US4710026A
Expired / Lapsed
US
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Position detection apparatus
Assignee: Nikon Corp
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Filing: 1986-03-18
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Granted: 1987-12-01
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Expires: 2006-03-18
Abstract
Abstract An apparatus includes a means for providing a predetermined frequency difference between two light beams and generating an optical beat with respect to interference between first and second diffracted light beams from a diffraction grating formed on a substrate, and a means for detecting a phase difference between the optical beat and a reference signal having a frequency corresponding to the frequency difference between the two light beams, and detects a position of the substrate based upon the phase difference in accordance with an optical heterodyne interference method.
Inventors
- 👤 Nobutaka Magome
- 👤 Yutaka Ichihara
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 07:36
CPC Classifications
G; G03; G03F; G03F9/00; G03F9/70; G03F9/7065; G03F7/00; G03F7/70; G03F7/70483; G03F7/70605; G03F7/70616; G03F7/70633; G03F9/7049
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
110 words
An apparatus for detecting a position of an article on which a diffraction grating is provided, comprising: means for emitting first and second coherent light beams radiated onto said diffraction grating, said first and second light beams having different frequencies, thereby generating an optical beat based on interference between diffracted light beams of said first and second light beams which are generated from said diffraction grating; means for producing a reference signal having a frequency corresponding to a frequency difference between said first and second light beams; and means, including means for detecting said optical beat, for comparing a phase of said optical beat with that of said reference signal.
Claim 2
Independent Claim
110 words
An apparatus for detecting a position of an article on which a diffraction grating is provided, comprising: means for emitting first and second coherent light beams radiated onto said diffraction grating, said first and second light beams having different frequencies, thereby generating an optical beat based on interference between diffracted light beams of said first and second light beams which are generated from said diffraction grating; means for producing a reference signal having a frequency corresponding to a frequency difference between said first and second light beams; and means, including means for detecting said optical beat, for comparing a phase of said optical beat with that of said reference signal.
Claim 3
Dependent Claim
39 words
An apparatus according to claim 1, wherein said optical beat detection means includes aperture means for extracting the diffracted light beams of said first and second light beams which are generated in the same direction from said diffraction grating.
Claim 4
Dependent Claim
27 words
An apparatus according to claim 2, wherein said optical beat detection means includes photoelectric conversion means for receiving the diffracted light beams extracted by said aperture means.
Claim 5
Dependent Claim
52 words
An apparatus according to claim 1, wherein said emitting means includes means for determining incident directions of said first and second light beams, so that a direction of a specific diffracted light beam of said first light beam coincides with that of a specific diffracted light beam of said second light beam.
Claim 6
Dependent Claim
25 words
An apparatus according to claim 1, wherein said apparatus further includes means for determining a position of said article in response to said comparison means.
Claim 7
Dependent Claim
48 words
An apparatus according to claim 1, wherein said emitting means includes means for radiating coherent light beams, and optical modulation means for receiving the coherent light beams so as to radiate two light beams having a frequency difference corresponding to the frequency of said reference signal according thereto.
Claim 8
Dependent Claim
15 words
An apparatus according to claim 6, wherein said optical modulation means includes an acoustooptic modulator.
Claim 9
Dependent Claim
46 words
An apparatus according to claim 1, wherein said emitting means includes a Zeeman laser source for radiating coherent light beams including two different light components having different polarization directions and frequencies, and means for polarizing and splitting the coherent light beams from said Zeeman laser source.
Claim 10
Dependent Claim
29 words
An apparatus according to claim 8, wherein said reference signal producing means includes an analyzer arranged to partially pass the coherent light beams from said Zeeman laser source therethrough.
Claim 11
Dependent Claim
20 words
An apparatus according to claim 1, wherein said first and second light beams radiate said diffraction grating from different directions.
