Patent US5068022A successfully refreshed from Google Patents.
US5068022A
Expired / Lapsed
US
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Process for sputtering multilayers for magneto-optical recording
Assignee: Mitsubishi Chemical Corp
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Filing: 1989-11-27
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Granted: 1991-11-26
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Expires: 2009-11-27
Abstract
Abstract An improved sputtering process for making a platinum/cobalt (Pt/Co) multilayer film comprised of alternating layers of platinum and cobalt, said improvement comprising using as the sputter gas krypton, xenon or a mixture thereof.
Inventors
- 👤 Peter F. Carcia
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:50
CPC Classifications
G; G11; G11B; G11B11/00; G11B11/10; G11B11/105; G11B11/10582; G11B11/10586; B; B82; B82Y; B82Y25/00; H; H01; H01F; H01F10/00; H01F10/32; H01F10/324; H01F10/325; H01F41/00; H01F41/14; H01F41/18; H01F10/3286
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
32 words
An improved sputtering process for making a platinum/cobalt multilayer film comprised of alternating layers of platinum and cobalt, the improvement comprising using krypton, xenon or a mixture thereof as the sputter gas.
Claim 2
Dependent Claim
32 words
An improved sputtering process for making a platinum/cobalt multilayer film comprised of alternating layers of platinum and cobalt, the improvement comprising using krypton, xenon or a mixture thereof as the sputter gas.
Claim 3
Dependent Claim
11 words
The process of claim 1 wherein the sputter gas is krypton.
Claim 4
Dependent Claim
11 words
The process of claim 1 wherein the sputter gas is xenon.
Claim 5
Dependent Claim
24 words
The process of claim 1 wherein the sputter gas has a pressure about 2 to about 12 mTorr (about 0.27 to about 1.6 Pa).
Claim 6
Dependent Claim
66 words
The process of claim 4 wherein all said cobalt layers have substantially the same thickness d Co and all said platinum layers have substantially the same thickness d Pt , d Co is less than about 12 A (1.2 nm), d Pt is less than about 24 A (2.4 nm) and the total thickness of the multilayer film is less than about 750 A (75 nm).
Claim 7
Dependent Claim
33 words
The process of claim 5 wherein d Co is from about 2 to about 5 A (0.2 to about 0.5 nm) and d Pt /d Co is from about 1 to about 5.
Claim 8
Dependent Claim
11 words
The process of claim 6 wherein the sputter gas is krypton.
Claim 9
Dependent Claim
11 words
The process of claim 6 wherein the sputter gas is xenon.
Claim 10
Dependent Claim
66 words
The process of claim 1 wherein all said cobalt layers have substantially the same thickness d Co and all said platinum layers have substantially the same thickness d Pt , d Co is less than about 12 A (1.2 nm), d Pt is less than about 24 A (2.4 nm) and the total thickness of the multilayer film is less than about 750 A (75 nm).
Claim 11
Dependent Claim
33 words
The process of claim 9 wherein d Co is from about 2 to about 5 A (0.2 to about 0.5 nm) and d Pt /d Co is from about 1 to about 5.
Claim 12
Dependent Claim
11 words
The process of claim 10 wherein the sputter gas is krypton.
Claim 13
Dependent Claim
11 words
The process of claim 10 wherein the sputter gas is xenon.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-11-25 | 1995-05-27 | 1995-11-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-11-25 | 1999-05-27 | 1999-11-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-11-25 | 2003-05-27 | 2003-11-26 | $7700.00 | Window Closed / Lapsed |