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Method for depositing a Tio2 layer using a periodic and simultaneous tilting and rotating platform motion

Assignee: Spheral Solar Power Inc
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Filing: 1989-12-26
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Granted: 1992-01-14
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Expires: 2009-12-26
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Abstract

Abstract Method and apparatus are disclosed for depositing a uniform layer of material, such as titanium dioxide, on the surface of an object, such as a silicon sphere of a solar array (7). Component gases are injected at predetermined rates into a heated reaction chamber (5) where they react. Because of the reaction rate and injection velocities of the gases, the reaction is substantially completed at a calculated location inside the reaction chamber (5). The object which is to receive the layer, such as the solar array (7), is placed at the calculated location in the reaction chamber (5). The platform (68) to which the solar array (7) is attached is simultaneously tilted and rotated such that all areas of the surface of the array (7) are uniformly exposed to the titanium dioxide reactant.

Inventors

  • 👤 Sidney G. Parker
  • 👤 Jerry Wood
  • 👤 Robert T. Turner
  • 👤 Craig A. Fischer

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-07 17:05
CPC Classifications
H; H10; H10F; H10F71/00; H10F71/138; C; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/40; C23C16/405; C23C16/44; C23C16/458; C23C16/4582; C23C16/4587; C23C16/4588; Y; Y02; Y02E; Y02E10/00; Y02E10/50

