US5108984A
Expired / Lapsed
US
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Method for producing thin film of oxide superconductor
Assignee: Sumitomo Electric Industries Ltd
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Filing: 1990-12-19
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Granted: 1992-04-28
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Expires: 2010-12-19
Abstract
Abstract A thin film of an oxide superconductor having a homogeneous composition and less oxygen defects is produced by independently vaporizing at least one material selected from the group consisting of the elements of Ia, IIa and IIIa groups of the periodic table and their compounds and at least one material selected from the group consisting of the elements of Ib, IIb and IIIb groups of the periodic table and their compounds in the presence of molecular oxygen and depositing the vaporized materials together with oxygen on a substrate to form a thin film of the oxide superconductor.
Inventors
- 👤 Jun Shioya
- 👤 Yoichi Yamaguchi
- 👤 Akira Mizoguchi
- 👤 Noriyuki Yoshida
- 👤 Kenichi Takahashi
- 👤 Kenji Miyazaki
- 👤 Satoshi Takano
- 👤 Noriki Hayashi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 04:29
CPC Classifications
C; C04; C04B; C04B41/00; C04B41/009; C04B35/00; C04B35/01; C04B35/45; C04B35/4504; C04B41/45; C04B41/50; C04B41/5072; C04B41/5074; C04B41/52; C04B41/80; C04B41/81; C04B41/85; C04B41/89; H; H10; H10N; H10N60/00; H10N60/01; H10N60/0268; H10N60/0296; H10N60/0324; H10N60/0381; H10N60/0548; H10N60/0801; Y; Y10; Y10S; Y10S505/00; Y10S505/70; Y10S505/704; Y10S505/725; Y10S505/73; Y10S505/732
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
98 words
A method for producing a thin film of an oxide superconductor comprising independently vaporizing at least one first material selected from the group consisting of Y, the lanthanides and their compounds, at least one second material selected from the group consisting of Ca, Sr and Ba and their compounds, and at least one third material selected from the group consisting of Cu and its compounds, ionizing the vaporized material with molecular oxygen flowing onto a pre-heated substrate to to deposit the vaporized materials together with oxygen on the substrate to form the thin film of the oxide superconductor.
Claim 2
Independent Claim
98 words
A method for producing a thin film of an oxide superconductor comprising independently vaporizing at least one first material selected from the group consisting of Y, the lanthanides and their compounds, at least one second material selected from the group consisting of Ca, Sr and Ba and their compounds, and at least one third material selected from the group consisting of Cu and its compounds, ionizing the vaporized material with molecular oxygen flowing onto a pre-heated substrate to to deposit the vaporized materials together with oxygen on the substrate to form the thin film of the oxide superconductor.
Claim 3
Dependent Claim
16 words
The method according to claim 1, wherein at least one of the materials is an oxide.
Claim 4
Dependent Claim
34 words
The method according to claim 2, wherein the first material is an oxide selected from the group consisting of La 2 O 3 , Y 2 O 3 and Sc 2 O 3 .
Claim 5
Dependent Claim
37 words
The method according to claim 1, wherein the second material is a carbonate of IIa group is at least one selected from the group consisting of Ba 2 CO 3 , SrCO 3 and CaCO 3 .
Claim 6
Dependent Claim
12 words
The method according to claim 2, wherein the third material is CuO.
Claim 7
Dependent Claim
17 words
The method according to claim 1, wherein the substrate is made of a flexible elongate ceramic body.
Claim 8
Dependent Claim
15 words
The method according to claim 6, wherein the flexible elongate ceramic body is a tape.
Claim 9
Dependent Claim
16 words
The method according to claim 6, wherein the flexible elongate ceramic body is a round wire.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-04-28 | 1995-10-28 | 1996-04-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-04-28 | 1999-10-28 | 2000-04-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-04-28 | 2003-10-28 | 2004-04-28 | $7700.00 | Window Closed / Lapsed |