intensity of the beam is related to the intensity of the photon emissions by the calibration factor of the target material. The invention may be used, for example, in conjunction with neutral particle implantation techniques.
Inventors
- 👤 D Simms
- 👤 N Tolk
- 👤 C White
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 07:14
CPC Classifications
G; G01; G01T; G01T1/00; G01T1/29
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
183 words
A method for measuring the intensity of a beam of neutral particles comprising measuring the intensity of a beam of ions of the same species as the neutral particles, producing collisions of the ion beam with a solid target surface at an energy sufficient to result in sputtering of excited state particles from the surface, and consequent photon emissions from the sputtered particles, the target surface consisting of a material whose work function is less than the ionization potential of the ions, detecting the intensities of at least a portion of the photon emissions, producing collisIons of the neutral beam with the target surface at the same angle of incidence and energy as the ion beam collisions, so as to result in photon emissions, and detecting the intensities of at least a portion of the photon emissions, the intensity of the neutral particle beam being indicated by the relationship Ip (Iion/Ip ) where Ip and Ip are the intensities of the photon emissions produced by the neutral particle beam, and the ion beam, respectively, and Iion is the intensity of the ion beam.
Claim 2
Independent Claim
183 words
A method for measuring the intensity of a beam of neutral particles comprising measuring the intensity of a beam of ions of the same species as the neutral particles, producing collisions of the ion beam with a solid target surface at an energy sufficient to result in sputtering of excited state particles from the surface, and consequent photon emissions from the sputtered particles, the target surface consisting of a material whose work function is less than the ionization potential of the ions, detecting the intensities of at least a portion of the photon emissions, producing collisIons of the neutral beam with the target surface at the same angle of incidence and energy as the ion beam collisions, so as to result in photon emissions, and detecting the intensities of at least a portion of the photon emissions, the intensity of the neutral particle beam being indicated by the relationship Ip (Iion/Ip ) where Ip and Ip are the intensities of the photon emissions produced by the neutral particle beam, and the ion beam, respectively, and Iion is the intensity of the ion beam.
Claim 3
Dependent Claim
84 words
The method of claim 1 in which the beam energies are from 3 to 5 electron volts in excess of the energy defined by the relationship E Es + (M1 + M2/M2) E* where M1 is the mass of the incident ion or neutral particle, M2 is the mass of the sputtered particle, Es is the threshold energy for the sputtering of surface particles in their electronic ground states, and E* is the excitation energy of a specific excited state of the sputtered particle.
Claim 4
Dependent Claim
54 words
The method of claim 1 in which the neutral beam is formed by passing the ion beam through a neutral particle gas, so as to neutralize at least a portion of the ion beam particles by charge exchange with the gas particles, and by deflecting the unneutralized particles from the beam following charge exchange.
Claim 5
Dependent Claim
20 words
The method of claim 1 in which the neutral particle gas is of the same species as the ion beam.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-09-03 | 1977-03-05 | 1977-09-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-09-03 | 1981-03-05 | 1981-09-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-09-03 | 1985-03-05 | 1985-09-04 | $7700.00 | Window Closed / Lapsed |