Claims Analysis

Total Claims: 22
Claim 1
Independent Claim 127 words
A method for depositing a layer of material on the surface of an object, comprising the steps of: removably holding the object on a platform; placing said platform at a predetermined location within said reaction chamber; imparting a rotating motion to a rotation tube coupled to said platform; imparting a periodic, reciprocal linear motion to a push rod coupled to said platform such that the platform periodically and simultaneously tilts and rotates whereby all areas of the surface of the object are uniformly exposed to the reacting gases; injecting a first gas into a reaction chamber at a predetermined rate; and injecting a second gas into said reaction chamber at a predetermined rate to react with said first gas at a predetermined location within said reaction chamber.
Claim 2
Independent Claim 127 words
A method for depositing a layer of material on the surface of an object, comprising the steps of: removably holding the object on a platform; placing said platform at a predetermined location within said reaction chamber; imparting a rotating motion to a rotation tube coupled to said platform; imparting a periodic, reciprocal linear motion to a push rod coupled to said platform such that the platform periodically and simultaneously tilts and rotates whereby all areas of the surface of the object are uniformly exposed to the reacting gases; injecting a first gas into a reaction chamber at a predetermined rate; and injecting a second gas into said reaction chamber at a predetermined rate to react with said first gas at a predetermined location within said reaction chamber.
Claim 3
Dependent Claim 23 words
The method of claim 1 and further comprising the step of mixing a third and a fourth gas to generate said second gas.
Claim 4
Dependent Claim 12 words
The method of claim 1 wherein said first gas is water vapor.
Claim 5
Dependent Claim 14 words
The method of claim 1 wherein said second gas is titanium isoproxide and oxygen.
Claim 6
Dependent Claim 12 words
The method of claim 2 wherein said third gas is titanium isoproxide.
Claim 7
Dependent Claim 11 words
The method of claim 2 wherein said fourth gas is oxygen.
Claim 8
Dependent Claim 28 words
The method of claim 1 wherein said step of imparting a rotating motion to said rotation tube comprises the step of driving said rotation tube with a motor.
Claim 9
Dependent Claim 33 words
The method of claim 1 wherein said step of imparting a reciprocating linear motion to said push rod comprises the step of driving a cam coupled to said push rod with a motor.
Claim 10
Independent Claim 139 words
A method for depositing a layer of material on the surface of an object, comprising the steps of: injecting a first gas into a reaction chamber at a predetermined rate; injecting a second gas into said reaction chamber at a predetermined rate to react with said first gas at a predetermined location within said reaction chamber; mixing a third and a fourth gas to generate said second gas; removably holding the object on a platform; placing said platform at a predetermined location within said reaction chamber; imparting a rotating motion to a rotation tube coupled to said platform; and imparting a periodic, reciprocal linear motion to a push rod coupled to said platform such that the platform periodically and simultaneously tilts and rotates whereby all areas of the surface of the object are uniformly exposed to the reacting gases.
Claim 11
Independent Claim 139 words
A method for depositing a layer of material on the surface of an object, comprising the steps of: injecting a first gas into a reaction chamber at a predetermined rate; injecting a second gas into said reaction chamber at a predetermined rate to react with said first gas at a predetermined location within said reaction chamber; mixing a third and a fourth gas to generate said second gas; removably holding the object on a platform; placing said platform at a predetermined location within said reaction chamber; imparting a rotating motion to a rotation tube coupled to said platform; and imparting a periodic, reciprocal linear motion to a push rod coupled to said platform such that the platform periodically and simultaneously tilts and rotates whereby all areas of the surface of the object are uniformly exposed to the reacting gases.
Claim 12
Dependent Claim 28 words
The method of claim 9 wherein said step of imparting a rotating motion to said rotation tube comprises the step of driving said rotation tube with a motor.
Claim 13
Dependent Claim 33 words
The method of claim 9 wherein said step of imparting a reciprocating linear motion to said push rod comprises the step of driving a cam coupled to said push rod with a motor.
Claim 14
Dependent Claim 12 words
The method of claim 9 wherein said first gas is water vapor.
Claim 15
Dependent Claim 12 words
The method of claim 9 wherein said second gas is titanium isoproxide.
Claim 16
Dependent Claim 12 words
The method of claim 9 wherein said third gas is titanium isoproxide.
Claim 17
Dependent Claim 11 words
The method of claim 9 wherein said third gas is oxygen.
Claim 18
Independent Claim 139 words
A method for depositing a uniform layer of titanium dioxide on the surface of a solar cell array, comprising the steps of: heating a solution of titanium isoproxide to produce titanium isoproxide vapors; bubbling nitrogen gas through said titanium isoproxide solution to pick u said titanium isoproxide vapors; sweeping said titanium isoproxide vapors into a mixing chamber with nitrogen gas; injecting oxygen gas into said mixing chamber to mix with said titanium isoproxide vapors; injecting the mixture of titanium isoproxide vapors and oxygen into a reaction chamber; bubbling nitrogen gas through deionized water to produce water vapor; sweeping and injecting said water vapor into said reaction chamber; heating said reaction chamber; producing a reactant of titanium dioxide; simultaneously and periodically tilting and rotating the solar cell in said reaction chamber; and depositing said reactant on the solar cell array.
Claim 19
Independent Claim 139 words
A method for depositing a uniform layer of titanium dioxide on the surface of a solar cell array, comprising the steps of: heating a solution of titanium isoproxide to produce titanium isoproxide vapors; bubbling nitrogen gas through said titanium isoproxide solution to pick u said titanium isoproxide vapors; sweeping said titanium isoproxide vapors into a mixing chamber with nitrogen gas; injecting oxygen gas into said mixing chamber to mix with said titanium isoproxide vapors; injecting the mixture of titanium isoproxide vapors and oxygen into a reaction chamber; bubbling nitrogen gas through deionized water to produce water vapor; sweeping and injecting said water vapor into said reaction chamber; heating said reaction chamber; producing a reactant of titanium dioxide; simultaneously and periodically tilting and rotating the solar cell in said reaction chamber; and depositing said reactant on the solar cell array.
Claim 20
Dependent Claim 80 words
The method of claim 16 wherein said tilting and rotating step comprises the steps of: removably attaching the solar cell array to a platform; imparting a rotating motion to a rotation tube coupled to said platform; and imparting a periodic, reciprocal linear motion to a push rod coupled to said platform such that the platform periodically and simultaneously tilts and rotates whereby all areas of the surface of the solar cell array are uniformly exposed to the titanium dioxide reactant.
Claim 21
Dependent Claim 18 words
The method of claim 16 wherein said titanium proxide is heated to between 85° C. and 110° C.
Claim 22
Dependent Claim 18 words
The method of claim 16 wherein said reaction chamber is heated to between 200° C. and 300° C.

References Cited (Backward Citations)

US3998659A Cited
US4449880A Cited
US4618542A Cited
US4614835A Cited
JPS60194531A Cited
US4691076A Cited
US4717586A Cited
US4637855A Cited
JPH01194823A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1995-01-13 1995-07-15 1996-01-14 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1999-01-13 1999-07-15 2000-01-14 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2003-01-13 2003-07-15 2004-01-14 $7700.00 Window Closed / Lapsed

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