US5093557A — Substrate heater and heating element

Claim 1

Independent Claim 74 words

A method for providing uniform heat to substrates at a step of a process, said method comprising providing separate movable heating devices, one for each substrate; placing each said substrate onto one of said devices; sequentially moving each said device into a position where said step of said process can be performed on said substrate; and causing each of said devices alone to provide heat to said substrate at said step of said process.

Claim 2

Independent Claim 74 words

A method for providing uniform heat to substrates at a step of a process, said method comprising providing separate movable heating devices, one for each substrate; placing each said substrate onto one of said devices; sequentially moving each said device into a position where said step of said process can be performed on said substrate; and causing each of said devices alone to provide heat to said substrate at said step of said process.

Claim 3

Dependent Claim 43 words

The method of claim 1, wherein said step of moving each said device comprises inserting a support into a portion of said device and causing said support to transfer said device to another position where another step of said process can be performed.

Claim 4

Dependent Claim 43 words

The method of claim 1, wherein said step of moving said device comprises engaging a support on an external wall of said device and causing said support to transfer said device to another position where another step of said process can be performed.

Claim 5

Dependent Claim 15 words

The method of claim 1, further comprising moving said devices sequentially into another said position.

Claim 6

Dependent Claim 15 words

The method of claim 1, wherein said process step is performed in a vacuum environment.

Claim 7

Dependent Claim 23 words

The method of claim 5 wherein said vacuum environment is held at any chosen level below atmospheric pressure down to 10 -11 Torr.

Claim 8

Dependent Claim 20 words

The method of claim 6 wherein said heating results in a temperature on said substrate of at least 1000° C.

Claim 9

Dependent Claim 20 words

The method of claim 7 wherein said temperature varies by no more or less than 50° C. across said substrate.

Claim 10

Dependent Claim 14 words

The method of claim 1 wherein said step is performed in an oxygen environment.

Claim 11

Dependent Claim 24 words

The method of claim 9, said oxygen environment being held at a chosen partial pressure within the range of 10 -3 to 760 Torr.

Claim 12

Dependent Claim 58 words

A movable apparatus for resistive heating a substrate, said apparatus comprising a pair of holes, each hole being positioned to receive a separate prong of a fork support, and sides configured to receive a second alterative support, said holes and said sides being configured to enable movement of said apparatus from a first position to a second position.

Claim 13

Dependent Claim 58 words

A movable apparatus for resistive heating a substrate, said apparatus comprising a pair of holes, each hole being positioned to receive a separate prong of a fork support, and sides configured to receive a second alterative support, said holes and said sides being configured to enable movement of said apparatus from a first position to a second position.

Claim 14

Dependent Claim 61 words

A movable apparatus for resistive heating a substrate, said apparatus comprising a pair of holes, each hole being positioned to receive a separate prong of a fork support, and pins downwardly directed for resting within holes of a second support, said holes and said pins being configured to enable movement of said apparatus from a first position to a second position.

Claim 15

Dependent Claim 61 words

A movable apparatus for resistive heating a substrate, said apparatus comprising a pair of holes, each hole being positioned to receive a separate prong of a fork support, and pins downwardly directed for resting within holes of a second support, said holes and said pins being configured to enable movement of said apparatus from a first position to a second position.

Claim 16

Dependent Claim 12 words

The apparatus of claim 11 or 12, said apparatus being electrically conductive.

Claim 17

Dependent Claim 13 words

The apparatus of claim 13 wherein said fork holes have electrically conductive walls.

Claim 18

Dependent Claim 11 words

The apparatus of claim 14 wherein said pins are electrically conductive.

Claim 19

Dependent Claim 11 words

The apparatus of claim 15 wherein said sides are electrically conductive.

Claim 20

Dependent Claim 14 words

The apparatus of claim 14, further comprising a conductive oxidation resistant wire heating alloy.

Claim 21

Dependent Claim 86 words

A movable apparatus for resistive heating a substrate, said apparatus comprising holes for receiving a fork support, wherein said holes comprise electrically conductive walls, electrically conductive sides configured to receive a second alternative support, said holes and said sides being configured to enable movement of said apparatus from a first position to a second position, a conductive oxidation-resistant wire heating alloy, nonconductive means separating said alloy from said substrate, wherein said wire alloy, having a first and a second end, is wrapper around said nonconductive means.

Claim 22

Dependent Claim 86 words

A movable apparatus for resistive heating a substrate, said apparatus comprising holes for receiving a fork support, wherein said holes comprise electrically conductive walls, electrically conductive sides configured to receive a second alternative support, said holes and said sides being configured to enable movement of said apparatus from a first position to a second position, a conductive oxidation-resistant wire heating alloy, nonconductive means separating said alloy from said substrate, wherein said wire alloy, having a first and a second end, is wrapper around said nonconductive means.

Claim 23

Independent Claim 34 words

The apparatus of claims 18, further comprising a first conductive screw for holding said first end of said wrapped alloy, and a second conductive screw for holding said second end of said wire alloy.

Claim 24

Dependent Claim 54 words

The apparatus of claim 19 wherein an external power source is electrically coupled to said apparatus and said first screw is in electrical contact with said fork holes, wherein said fork holes are able to conduct current supplied by said power source to said first screw through said wrapped wire to said second screw.

Claim 25

Dependent Claim 52 words

The apparatus of claim 19 wherein an external power source is electrically coupled to said apparatus and said first screw is in electrical contact with said sides, wherein said sides are able to conduct current supplied by said power source to said first screw through said wrapped wire to said second screw.

Claim 26

Dependent Claim 52 words

The apparatus of claim 18 wherein an external power source is electrically coupled to said apparatus and said first screw is in electrical contact with said pins, wherein said pins are able to conduct current supplied by said power source to said first screw through said wrapped wire to said second screw.

Claim 27

Dependent Claim 90 words

A movable apparatus for resistive heating a substrate, said apparatus comprising holes for receiving a fork support, wherein said holes comprise electrically conductive walls, electrically conductive pins downwardly directed for resting within holes of a second support, said holes and said pins being configured to enable movement of said apparatus from a first position to a second position, a conductive oxidation-resistant wire heating alloy, and nonconductive means separating said alloy from said substrate, wherein said wire alloy, having a first and a second end, is wrapped around said nonconductive means.

Claim 28

Dependent Claim 90 words

A movable apparatus for resistive heating a substrate, said apparatus comprising holes for receiving a fork support, wherein said holes comprise electrically conductive walls, electrically conductive pins downwardly directed for resting within holes of a second support, said holes and said pins being configured to enable movement of said apparatus from a first position to a second position, a conductive oxidation-resistant wire heating alloy, and nonconductive means separating said alloy from said substrate, wherein said wire alloy, having a first and a second end, is wrapped around said nonconductive means.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	1995-03-03	1995-09-02	1996-03-03	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	1999-03-03	1999-09-02	2000-03-03	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	2003-03-03	2003-09-02	2004-03-03	$7700.00	Window Closed / Lapsed

Substrate heater and heating element

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