Silicon substrate multichip assembly

Claim 2

An electronic packaging assembly, comprising: a silicon substrate having first and second sides; at least one semiconductor chip mounted on one of said sides; dopant means disposed into said substrate to form a doped conducting via region through said substrate from one side to the other without perforation of said substrate so as to maintain the mechanical and hermetic integrity of the structure of said substrate; a first conductor connected to said doped region at said first side; a second conductor connected with the doped region from said second side; said first conductor, doped region, and second conductor forming an electrically conductive via extending through said substrate from the first side to the second side without breaching the intrinsic hermetic integrity of said substrate; at least one of said conductors being connected to said chip; and a silicon cover hermetically sealed to said substrate, said cover and substrate thereby forming a fully hermetically sealed packaging assembly having the same coefficient of thermal expansion throughout.

Claim 3

The electronic packaging assembly claimed in claim 1, wherein said first and second sides of said silicon substrate define first and second surfaces, respectively, and wherein the electrical connection means further comprises: a hollow structure in the substrate leading to the doped region in the substrate, between the second surface and the conducting region; and a conductor passing through the hollow structure for interconnecting the second surface to said doped region.

Claim 4

The electronic packaging assembly claimed in claim 2, wherein the chip is mounted on the first surface of the substrate.

Claim 5

The electronic packaging assembly claimed in claim 2, wherein the chip is mounted on the second surface of the substrate.

Claim 6

The electronic packaging assembly claimed in claim 2, wherein the conductor is formed of material compatible with the environment between the chip and substrate.

Claim 7

The electronic packaging assembly claimed in claim 2, wherein the hollow structure comprises: a truncated hollow pyramid.

Claim 8

The electronic packaging assembly claimed in claim 6, wherein the hollow structure is a truncated hollow square pyramid formed by micro-machining.

Claim 9

The electronic packaging assembly claimed in claim 2, wherein the hollow structure comprises: axially aligned truncated hollow pyramids separated by a hollow column.

Claim 10

The electronic packaging assembly claimed in claim 8, further comprising: a second via including a hollow structure partially overlapping a portion of the hollow structure of the first via.

Claim 11

The electronic packaging assembly claimed in claim 1, further comprising: means for anodically bonding said cover means to the substrate.

Claim 12

The electronic packaging assembly claimed in claim 1, further comprising: a plurality of semiconductor chips; and multilayer substrate means bonded between the chips and substrate for mounting and interconnecting the chips.

Claim 13

An electronic packaging assembly, as in claim 1 further in which said dopant means comprises: a heavily doped region diffused into one of the surfaces of said substrate for forming a conductive region in said substrate, a channel formed partially through the substrate from the other of said surfaces and opposite from said doped region, said channel extending through said substrate and to said region, a first conductor in ohmic contact with said doped region and extending from said region and along said channel, and a second conductor formed on the other surface from said channel and in ohmic contact with the doped region, said first conductor, doped region, and second conductor forming an electrically conductive via extending through said substrate without breaching the intrinsic integrity of said substrate, at least one of said conductors being connected to said chip.

Claim 14

The electronic packaging assembly claimed in claim 11 further comprising: a plurality of silicon support posts placed between the cover and the support plate to additionally support the cover, means for anodically bonding said posts to said cover and said substrate.

Claim 15

An electronic packaging assembly, including a plurality of substrate each comprising: a silicon substrate having first and second sides, at least one semiconductor chip mounted on one of said sides, dopant means disposed into said substrate to form a doped conducting via region through said substrate from one side to the other without perforation of said substrate so as to maintain the mechanical and hermetic integrity of the structure of said substrate, a first conductor connected to said doped region at said first side, a second conductor connected with the doped region from said second side, said first conductor, doped region, and second conductor forming an electrically conductive via extending through said substrate from the first side to the second side without breaching the intrinsic hermetic integrity of said substrate, at least one of said conductors being connected to said chip; means for stacking said substrates one on top of the other; second vias for electrically interconnecting the conductors on said substrates; a silicon cover hermetically sealed to the top substrate, said cover and bottom substrate thereby forming a fully hermetically sealed packaging assembly having the same coefficient of thermal expansion throughout.

Claim 16

An electronic packaging assembly, including a plurality of substrate each comprising: a silicon substrate having first and second sides, at least one semiconductor chip mounted on one of said sides, dopant means disposed into said substrate to form a doped conducting via region through said substrate from one side to the other without perforation of said substrate so as to maintain the mechanical and hermetic integrity of the structure of said substrate, a first conductor connected to said doped region at said first side, a second conductor connected with the doped region from said second side, said first conductor, doped region, and second conductor forming an electrically conductive via extending through said substrate from the first side to the second side without breaching the intrinsic hermetic integrity of said substrate, at least one of said conductors being connected to said chip; means for stacking said substrates one on top of the other; second vias for electrically interconnecting the conductors on said substrates; a silicon cover hermetically sealed to the top substrate, said cover and bottom substrate thereby forming a fully hermetically sealed packaging assembly having the same coefficient of thermal expansion throughout.

Claim 17

The electronic packaging assembly claimed in claim 14, wherein said first and second sides define first and second surfaces, respectively, and wherein the first vias further comprise: electrically conducting regions in each substrate adjacent first surfaces thereof; interconnect means associated with each substrate for providing electrical connections between the regions and a second surface thereof; and conductive means for providing electrical connection between conductive regions and second vias.

Claim 18

The electronic packaging assembly claimed in claim 15, wherein the interconnecting means comprises: hollow structures in each substrate between the second surface and the conducting regions; and conductors interconnecting the conducting regions to the second surface through the hollow structures.

Claim 19

The electronic packaging assembly claimed in claim 14, wherein the sealing means comprises: top and bottom covers anodically bonded to surfaces of adjacent substrates; and means for anodically bonding each remaining substrate surface to an adjacent substrate.

Claim 20

The electronic packaging assembly claimed in claim 14 wherein the sealing means further comprises: deformable contacts for electrically interconnecting second vias in adjacent substrates.

Claim 21

The electronic packaging assembly claimed in claim 18 wherein the sealing means further comprises: anodically bonded top and bottom covers; second vias associated with each cover; deformable contact means for electrically connected the second vias associated with each cover to second vias in adjacent substrates; and electrical input output means associated with each cover for providing electrical connection to the second vias therein.

Claim 22

The electronic packaging assembly claimed in claim 14 wherein the second vias further comprise: holes drilled through the substrate; conductive materials substantially filling each hole; and depressions in the substrate surfaces associated with each end of a via hole therein.

Claim 23

The electronic packaging assembly claimed in claim 20 further comprising: deformable contact means associated with depressions on adjacent substrate surfaces for providing electrical interconnection there between.