Abstract A position detection apparatus has a substrate on which a diffraction grating is formed and an alignment optical system for illuminating the diffraction grating with a pair of coherent light beams having different frequencies from each other from different directions. The intensity of interference fringes formed due to the interference of diffracted beams generated in the diffraction grating is detected photo-electrically. The alignment optical system forms the pair of coherent light by using an optical modulator, and two luminous fluxes from the optical modulator pass through independent optical paths positioned symmetrically with the optical axis of the alignment optical system therebetween and reach the diffraction grating from different directions. The alignment optical system has a stop having an opening having an inclined edge with respect to the direction of the grating components of the diffraction grating, the opening being in conjugation with the substrate.
Inventors
👤 Koichiro Komatsu
👤 Hideo Mizutani
👤 Nobutaka Magome
👤 Kazuya Ota
Bibliographic Details
Application Number—
JurisdictionUS
Data Sourcegoogle_patents
Last Synchronized2026-11-01 13:10
CPC Classifications
G; G03; G03F; G03F9/00; G03F9/70; G03F9/7049
Claims Analysis
Total Claims: 3
Claim 1
Independent Claim
180 words
A position detection apparatus comprising: a substrate having a diffraction grating; means for supplying illuminating flux; means for splitting said illuminating flux into two luminous fluxes; means for modulating the frequency of at least one of said luminous fluxes by a predetermined value in order to obtain two luminous fluxes having frequencies that are different from each other; means for causing the last-mentioned luminous fluxes to impinge upon said substrate in such a manner that they pass along independent optical paths and then are incident on said diffraction grating from different directions; means for adjusting an intersection angle made by said two luminous fluxes incident on said diffraction grating; means for adjusting the direction of arrangement of interference fringes generated on said diffraction grating by said two incident luminous fluxes, the last-mentioned adjusting means being disposed in at least one of said optical paths and including optical means which can be displaced for shifting a luminous flux received thereby in two directions orthogonal to each other; and means for photo-electrically detecting an optical beat signal due to said interference fringes.
Claim 2
Dependent Claim
180 words
A position detection apparatus comprising: a substrate having a diffraction grating; means for supplying illuminating flux; means for splitting said illuminating flux into two luminous fluxes; means for modulating the frequency of at least one of said luminous fluxes by a predetermined value in order to obtain two luminous fluxes having frequencies that are different from each other; means for causing the last-mentioned luminous fluxes to impinge upon said substrate in such a manner that they pass along independent optical paths and then are incident on said diffraction grating from different directions; means for adjusting an intersection angle made by said two luminous fluxes incident on said diffraction grating; means for adjusting the direction of arrangement of interference fringes generated on said diffraction grating by said two incident luminous fluxes, the last-mentioned adjusting means being disposed in at least one of said optical paths and including optical means which can be displaced for shifting a luminous flux received thereby in two directions orthogonal to each other; and means for photo-electrically detecting an optical beat signal due to said interference fringes.
Claim 3
Dependent Claim
30 words
A position detection apparatus according to claim 1, wherein said optical means includes a parallel plane plate whose inclination angle can be varied about two axes orthogonal to each other.