US4487161A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Semiconductor device manufacturing unit
Assignee: Mitsubishi Electric Corp
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Filing: 1980-10-28
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Granted: 1984-12-11
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Expires: 2000-10-28
Abstract
Abstract A semiconductor device manufacturing unit in which plasma gas is maintained sealed in a quartz tube by a magnet disposed outside the quartz tube to make the density of plasma gas high and uniform thereby improving the quality of CVD films deposited with the gas and reducing the processing time for semiconductor wafers. A wafer holder is movably mounted in the quartz tube. A support bar is provided for moving the wafer holder with the support bar serving additionally as a ground electrode. An RF electrode and magnet are disposed outside the quartz tube. A heater may be disposed outside the RF electrode and magnet.
Inventors
- 👤 Yoshihiro Hirata
- 👤 Kuniaki Miyake
- 👤 Hisao Yakushiji
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 18:17
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/50; C23C16/505; C23C16/507
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
59 words
A semiconductor device manufacturing unit comprising: a quartz tube adapted to be sealed; a wafer holder movably mounted in said quartz tube; a support bar for moving said wafer holder in said tube when sealed, said support bar serving as a ground electrode; and an RF electrode and a magnet both of which are disposed outside said quartz tube.
Claim 2
Dependent Claim
59 words
A semiconductor device manufacturing unit comprising: a quartz tube adapted to be sealed; a wafer holder movably mounted in said quartz tube; a support bar for moving said wafer holder in said tube when sealed, said support bar serving as a ground electrode; and an RF electrode and a magnet both of which are disposed outside said quartz tube.
Claim 3
Dependent Claim
23 words
The unit as claimed in claim 1 in which said wafer holder comprises means for arranging semiconductor wafers longitudinally in said wafer holder.
Claim 4
Dependent Claim
32 words
The unit as claimed in claim 1 wherein said RF electrode is in close contact with the outer wall of said quartz tube and said magnet is disposed outside said RF electrode.
Claim 5
Dependent Claim
19 words
The unit as claimed in claim 3 further comprising heater means disposed outside said RF electrode and said magnet.
Claim 6
Dependent Claim
48 words
The unit as claimed in any of claims 1-4 further comprising mounting means for said support bar, said mounting means comprising a flange secured to an end of said quartz tube with a sealing O-ring and a sealing bellows operatively coupled between said flange and said support bar.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-12-11 | 1988-06-11 | 1988-12-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-12-11 | 1992-06-11 | 1992-12-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-12-11 | 1996-06-11 | 1996-12-11 | $7700.00 | Window Closed / Lapsed |