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Coupling structures for a phase-locked laser array

Assignee: Xerox Corp
•
Filing: 1990-06-13
•
Granted: 1991-10-15
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Expires: 2010-06-13
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Abstract

Abstract Improved coupling structures for an index-guided laser array utilize passive transparent waveguides to improve coupling and phase-lock the array.

Inventors

  • 👤 Thomas L. Paoli

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-27 17:26
CPC Classifications
H; H01; H01S; H01S5/00; H01S5/40; H01S5/4025; H01S5/4031; H01S5/4068; H01S5/10; H01S5/4062; H01S5/50

Claims Analysis

Total Claims: 36
Claim 1
Independent Claim 413 words
A semiconductor laser array comprising: a monolithic semiconductor structure, divided into first, second, and third parts with the first and second parts separated by a first boundary and the second and third parts separated by a second boundary, each of said parts having a plurality of semiconductor heterostructure layers disposed over a substrate, at least one of said layers of each said part being an active region for light amplification and propagation under lasing conditions; means, electrically coupled only to said first and third parts, for applying an electrical forward bias to said layers in said first and third parts; a first plurality of substantially parallel, spaced apart, two-dimensional index-guided amplification waveguides, disposed in the active region of said first part, oriented parallel to a first axis in said active layer, with each of said amplification waveguides having a predetermined width, and having a first end terminating at said first boundary, for generating and amplifying light waves at a given wavelength in response to said electrical forward bias; a second plurality, equal to one more than said first plurality, of substantially parallel, spaced apart, two-dimensional index-guided amplification waveguides, disposed in the active region region of said third part, oriented parallel to said first axis in said active layer, with each of said amplification waveguides having a predetermined width, and having a first end terminating at said second boundary, for generating and amplifying light waves at a given wavelength in response to said electrical forward bias; a first plurality of substantially parallel, spaced apart, low-loss two-dimensional index-guided passive waveguides disposed in the active region of said second part, each passive waveguide oriented co-axially to a corresponding amplification waveguide in said first part and co-extensively coupled thereto at said first boundary, with each passive waveguide of width S, for guiding said amplified lightwaves generated in said corresponding coupled amplification waveguide; a second plurality of substantially parallel, spaced apart, low-loss, two-dimensional index-guided passive waveguides disposed inn the active region of said second part, each passive waveguide oriented coo-axially to a corresponding amplification waveguide in said third part and coo-extensively coupled thereto at said second boundary, for guiding said amplified lightwaves generated in said corresponding coupled amplification waveguide; and a first plurality of low-loss, two-dimensional index-guided y-shaped couplers, disposed in the active region of said second part, for interconnecting each passive waveguide in said first plurality with two adjacent waveguides in said second plurality to radiate out-of-phase modes so that the laser operates in the in-phase mode.
Claim 2
Dependent Claim 413 words
A semiconductor laser array comprising: a monolithic semiconductor structure, divided into first, second, and third parts with the first and second parts separated by a first boundary and the second and third parts separated by a second boundary, each of said parts having a plurality of semiconductor heterostructure layers disposed over a substrate, at least one of said layers of each said part being an active region for light amplification and propagation under lasing conditions; means, electrically coupled only to said first and third parts, for applying an electrical forward bias to said layers in said first and third parts; a first plurality of substantially parallel, spaced apart, two-dimensional index-guided amplification waveguides, disposed in the active region of said first part, oriented parallel to a first axis in said active layer, with each of said amplification waveguides having a predetermined width, and having a first end terminating at said first boundary, for generating and amplifying light waves at a given wavelength in response to said electrical forward bias; a second plurality, equal to one more than said first plurality, of substantially parallel, spaced apart, two-dimensional index-guided amplification waveguides, disposed in the active region region of said third part, oriented parallel to said first axis in said active layer, with each of said amplification waveguides having a predetermined width, and having a first end terminating at said second boundary, for generating and amplifying light waves at a given wavelength in response to said electrical forward bias; a first plurality of substantially parallel, spaced apart, low-loss two-dimensional index-guided passive waveguides disposed in the active region of said second part, each passive waveguide oriented co-axially to a corresponding amplification waveguide in said first part and co-extensively coupled thereto at said first boundary, with each passive waveguide of width S, for guiding said amplified lightwaves generated in said corresponding coupled amplification waveguide; a second plurality of substantially parallel, spaced apart, low-loss, two-dimensional index-guided passive waveguides disposed inn the active region of said second part, each passive waveguide oriented coo-axially to a corresponding amplification waveguide in said third part and coo-extensively coupled thereto at said second boundary, for guiding said amplified lightwaves generated in said corresponding coupled amplification waveguide; and a first plurality of low-loss, two-dimensional index-guided y-shaped couplers, disposed in the active region of said second part, for interconnecting each passive waveguide in said first plurality with two adjacent waveguides in said second plurality to radiate out-of-phase modes so that the laser operates in the in-phase mode.
