Patent US5070317A successfully refreshed from Google Patents.
US5070317A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Miniature inductor for integrated circuits and devices
Assignee: Individual
•
Filing: 1989-01-17
•
Granted: 1991-12-03
•
Expires: 2009-01-17
Abstract
Abstract Spaced apart conductive strips are provided in a first and third of three layers covering a semiconductor substrate. Magnetic core material is included in the second layer so as to be interposed between the conductive strips of the first and second layers. The first and second layers are joined at suitable points so that their respective conductive strips combine to form a helical electrical path which spirals about a core portion of the magnetic material in the second layer. The second layer can be patterned to define a toroidal magnetic path and/or to define a path including a magnetic gap. The armature of an electromechanical relay can be formed within the optional gap by depositing magnetic armature material to partially overlap a sacrificial support base. When the sacrificial support base is etched away, it leaves the overlying armature material free to move.
Inventors
- 👤 Jayant K. Bhagat
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 18:58
CPC Classifications
B; B81; B81B; B81B7/00; B81B7/0032; B81B7/0077; B81C; B81C1/00; B81C1/00015; B81C1/00214; H; H01; H01F; H01F17/00; H01F17/0006; H01F17/0033; H01H; H01H50/00; H01H50/005; H10; H10D; H10D84/00; H10W; H10W44/00; H10W44/501; H01F2017/0086; H01H1/00; H01H1/0036; H01H2001/0052; H01H2001/0057
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
175 words
An electromagnetic device comprising: a semiconductor substrate having one or more electrical circuits integrally defined therein; a magnetic shield layer disposed over the substrate, a first layer of spaced apart conductive strips disposed over the shield layer; a magnetic core layer superimposed on the first layer of conductive strips patterned to define first and second transverse magnetic paths; a second layer of spaced apart conductive strips superimposed on the magnetic core layer; portions of the conductive strips of the second layer are connected to portions of the conductive strips of the first layer to form first and second, substantially helical electrical paths each spiralling about at least one portion of the magnetic core layer for generating or detecting magnetic flux in said one portion of the magnetic core layer, said portion of the magnetic core layer including at least one of said first and second transverse magnetic paths, wherein said magnetic shield layer shields one or more of said electrical circuits from the flux generated or detected by the first and second helical electrical paths.
Claim 2
Dependent Claim
175 words
An electromagnetic device comprising: a semiconductor substrate having one or more electrical circuits integrally defined therein; a magnetic shield layer disposed over the substrate, a first layer of spaced apart conductive strips disposed over the shield layer; a magnetic core layer superimposed on the first layer of conductive strips patterned to define first and second transverse magnetic paths; a second layer of spaced apart conductive strips superimposed on the magnetic core layer; portions of the conductive strips of the second layer are connected to portions of the conductive strips of the first layer to form first and second, substantially helical electrical paths each spiralling about at least one portion of the magnetic core layer for generating or detecting magnetic flux in said one portion of the magnetic core layer, said portion of the magnetic core layer including at least one of said first and second transverse magnetic paths, wherein said magnetic shield layer shields one or more of said electrical circuits from the flux generated or detected by the first and second helical electrical paths.
Claim 3
Dependent Claim
163 words
An electromagnetic device comprising: a semiconductor substrate having one or more electrical circuits integrally defined therein; a magnetic shield layer disposed over the substrate, a first layer of spaced apart conductive strips disposed over the shield layer; a magnetic core layer superimposed of the first layer of conductive strips; a second layer of spaced apart conductive strips superimposed on the magnetic core layer, portions of the conductive strips of the second layer connected to portions of the conductive strips of the first layer to form a first substantially helical electrical path which spirals about at least one portion of the magnetic core layer for generating or detecting magnetic flux in said one portion of the core layer, and wherein said magnetic shield layer shields one or more of said electrical circuits from the flux generated or detected by the first helical electrical path; and a movable member which is moved by a force induced by the magnetic flux of the magnetic core layer.