Claim 12
Independent Claim
175 words
An apparatus for detecting a position of an article on which a diffraction grating is provided, comprising: an apparatus main body; means for two-dimensionally moving said diffraction grating with respect to said apparatus main body within a plane including said diffraction grating; means for measuring a position of said article with respect to said apparatus main body during the two-dimensional movement; and means for detecting the position of said article based on a pitch of said diffraction grating, said detection means including: means for emitting first and second coherent light beams radiated onto said diffraction grating, said first and second light beams having different frequencies, thereby generating an optical beat based on interference between diffracted light beams of said first and second light beams which are generated from said diffraction grating; means for producing a reference signal having a frequency corresponding to a frequency difference between said first and second light beams; and means, including means for detecting said optical beat, for comparing a phase of said optical beat with that of said reference signal.
Claim 13
Independent Claim
175 words
An apparatus for detecting a position of an article on which a diffraction grating is provided, comprising: an apparatus main body; means for two-dimensionally moving said diffraction grating with respect to said apparatus main body within a plane including said diffraction grating; means for measuring a position of said article with respect to said apparatus main body during the two-dimensional movement; and means for detecting the position of said article based on a pitch of said diffraction grating, said detection means including: means for emitting first and second coherent light beams radiated onto said diffraction grating, said first and second light beams having different frequencies, thereby generating an optical beat based on interference between diffracted light beams of said first and second light beams which are generated from said diffraction grating; means for producing a reference signal having a frequency corresponding to a frequency difference between said first and second light beams; and means, including means for detecting said optical beat, for comparing a phase of said optical beat with that of said reference signal.
Claim 14
Independent Claim
164 words
An apparatus for detecting a deviation in one direction between first and second diffraction gratings which have a periodicity in said one direction and are arranged on an identical plane to be parallel to each other, comprising: means for emitting first and second coherent light beams radiated onto said first and second diffraction gratings, said first and second light beams having different frequencies, thereby generating interference fringes, which scan said first and second diffraction gratings at a frequency corresponding to a frequency difference between said first and second light beams; means for producing a first alternative output having a frequency corresponding to the frequency difference based on a diffracted light beam generated from said first diffraction grating by said interference fringes; means for producing a second alternative output having a frequency corresponding to the frequency difference based on a diffracted light beam generated from said second diffraction grating by said interference fringes; and means for comparing phases of said first and second alternative outputs.
Claim 15
Independent Claim
164 words
An apparatus for detecting a deviation in one direction between first and second diffraction gratings which have a periodicity in said one direction and are arranged on an identical plane to be parallel to each other, comprising: means for emitting first and second coherent light beams radiated onto said first and second diffraction gratings, said first and second light beams having different frequencies, thereby generating interference fringes, which scan said first and second diffraction gratings at a frequency corresponding to a frequency difference between said first and second light beams; means for producing a first alternative output having a frequency corresponding to the frequency difference based on a diffracted light beam generated from said first diffraction grating by said interference fringes; means for producing a second alternative output having a frequency corresponding to the frequency difference based on a diffracted light beam generated from said second diffraction grating by said interference fringes; and means for comparing phases of said first and second alternative outputs.
Claim 16
Dependent Claim
23 words
An apparatus according to claim 12, wherein said first and second light beams radiate said first and second diffraction gratings from different directions.
Claim 17
Dependent Claim
28 words
An apparatus according to claim 12, wherein said apparatus further includes means for independently extracting the diffracted light beams generated respectively from said first and second diffraction gratings.
Claim 18
Dependent Claim
42 words
An apparatus according to claim 14, wherein said extracting means includes first and second photo-electric conversion means, and optical means for focusing the diffracted light beams generated from said first and second diffraction gratings onto said first and second photo-electric conversion means.
Claim 19
Dependent Claim
43 words
An apparatus according to claim 12, wherein said first and second diffraction gratings each includes grating elements arranged at a pitch d, and frequencies of said first and second light beams are set so that a pitch of said interference fringes is d/2.
Claim 20
Dependent Claim
32 words
An apparatus according to claim 12, wherein said comparison means determines a deviation between said first and second diffraction gratings based on a phase difference between said first and second alternative outputs.
References Cited (Backward Citations)
US4636077A
Cited
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