Parylene deposition chamber and method of use

Claim 1

A parylene deposition system comprising: a pyrolytic vapor generating module comprising: a vaporization chamber for vaporizing a quantity of di-para-xylylene dimer; and a pyrolysis chamber connected to said vaporization chamber, wherein said vaporized dimer may be pyrolized to form a reactive monomer vapor; and a deposition chamber module comprising: a closed tank having a lid movable between a first open position and a second closed position, said deposition chamber module including a vapor inlet port and outlet port formed upon said tank and positioned to provide a flow path for the reactive monomer vapor through said tank, said inlet port being disposed upon said tank such that the reactive monomer vapor will enter the tank tangentially, and will thereafter flow in a generally rotational path about the interior of the tank toward said outlet port; a substrate support fixture positioned within said tank; and means for selectively attaching and detaching said deposition chamber module to said pyrolytic vapor generating module.