Claim 4
Dependent Claim
163 words
An electromagnetic device comprising: a semiconductor substrate having one or more electrical circuits integrally defined therein; a magnetic shield layer disposed over the substrate, a first layer of spaced apart conductive strips disposed over the shield layer; a magnetic core layer superimposed of the first layer of conductive strips; a second layer of spaced apart conductive strips superimposed on the magnetic core layer, portions of the conductive strips of the second layer connected to portions of the conductive strips of the first layer to form a first substantially helical electrical path which spirals about at least one portion of the magnetic core layer for generating or detecting magnetic flux in said one portion of the core layer, and wherein said magnetic shield layer shields one or more of said electrical circuits from the flux generated or detected by the first helical electrical path; and a movable member which is moved by a force induced by the magnetic flux of the magnetic core layer.
Claim 5
Dependent Claim
15 words
The electromagnet of claim 2 wherein the movable bar is resiliently anchored to the substrate.
Claim 6
Dependent Claim
185 words
An electromagnetic device comprising: a semiconductor substrate having one or more electrical circuits integrally defined therein; a magnetic shield layer disposed over the substrate, a first layer of spaced apart conductive strips disposed over the shield layer; a magnetic core layer superimposed on the first layer of conductive strips; a second layer of spaced apart conductive strips superimposed on the magnetic core layer, portions of the conductive strips of the second layer connected to portions of the conductive strips of the first layer to form a first, substantially helical electrical path which spirals about at least one portion of the magnetic core layer for generating or detecting magnetic flux in said one portion of the core layer, wherein said magnetic shield layer shields one or more of said electrical circuits from the flux generated or detected by the first helical electrical path and wherein the one or more electrical circuits of the semiconductor substrate include a plurality of transistors, the helical electrical path has three connection terminals, and at least two of the transistors are electrically coupled to a corresponding two of the connection terminals.
Claim 7
Dependent Claim
185 words
An electromagnetic device comprising: a semiconductor substrate having one or more electrical circuits integrally defined therein; a magnetic shield layer disposed over the substrate, a first layer of spaced apart conductive strips disposed over the shield layer; a magnetic core layer superimposed on the first layer of conductive strips; a second layer of spaced apart conductive strips superimposed on the magnetic core layer, portions of the conductive strips of the second layer connected to portions of the conductive strips of the first layer to form a first, substantially helical electrical path which spirals about at least one portion of the magnetic core layer for generating or detecting magnetic flux in said one portion of the core layer, wherein said magnetic shield layer shields one or more of said electrical circuits from the flux generated or detected by the first helical electrical path and wherein the one or more electrical circuits of the semiconductor substrate include a plurality of transistors, the helical electrical path has three connection terminals, and at least two of the transistors are electrically coupled to a corresponding two of the connection terminals.
Claim 8
Dependent Claim
255 words
An electromagnetic device comprising: a semiconductor substrate having one or more electrical circuits integrally defined therein; a magnetic shield layer disposed over the substrate, a first layer of spaced apart conductive strips disposed over the shield layer; a magnetic core layer superimposed on the first layer of conductive strips; a second layer of spaced apart conductive strips superimposed on the magnetic core layer, portions of the conductive strips of the second layer connected to portions of the conductive strips of the first layer to form a first, substantially helical electrical path which spirals about at least one portion of the magnetic core layer for generating or detecting magnetic flux in said one portion of the core layer, wherein said magnetic shield layer shields one or more of said electrical circuits from the flux generated or detected by the first helical electrical path, wherein the magnetic core layer includes a substantially annular section having two or more helical electrical paths spiraling there about, said two or more helical electrical paths being electrically isolated from one another, and wherein: the number of electrical circuit integrally defined in the semiconductor substrate is more than one; the semiconductor substrate includes substrate isolation means for subdividing the plural electrical circuits of the semiconductor substrate into at least first and second electrically isolated circuit portions and the substantially annular section of the magnetic core layer is positioned to define a magnetic coupling path extending across the substrate isolation means to magnetically couple the first circuit portion to the second circuit portion.