Claim 3
Dependent Claim 34 words
The laser array of claim 1 with: each passive waveguide of width S, with the magnitude of the width S less than the critical width required for substantially complete confinement of said generated light.
Claim 4
Dependent Claim 24 words
The laser array of claim 1 wherein at least one of said first, second, or third parts is formed utilizing a layer disordering technique.
Claim 5
Dependent Claim 25 words
The laser array of claim 1 wherein at least one of said first, second, or third parts is formed by utilizing impurity induced layer disordering.
Claim 6
Dependent Claim 385 words
A semiconductor laser array comprising: a monolithic semiconductor structure, divided into first, second, and third parts with the first and second parts separated by a first boundary and the second and third parts separated by a second boundary, each of said parts having a plurality of semiconductor heterostructure layers disposed over a substrate, at least one of said layers of each said part being an active layer for light amplification and propagation under lasing conditions; means, electrically coupled only too said second part, for applying an electrical forward bias to said layers in said second part; a first plurality of substantially parallel, spaced apart, low-loss, two-dimensional index-guided passive waveguides, disposed in the active region of said first part, oriented parallel to a first axis in said active layer, with each of said low-loss waveguides having a predetermined width, and having a first end terminating at said first boundary; a second plurality, equal to one more than said first plurality, of substantially parallel, spaced apart,, two-dimensional, low-loss, index-guided passive waveguides, disposed in the active region of said third pat, oriented parallel to said first axis in said active layer, with each of said low-loss waveguides having a predetermined width, and having a first end terminating at said second boundary; a first plurality of substantially parallel, spaced apart, two-dimensional index-guided amplification waveguides disposed in the active region of said second part, each amplification waveguide oriented co-axially to a corresponding passive waveguide in said first part and coextensively coupled thereto at said first boundary, with each amplification waveguide for generating and amplifying lightwaves at a given wavelength in response to said electrical forward bias; a second plurality of substantially parallel, spaced apart, two-dimensional index-guided amplification waveguides disposed in the active region of said second part, each amplification waveguide oriented co-axially to a corresponding passive waveguide in said third part and co-extensively coupled thereto at said second boundary, with each amplification waveguide for generating and amplifying lightwaves at a given wavelength in response to said electrical forward bias; and a first plurality of, two-dimensional index-guided y-shaped coupling amplification waveguides, disposed in the active region of said second part, for interconnecting each amplification waveguide in said first plurality with two adjacent amplification waveguides i said second plurality to radiate out-of-phase modes so that the laser operates in the in-phase mode.
Claim 7
Dependent Claim 385 words
A semiconductor laser array comprising: a monolithic semiconductor structure, divided into first, second, and third parts with the first and second parts separated by a first boundary and the second and third parts separated by a second boundary, each of said parts having a plurality of semiconductor heterostructure layers disposed over a substrate, at least one of said layers of each said part being an active layer for light amplification and propagation under lasing conditions; means, electrically coupled only too said second part, for applying an electrical forward bias to said layers in said second part; a first plurality of substantially parallel, spaced apart, low-loss, two-dimensional index-guided passive waveguides, disposed in the active region of said first part, oriented parallel to a first axis in said active layer, with each of said low-loss waveguides having a predetermined width, and having a first end terminating at said first boundary; a second plurality, equal to one more than said first plurality, of substantially parallel, spaced apart,, two-dimensional, low-loss, index-guided passive waveguides, disposed in the active region of said third pat, oriented parallel to said first axis in said active layer, with each of said low-loss waveguides having a predetermined width, and having a first end terminating at said second boundary; a first plurality of substantially parallel, spaced apart, two-dimensional index-guided amplification waveguides disposed in the active region of said second part, each amplification waveguide oriented co-axially to a corresponding passive waveguide in said first part and coextensively coupled thereto at said first boundary, with each amplification waveguide for generating and amplifying lightwaves at a given wavelength in response to said electrical forward bias; a second plurality of substantially parallel, spaced apart, two-dimensional index-guided amplification waveguides disposed in the active region of said second part, each amplification waveguide oriented co-axially to a corresponding passive waveguide in said third part and co-extensively coupled thereto at said second boundary, with each amplification waveguide for generating and amplifying lightwaves at a given wavelength in response to said electrical forward bias; and a first plurality of, two-dimensional index-guided y-shaped coupling amplification waveguides, disposed in the active region of said second part, for interconnecting each amplification waveguide in said first plurality with two adjacent amplification waveguides i said second plurality to radiate out-of-phase modes so that the laser operates in the in-phase mode.
