Method of making microscopic multiprobes

Claim 1

A method for making a microscopic multiprobe comprising the steps of: forming a thin insulating film on a crystalline substrate; forming a plurality of densely populated square holes in said thin film; selectively and epitaxially growing conductive crystals on said substrate exposed in said holes, to thereby form densely populated microscopic probes each having sharp apices on said crystalline substrate; and providing electrical contacts for each of said apices of said densely populated microscopic probes having through holes extending from the back of said crystalline substrate.

Claim 2

A method for making a microscopic multiprobe comprising the steps of: forming a thin insulating film on a crystalline substrate; forming a plurality of densely populated square holes in said thin film; selectively and epitaxially growing conductive crystals on said substrate exposed in said holes, to thereby form densely populated microscopic probes each having sharp apices on said crystalline substrate; and providing electrical contacts for each of said apices of said densely populated microscopic probes having through holes extending from the back of said crystalline substrate.

Claim 4

A method for making a microscopic multiprobe comprising the steps of: forming a thin insulating film on a crystalline substrate; forming a multiplicity of densely populated holes in said thin film; selectively and epitaxially growing conductive crystals on said substrate exposed in said holes, to thereby form densely populated microscopic probes, each having sharp apices on said crystalline substrate; forming on the backside of said crystalline substrate contact holes reaching respective microscopic probes, implanting a metal material in each of said contact holes; and providing conductors to be connected with said metal material, but insulated from the rest, and extended out of the contact holes for connection with terminals.

Claim 5

A method for making a microscopic multiprobe comprising the steps of: forming a thin insulating film on a crystalline substrate; forming a multiplicity of densely populated holes in said thin film; selectively and epitaxially growing conductive crystals on said substrate exposed in said holes, to thereby form densely populated microscopic probes, each having sharp apices on said crystalline substrate; forming on the backside of said crystalline substrate contact holes reaching respective microscopic probes, implanting a metal material in each of said contact holes; and providing conductors to be connected with said metal material, but insulated from the rest, and extended out of the contact holes for connection with terminals.

Claim 7

A method for making microscopic multiprobes comprising the steps of: forming a thin insulating film on a crystalline substrate; forming a plurality of densely populated square holes in said thin film; and selectively and epitaxially growing conductive crystals on said substrate exposed in said holes, to thereby form densely populated microscopic probes each having sharp apices on said crystalline substrate; wherein said step of selectively and epitaxially growing said conductive crystals comprises exposing said substrate in said holes to the gases SiH 2 CO 2 ,HCl,H 2 ,B 2 H 6 .

Claim 8

A method for making microscopic multiprobes comprising the steps of: forming a thin insulating film on a crystalline substrate; forming a plurality of densely populated square holes in said thin film; and selectively and epitaxially growing conductive crystals on said substrate exposed in said holes, to thereby form densely populated microscopic probes each having sharp apices on said crystalline substrate; wherein said step of selectively and epitaxially growing said conductive crystals comprises exposing said substrate in said holes to the gases SiH 2 CO 2 ,HCl,H 2 ,B 2 H 6 .