Claim 9
Dependent Claim
255 words
An electromagnetic device comprising: a semiconductor substrate having one or more electrical circuits integrally defined therein; a magnetic shield layer disposed over the substrate, a first layer of spaced apart conductive strips disposed over the shield layer; a magnetic core layer superimposed on the first layer of conductive strips; a second layer of spaced apart conductive strips superimposed on the magnetic core layer, portions of the conductive strips of the second layer connected to portions of the conductive strips of the first layer to form a first, substantially helical electrical path which spirals about at least one portion of the magnetic core layer for generating or detecting magnetic flux in said one portion of the core layer, wherein said magnetic shield layer shields one or more of said electrical circuits from the flux generated or detected by the first helical electrical path, wherein the magnetic core layer includes a substantially annular section having two or more helical electrical paths spiraling there about, said two or more helical electrical paths being electrically isolated from one another, and wherein: the number of electrical circuit integrally defined in the semiconductor substrate is more than one; the semiconductor substrate includes substrate isolation means for subdividing the plural electrical circuits of the semiconductor substrate into at least first and second electrically isolated circuit portions and the substantially annular section of the magnetic core layer is positioned to define a magnetic coupling path extending across the substrate isolation means to magnetically couple the first circuit portion to the second circuit portion.
Claim 10
Independent Claim
255 words
A method for forming an integrated electromagnetic device comprising: forming a layer of polyimide on or above the semiconductor substrate; patterning the polyimide layer to define vias extending though the polyimide layer; depositing a metal film on the patterned polyimide layer such that a portion of the deposited metal film adheres to the bottoms of the vias; and removing portions of the metal film which have not adhered to the bottoms of the vias; providing a semiconductor substrate having an integrated circuit integrally defined therein; providing a bonding layer; forming a first winding layer on the bonding layer of spaced apart, electrically conductive strips on the substrate, the first winding layer being composed of a first electrically conductive material; forming a magnetic core above the first layer of conductive strips, the magnetic core being shaped so as to permit the formation of a helical electrical path thereabout where the helical electrical path is to include the conductive strips of the first layer; forming a second winding layer of spaced apart, electrically conductive strips above the magnetic core, the second winding layer being composed of a second electrically conductive material; and connecting the conductive strips of the first and second winding layers so as to define a substantially helical electrical path spiraling about the magnetic core; wherein the forming of the first and second winding layers includes electroplating at least some of at least one of the first and second electrically conductive materials which form the respective conductive strips of the first and second winding layers.
Claim 11
Independent Claim
255 words
A method for forming an integrated electromagnetic device comprising: forming a layer of polyimide on or above the semiconductor substrate; patterning the polyimide layer to define vias extending though the polyimide layer; depositing a metal film on the patterned polyimide layer such that a portion of the deposited metal film adheres to the bottoms of the vias; and removing portions of the metal film which have not adhered to the bottoms of the vias; providing a semiconductor substrate having an integrated circuit integrally defined therein; providing a bonding layer; forming a first winding layer on the bonding layer of spaced apart, electrically conductive strips on the substrate, the first winding layer being composed of a first electrically conductive material; forming a magnetic core above the first layer of conductive strips, the magnetic core being shaped so as to permit the formation of a helical electrical path thereabout where the helical electrical path is to include the conductive strips of the first layer; forming a second winding layer of spaced apart, electrically conductive strips above the magnetic core, the second winding layer being composed of a second electrically conductive material; and connecting the conductive strips of the first and second winding layers so as to define a substantially helical electrical path spiraling about the magnetic core; wherein the forming of the first and second winding layers includes electroplating at least some of at least one of the first and second electrically conductive materials which form the respective conductive strips of the first and second winding layers.
References Cited (Backward Citations)
US3403323A
Cited
US3765956A
Cited
US3431468A
Cited
US3614554A
Cited
US3881244A
Cited
US4322698A
Cited
JPS55110009A
Cited
US4322700A
Cited
US4322701A
Cited
US4383270A
Cited
US4543553A
Cited
JPS60124859A
Cited
DE3346659A1
Cited
US4649755A
Cited
US4859633A
Cited
US4675628A
Cited
US4835598A
Cited
US4785345A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-12-02 | 1995-06-03 | 1995-12-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-12-02 | 1999-06-03 | 1999-12-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-12-02 | 2003-06-03 | 2003-12-03 | $7700.00 | Window Closed / Lapsed |