Claim 8
Dependent Claim 34 words
The laser array of claim 5 with: each passive waveguide of width S, with the magnitude of the width S less that the critical width required for substantially complete confinement of said generated light.
Claim 9
Dependent Claim 24 words
The laser array of claim 5 wherein at least one of said first, second, or third parts is formed utilizing a layer disordering technique.
Claim 10
Dependent Claim 25 words
The laser array of claim 5 wherein at least one of said first, second, or third parts is formed by utilizing impurity induced layer disordering.
Claim 11
Dependent Claim 139 words
A semiconductor laser array comprising: a monolithic structure, divided into first, second, and third parts with the first and second parts separated by a first boundary and the second and third parts separated by a second boundary, and each of said parts separated by a second boundary, and each of said parts having an active layer; means for electrically forward biasing only said second part; a first plurality of parallel, low-loss, passive waveguides disposed only inn said first part and terminating at said first boundary; a second plurality of parallel, low-loss, passive waveguides disposed only in said third part and terminating at said second boundary; and a plurality of index-guided amplification waveguides disposed in the second part for propagating only an in-phase array mode and oriented co-axially and coupled with the passive waveguides at said first and second boundaries.
Claim 12
Dependent Claim 139 words
A semiconductor laser array comprising: a monolithic structure, divided into first, second, and third parts with the first and second parts separated by a first boundary and the second and third parts separated by a second boundary, and each of said parts separated by a second boundary, and each of said parts having an active layer; means for electrically forward biasing only said second part; a first plurality of parallel, low-loss, passive waveguides disposed only inn said first part and terminating at said first boundary; a second plurality of parallel, low-loss, passive waveguides disposed only in said third part and terminating at said second boundary; and a plurality of index-guided amplification waveguides disposed in the second part for propagating only an in-phase array mode and oriented co-axially and coupled with the passive waveguides at said first and second boundaries.
Claim 13
Dependent Claim 25 words
The laser array of claim 9 wherein said plurality of amplification waveguides in said second part is in the form of a y-coupled waveguide array.
Claim 14
Dependent Claim 24 words
The laser array of claim 9 wherein at least one of said first, second, or third parts is formed utilizing a layer disordering technique.
Claim 15
Dependent Claim 25 words
The laser array of claim 9 wherein at least one of said first, second, or third parts is formed by utilizing impurity induced layer disordering.
Claim 16
Dependent Claim 284 words
A semiconductor laser array comprising: a monolithic semiconductor structure, divided into first, second, and third parts with the first and second parts separated by a first boundary and the second and third parts separated by a second boundary, each of said parts having a plurality of semiconductor heterostructure layers disposed over a substrate, at least one of said layers of each said part being an active layer for light amplification and propagation under lasing conditions; means, electrically coupled only to said second part, for applying an electrical forward bias to said layers in said second part; a first plurality of substantially parallel, spaced apart, y-coupled, low-loss, two-dimensional index-guided passive waveguides, disposed in the active region of said first part, oriented parallel to a first axis in said active layer, with each of said low-loss waveguides having a width S, and having a first end terminating at said first boundary; a second plurality, substantially parallel, spaced apart, y-coupled, two-dimensional, low-loss, index-guided passive waveguides, disposed in the active region of said third part, oriented parallel to said first axis in said active layer, with each of said low-loss waveguides having a width S, and having a first end terminating at said second boundary; a plurality of substantially parallel, spaced apart, two-dimensional index-guided amplification waveguide disposed in the active region of said second part, each amplification waveguide oriented co-axially to a corresponding passive waveguide in said first part and said second part and co-extensively coupled thereto at said first and second boundaries, respectively, with each amplification waveguide for generating and amplifying lightwaves at a given wavelength in response to said electrical forward bias, with said y-coupled passive waveguides for phase-locking the lightwaves generated in said amplification waveguides.
