US5066090A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Optical coupling element having a convex microlens and the method of manufacture
Assignee: Siemens AG
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Filing: 1990-08-20
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Granted: 1991-11-19
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Expires: 2010-08-20
Abstract
Abstract An optical coupling element having a convex, refractive microlens is characterized by a ball having a flat, planar surface being mounted in a through-hole of a carrier lamina with the flat, planar surface extending parallel to a planar surface of the lamina. The coupling element is preferably made by a method which involves forming a through-hole in a lamina, mounting a ball in the through-hole, processing a surface of the ball to form the planar surface that extends parallel to a surface of the lamina. Preferably, a plurality of coupling elements are formed by providing a plurality of through-holes in an enlarged carrier and after processing, each individual coupling element is then separated from this enlarged carrier.
Inventors
- 👤 Franz Mayerhofer
- 👤 Holger Karstensen
- 👤 Ralf Dietrich
- 👤 Werner Spaeth
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 11:01
CPC Classifications
G; G02; G02B; G02B7/00; G02B7/02; G02B7/027; G02B6/00; G02B6/24; G02B6/42; G02B6/4201; G02B6/4204; G02B6/4219; G02B6/422; G02B6/4225; G02B6/4236; G02B6/4238; Y; Y10; Y10S; Y10S359/00; Y10S359/90
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
120 words
A method for manufacturing an optical coupling element having a microlens mounted in a through-hole having a shape of a truncated cone in a carrier lamina with a flattened surface extending parallel to one of the surfaces of the carrier, said method comprising the steps of providing a carrier lamina, forming a through-hole having a shape like a truncated cone in the carrier lamina, securing a ball of transparent material in the through-hole with a portion of the ball projecting at least above one flat surface of the carrier lamina to form a spherical cap, and then processing the spherical cap to form a planar surface in the ball extending parallel to the one flat surface of the carrier lamina.
Claim 2
Independent Claim
120 words
A method for manufacturing an optical coupling element having a microlens mounted in a through-hole having a shape of a truncated cone in a carrier lamina with a flattened surface extending parallel to one of the surfaces of the carrier, said method comprising the steps of providing a carrier lamina, forming a through-hole having a shape like a truncated cone in the carrier lamina, securing a ball of transparent material in the through-hole with a portion of the ball projecting at least above one flat surface of the carrier lamina to form a spherical cap, and then processing the spherical cap to form a planar surface in the ball extending parallel to the one flat surface of the carrier lamina.
Claim 3
Dependent Claim
39 words
A method according to claim 1, wherein the step of providing the carrier lamina provides a carrier lamina composed of anisotropically etchable material and the step of forming the through-hole comprises anisotropically etching the through-hole into the carrier lamina.
Claim 4
Dependent Claim
28 words
A method according to claim 2, wherein the step of securing the ball in the through-hole comprises applying a glass solder and soldering the ball in said hole.
Claim 5
Dependent Claim
26 words
A method according to claim 3, wherein the step of processing the spherical cap to form the planar surface includes forming the planar surface by grinding.
Claim 6
Dependent Claim
23 words
A method according to claim 1, wherein the step of securing includes applying a glass solder and soldering the ball in the hole.
Claim 7
Dependent Claim
16 words
A method according to claim 5, wherein the step of processing includes grinding the spherical cap.
Claim 8
Dependent Claim
23 words
A method according to claim 1, wherein the step of processing the spherical cap includes grinding the planar surface into the spherical cap.
Claim 9
Dependent Claim
87 words
A method according to claim 1, wherein the manufacturing of the optical element comprises providing an enlarged carrier lamina, producing a plurality of through-holes in the carrier lamina, securing a ball in each of the through-holes, the step of processing includes simultaneously processing all of the spherical caps of each of the balls and the method further includes separating a plurality of optical coupling elements, each having a single microlens, by parting the enlarged carrier lamina into smaller portions having only one ball secured in one opening.
Claim 10
Independent Claim
141 words
A method of forming a plurality of optical coupling elements, each having a microlens secured in a flat carrier lamina, said microlens having a planar surface extending parallel to a plane surface of the carrier lamina, said method comprising the steps of providing a silicon wafer; etching a plurality of pyramid-shaped through-holes in said silicon wafer with the through-holes being arranged in a pattern; securing a ball of transparent material in each of the through-holes with a portion of the ball extending above one flat surface of the wafer to form a spherical cap for every ball; forming a plurality of flattened balls having a planar surface by processing each of the spherical caps; and then dividing the wafer into a plurality of carrier lamina with each carrier lamina having a single flattened ball to produce a plurality of coupling elements.
Claim 11
Independent Claim
141 words
A method of forming a plurality of optical coupling elements, each having a microlens secured in a flat carrier lamina, said microlens having a planar surface extending parallel to a plane surface of the carrier lamina, said method comprising the steps of providing a silicon wafer; etching a plurality of pyramid-shaped through-holes in said silicon wafer with the through-holes being arranged in a pattern; securing a ball of transparent material in each of the through-holes with a portion of the ball extending above one flat surface of the wafer to form a spherical cap for every ball; forming a plurality of flattened balls having a planar surface by processing each of the spherical caps; and then dividing the wafer into a plurality of carrier lamina with each carrier lamina having a single flattened ball to produce a plurality of coupling elements.
Claim 12
Dependent Claim
28 words
A method according to claim 9, which includes providing metallizations on said one surface of the wafer prior to separating the plurality of coupling elements from said wafer.
Claim 13
Dependent Claim
38 words
A method according to claim 9, wherein the step of etching includes forming a plurality of grooves to define a plurality of carrier lamina on the wafer, and said step of dividing separates the wafer at said grooves.
References Cited (Backward Citations)
US4726645A
Cited
US4867371A
Cited
EP0164834A1
Cited
EP0280305A1
Cited
US4875750A
Cited
US4826272A
Cited
US4830454A
Cited
US4989934A
Cited
EP0331331A2
Cited
US4897711A
Cited
US5009481A
Cited
JPH02127605A
Cited
US4919506A
Cited
US5023447A
Cited
US4995695A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-11-18 | 1995-05-20 | 1995-11-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-11-18 | 1999-05-20 | 1999-11-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-11-18 | 2003-05-20 | 2003-11-19 | $7700.00 | Window Closed / Lapsed |