US5101764A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and apparatus for integrating optical sensor into processor
Assignee: Texas Instruments Inc
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Filing: 1991-02-20
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Granted: 1992-04-07
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Expires: 2011-02-20
Abstract
Abstract A method and apparatus for sensing radiation 26 indicative of at least one process variable in a semiconductor process chamber 10 in which a reactant gas reacts to effect changes in a silicon wafer 12. The method comprises positioning a substantially transparent window 22 in a conduit 14 leading to the wafer 12 and then flowing the reactant gas in the conduit 14 past the window 22 and toward the wafer 12. The radiation 26 is then sensed through the window 22. In the preferred embodiment the window 22 is positioned with an optical path along the center axis of the conduit 14. Other systems and methods are also disclosed.
Inventors
- 👤 Lee M. Loewenstein
- 👤 Thomas E. Tang
- 👤 Ming Hwang
- 👤 Steve S. Huang
- 👤 Rachelle Bienstock
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 03:20
CPC Classifications
G; G01; G01J; G01J5/00; G01J5/0003; G01B; G01B11/00; G01J5/0007; G01J5/02; G01J5/04; G01J5/08; G01J5/0818; G01J5/0875; H; H10; H10P; H10P72/00; H10P72/06; H10P72/0604
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
76 words
A method for sensing radiation indicative of at least one process variable in a semiconductor process chamber in which a reactant gas reacts to effect changes in a silicon wafer; said method comprising: positioning a window substantially transparent to said radiation in a conduit leading to said wafer in said chamber; flowing said reactant gas in said conduit past said window toward said wafer; and sensing said radiation indicative of said process variable through said window.
Claim 2
Independent Claim
76 words
A method for sensing radiation indicative of at least one process variable in a semiconductor process chamber in which a reactant gas reacts to effect changes in a silicon wafer; said method comprising: positioning a window substantially transparent to said radiation in a conduit leading to said wafer in said chamber; flowing said reactant gas in said conduit past said window toward said wafer; and sensing said radiation indicative of said process variable through said window.
Claim 3
Dependent Claim
64 words
The method of claim 1, wherein said window is positioned with an optical path along the center axis of said conduit; whereby said reactant gas flows to the center of said wafer, and radiation can be sensed at the center of said wafer through said window, and said window remains substantially transparent to said radiation and is not coated by deposition from said reaction.
Claim 4
Dependent Claim
30 words
The method of claim 1, and further comprising the step of separately supplying at least one other reactant gas to said chamber via a path other than past said window.
Claim 5
Dependent Claim
18 words
The method of claim 1, wherein said window is formed of a material inert to said reactant gas.
Claim 6
Dependent Claim
18 words
The method of claim 4, wherein said window is formed of quartz and said reactant gas comprises oxygen.
Claim 7
Dependent Claim
26 words
The method of claim 1, and further comprising the step of supplying said radiation indicative of process variables through said window prior to sensing said radiation.
Claim 8
Dependent Claim
13 words
The method of claim 1, wherein said radiation is indicative of coating thickness.
Claim 9
Dependent Claim
12 words
The method of claim 1, wherein said radiation is indicative of temperature.
Claim 10
Dependent Claim
11 words
The method of claim 1, wherein said radiation comprises infrared radiation.
Claim 11
Dependent Claim
11 words
The method of claim 1, wherein said reaction forms silicon dioxide.
Claim 12
Dependent Claim
11 words
The method of claim 1, wherein said reaction forms polycrystalline silicon.
Claim 13
Dependent Claim
11 words
The method of claim 1, wherein said reaction comprises photoresist ashing.
Claim 14
Dependent Claim
13 words
The method of claim 1, wherein said reaction comprises stripping of dielectric films.
Claim 15
Independent Claim
149 words
A method for sensing radiation indicative of at least one process variable in a semiconductor process chamber in which first and second reactant gases react to effect changes in a silicon wafer; said method comprising: positioning a window, substantially transparent to said radiation and inert to said reactant bases, in a conduit with an optical path along the center axis of said conduit leading to said wafer in said chamber; flowing said first reactant gas in said conduit past said window and toward the center of said wafer and separately supplying said second reactant gas to said chamber; sensing said radiation indicative of process variables through said window, whereby said window is not obscured by said reaction and remains substantially transparent to said radiation and both the supply of the first reactant gas and the measuring of a process variable can be effected at the center of the wafer.
Claim 16
Independent Claim
149 words
A method for sensing radiation indicative of at least one process variable in a semiconductor process chamber in which first and second reactant gases react to effect changes in a silicon wafer; said method comprising: positioning a window, substantially transparent to said radiation and inert to said reactant bases, in a conduit with an optical path along the center axis of said conduit leading to said wafer in said chamber; flowing said first reactant gas in said conduit past said window and toward the center of said wafer and separately supplying said second reactant gas to said chamber; sensing said radiation indicative of process variables through said window, whereby said window is not obscured by said reaction and remains substantially transparent to said radiation and both the supply of the first reactant gas and the measuring of a process variable can be effected at the center of the wafer.
Claim 17
Independent Claim
90 words
An apparatus for sensing radiation indicative of at least one process variable in a semiconductor process chamber in which a reactant gas reacts to effect changes in a silicon wafer, said apparatus comprising: a chamber containing said wafer; a conduit for transferring said reactant gas to said wafer in said chamber; and a window substantially transparent to said radiation and positioned in said conduit that leads to said wafer in said chamber, whereby said window is not obscured by deposition from the reaction and remains substantially transparent to said radiation.
Claim 18
Independent Claim
90 words
An apparatus for sensing radiation indicative of at least one process variable in a semiconductor process chamber in which a reactant gas reacts to effect changes in a silicon wafer, said apparatus comprising: a chamber containing said wafer; a conduit for transferring said reactant gas to said wafer in said chamber; and a window substantially transparent to said radiation and positioned in said conduit that leads to said wafer in said chamber, whereby said window is not obscured by deposition from the reaction and remains substantially transparent to said radiation.
Claim 19
Dependent Claim
21 words
The apparatus of claim 15 wherein said window is positioned with an optical path along the center axis of said conduit.
Claim 20
Dependent Claim
29 words
The apparatus of claim 15, and further comprising means for separately providing at least one other reactant gas to said chamber via a path other than past said window.
Claim 21
Dependent Claim
18 words
The apparatus of claim 15, wherein said window is formed of a material inert to said reactant gas.
Claim 22
Dependent Claim
12 words
The apparatus of claim 18, wherein said window is formed of quartz.
Claim 23
Dependent Claim
12 words
The apparatus of claim 18, wherein said window is formed of sapphire.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1995-04-07 | 1995-10-07 | 1996-04-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-04-07 | 1999-10-07 | 2000-04-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-04-07 | 2003-10-07 | 2004-04-07 | $7700.00 | Window Closed / Lapsed |