Claim 17
Dependent Claim 284 words
A semiconductor laser array comprising: a monolithic semiconductor structure, divided into first, second, and third parts with the first and second parts separated by a first boundary and the second and third parts separated by a second boundary, each of said parts having a plurality of semiconductor heterostructure layers disposed over a substrate, at least one of said layers of each said part being an active layer for light amplification and propagation under lasing conditions; means, electrically coupled only to said second part, for applying an electrical forward bias to said layers in said second part; a first plurality of substantially parallel, spaced apart, y-coupled, low-loss, two-dimensional index-guided passive waveguides, disposed in the active region of said first part, oriented parallel to a first axis in said active layer, with each of said low-loss waveguides having a width S, and having a first end terminating at said first boundary; a second plurality, substantially parallel, spaced apart, y-coupled, two-dimensional, low-loss, index-guided passive waveguides, disposed in the active region of said third part, oriented parallel to said first axis in said active layer, with each of said low-loss waveguides having a width S, and having a first end terminating at said second boundary; a plurality of substantially parallel, spaced apart, two-dimensional index-guided amplification waveguide disposed in the active region of said second part, each amplification waveguide oriented co-axially to a corresponding passive waveguide in said first part and said second part and co-extensively coupled thereto at said first and second boundaries, respectively, with each amplification waveguide for generating and amplifying lightwaves at a given wavelength in response to said electrical forward bias, with said y-coupled passive waveguides for phase-locking the lightwaves generated in said amplification waveguides.
Claim 18
Dependent Claim 24 words
The laser array of claim 13 wherein at least one of said first, second, or third parts is formed utilizing a layer disordering technique.
Claim 19
Dependent Claim 25 words
The laser array of claim 13 wherein at least one of said first, second, or third parts is formed by utilizing impurity induced layer disordering.
Claim 20
Dependent Claim 34 words
The laser array of claim 13 with each passive waveguide or width S and with the magnitude or width S less than a critical width required for substantially complete confinement of said generated light.
Claim 21
Dependent Claim 143 words
A semiconductor laser array comprising: a monolithic structure, divided into first, second, and third parts with the first and second parts separated by a first boundary and the second and third parts separated by a second boundary, and each of said parts having an active layer; means for electrically forward biasing only said second part; a first plurality of, low-loss, passive waveguides disposed only in said first part and terminating at said first boundary for propagating only an in-phase array mode; a second plurality of, low-loss passive waveguides disposed only inn said third part and terminating at said second boundary for propagating only an in-phase array mode; and a plurality of parallel, spaced-apart, index-guided amplification waveguides disposed in the second part for generating and amplifying light waves and oriented co-axially and co-extensibly coupled to the passive waveguides at said first and second boundaries.
Claim 22
Dependent Claim 143 words
A semiconductor laser array comprising: a monolithic structure, divided into first, second, and third parts with the first and second parts separated by a first boundary and the second and third parts separated by a second boundary, and each of said parts having an active layer; means for electrically forward biasing only said second part; a first plurality of, low-loss, passive waveguides disposed only in said first part and terminating at said first boundary for propagating only an in-phase array mode; a second plurality of, low-loss passive waveguides disposed only inn said third part and terminating at said second boundary for propagating only an in-phase array mode; and a plurality of parallel, spaced-apart, index-guided amplification waveguides disposed in the second part for generating and amplifying light waves and oriented co-axially and co-extensibly coupled to the passive waveguides at said first and second boundaries.
Claim 23
Dependent Claim 28 words
The laser array of claim 17 wherein at least one of said first or second pluralities of passive waveguides is in the form of a y-coupled waveguide array.
Claim 24
Dependent Claim 24 words
The laser array of claim 17 wherein at least one of said first, second, or third parts is formed utilizing a layer disordering technique.
Claim 25
Dependent Claim 24 words
The laser array of claim 17 wherein at least one of said first, second, or third parts is formed utilizing impurity induced layer disordering.
Claim 26
Dependent Claim 155 words
A semiconductor laser array comprising: a monolithic semiconductor structure, divided into first, second, and third parts with the first and second parts separated by a first boundary and the second and third parts separated by a second boundary, and each of said parts having at least an active layer for amplification and propagation of light waves under lasing conditions; means for electrically forward biasing only said first and third parts; a first plurality of spaced-apart, amplification waveguides disposed in said first part for generating and amplifying light waves and terminating at said first boundary; a second plurality of spaced-apart, amplification waveguides disposed in the second part for generating and amplifying light waves and terminating at said second boundary; and a plurality of low-loss, two-dimensional, passive waveguides disposed only in said second part for propagating only an in-phase array mode and oriented co-axially and co-extensively coupled to the amplification waveguides at said first and second boundaries.
Claim 27
Dependent Claim 155 words
A semiconductor laser array comprising: a monolithic semiconductor structure, divided into first, second, and third parts with the first and second parts separated by a first boundary and the second and third parts separated by a second boundary, and each of said parts having at least an active layer for amplification and propagation of light waves under lasing conditions; means for electrically forward biasing only said first and third parts; a first plurality of spaced-apart, amplification waveguides disposed in said first part for generating and amplifying light waves and terminating at said first boundary; a second plurality of spaced-apart, amplification waveguides disposed in the second part for generating and amplifying light waves and terminating at said second boundary; and a plurality of low-loss, two-dimensional, passive waveguides disposed only in said second part for propagating only an in-phase array mode and oriented co-axially and co-extensively coupled to the amplification waveguides at said first and second boundaries.
Claim 28
Dependent Claim 25 words
The laser array of claim 21 wherein said plurality of passive waveguides in said second part is in the form of a y-coupled waveguide array.
Claim 29
Dependent Claim 24 words
The laser array of claim 21 wherein at least one of said first, second, or third parts is formed utilizing a layer disordering technique.
Claim 30
Dependent Claim 24 words
The laser array of claim 21 wherein at least one of said first, second, or third parts is formed utilizing impurity induced layer disordering.
Claim 31
Dependent Claim 21 words
The laser array of claim 21 wherein at least one of said first or second pluralities are parallel, index-guided amplification waveguides.
Claim 32
Dependent Claim 148 words
A semiconductor laser array comprising: a monolithic semiconductor structure, divided into first, second, and third parts with the first and second parts separated by a first boundary and the second and third parts separated by a second boundary, and each of said parts having at least an active layer for amplification and propagation of light waves under lasing conditions; means for electrically forward biasing only said first and third parts; a first plurality of amplification waveguides disposed in said first part for propagating only an in-phase array mode and terminating at said first boundary; a second plurality of amplification waveguides disposed in said third part for propagating only an in-phase array mode and terminating at said second boundary; and a plurality of parallel, low-loss passive waveguides disposed only in said second part and oriented coo-axially and co-extensively coupled to the amplification waveguides at said first and second boundaries.
Claim 33
Dependent Claim 148 words
A semiconductor laser array comprising: a monolithic semiconductor structure, divided into first, second, and third parts with the first and second parts separated by a first boundary and the second and third parts separated by a second boundary, and each of said parts having at least an active layer for amplification and propagation of light waves under lasing conditions; means for electrically forward biasing only said first and third parts; a first plurality of amplification waveguides disposed in said first part for propagating only an in-phase array mode and terminating at said first boundary; a second plurality of amplification waveguides disposed in said third part for propagating only an in-phase array mode and terminating at said second boundary; and a plurality of parallel, low-loss passive waveguides disposed only in said second part and oriented coo-axially and co-extensively coupled to the amplification waveguides at said first and second boundaries.
Claim 34
Dependent Claim 28 words
The laser array of claim 26 wherein at least one of said first or second pluralities or amplification waveguides is in the form of a y-coupled waveguide array.
Claim 35
Dependent Claim 24 words
The laser array of claim 26 wherein at least one of said first, second, or third parts is formed utilizing a layer disordering technique.
Claim 36
Dependent Claim 24 words
The laser array of claim 26 wherein at least one of said first, second, or third parts is formed utilizing impurity induced layer disordering.

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