Patent US3689807A successfully refreshed from Google Patents.
Patent US5052886A successfully refreshed from Google Patents.
US5052886A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Semiconductor wafer orientation device
Assignee: Texas Instruments Inc
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Filing: 1988-12-20
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Granted: 1991-10-01
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Expires: 2008-12-20
Abstract
Abstract A device having a circled array of tapered motor driven rollers center and find the flat edge of a semiconductor wafer by rotating the wafer until the flat edge is over a photo cell, at which time finder rollers secure the wafer in its centered and orientated position.
Inventors
- 👤 Masayuki Moroi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 21:24
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/70; H10P72/78; Y; Y10; Y10S; Y10S414/00; Y10S414/135; Y10S414/136
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
140 words
A device for centering and orientating a semiconductor wafer having an orientation flat on its edge, comprising: a housing; a plurality of rotating tapered rollers extending above the housing for centering the semiconductor wafer; at least one drive motor for rotating the tapered rollers; a photo cell for detecting the orientation flat on the semiconductor wafer; a pair of spring biased flat finder rollers which are drawn against the flat by the springs when the semiconductor wafer flat is adjacent the photo cell and the flat finder rollers; and a second drive motor and a cam, wherein when the photo cell detects a flat, the said at least one drive motor stops and the second drive motor turns said cam allowing the flat finder rollers to be drawn against the flat, because of said spring bias, of the semiconductor wafer.
Claim 2
Independent Claim
140 words
A device for centering and orientating a semiconductor wafer having an orientation flat on its edge, comprising: a housing; a plurality of rotating tapered rollers extending above the housing for centering the semiconductor wafer; at least one drive motor for rotating the tapered rollers; a photo cell for detecting the orientation flat on the semiconductor wafer; a pair of spring biased flat finder rollers which are drawn against the flat by the springs when the semiconductor wafer flat is adjacent the photo cell and the flat finder rollers; and a second drive motor and a cam, wherein when the photo cell detects a flat, the said at least one drive motor stops and the second drive motor turns said cam allowing the flat finder rollers to be drawn against the flat, because of said spring bias, of the semiconductor wafer.
Claim 3
Dependent Claim
31 words
The device according to claim 1, including a second photo cell and a second pair of spring biased flat finder rollers to reduce the time required to orientate the semiconductor wafer.
Claim 4
Dependent Claim
51 words
The device according to claim 1, wherein the tapered rollers have a first tapered surface and a second tapered surface, the first tapered surface guiding the semiconductor wafer to the second tapered surface causing it to be centered during rotation of the tapered rollers and the semiconductor wafer for orientation purposes.
Claim 5
Dependent Claim
54 words
The device according to claim 1, wherein said housing has a top surface and said rotating tapered rollers each rotate about a shaft and are spaced above the top surface of the housing in a circle that has a diameter slightly larger than the diameter of the semiconductor wafer to be centered and orientated.
Claim 6
Independent Claim
161 words
A device for centering and orientating a semiconductor wafer having an orientation flat on its edge, comprising: a housing; a plurality of rotating tapered rollers extending above the housing for centering the semiconductor wafer; at least one drive motor for rotating the tapered rollers; a photo cell for detecting the orientation flat on the semiconductor wafer; a pair of spring biased flat finder rollers which are drawn against the flat when the semiconductor wafer flat is adjacent the photo cell and the flat finder rollers; a second photo cell and a second pair of spring biased flat finder rollers to reduce the time required to orientate the semiconductor wafer; and a second drive motor and a cam, wherein when the photo cell detects a flat, the said at least one drive motor stops and the second drive motor turns said cam allowing the flat finder rollers which are adjacent the flat to be drawn against the flat of the semiconductor wafer.
Claim 7
Independent Claim
161 words
A device for centering and orientating a semiconductor wafer having an orientation flat on its edge, comprising: a housing; a plurality of rotating tapered rollers extending above the housing for centering the semiconductor wafer; at least one drive motor for rotating the tapered rollers; a photo cell for detecting the orientation flat on the semiconductor wafer; a pair of spring biased flat finder rollers which are drawn against the flat when the semiconductor wafer flat is adjacent the photo cell and the flat finder rollers; a second photo cell and a second pair of spring biased flat finder rollers to reduce the time required to orientate the semiconductor wafer; and a second drive motor and a cam, wherein when the photo cell detects a flat, the said at least one drive motor stops and the second drive motor turns said cam allowing the flat finder rollers which are adjacent the flat to be drawn against the flat of the semiconductor wafer.
Claim 8
Dependent Claim
40 words
The device according to claim 5, wherein the tapered rollers have a first tapered surface and a second tapered surface, the first tapered surface guiding the semiconductor wafer to the second tapered surface causing it to be centered during rotation.
Claim 9
Dependent Claim
54 words
The device according to claim 5, wherein said housing has a top surface and said rotating tapered rollers each rotate about a shaft and are spaced above the top surface of the housing in a circle that has a diameter slightly larger than the diameter of the semiconductor wafer to be centered and orientated.
Claim 10
Independent Claim
100 words
A method for centering and orientating a semiconductor wafer comprising the steps of; lowering a semiconductor wafer onto tapered rollers; rotating the tapered rollers and thereby the semiconductor wafer with one motor and centering the semiconductor wafer during rotation; continuing rotation of the tapered rollers and semiconductor wafer until a flat of the semiconductor wafer is over a photo cell; stopping the rotating wafer; and moving flat finder rollers against the flat of the semiconductor wafer to establish its centered orientation, the flat finder rollers being moved into engagement with the flat due to the action of a second motor.
Claim 11
Independent Claim
100 words
A method for centering and orientating a semiconductor wafer comprising the steps of; lowering a semiconductor wafer onto tapered rollers; rotating the tapered rollers and thereby the semiconductor wafer with one motor and centering the semiconductor wafer during rotation; continuing rotation of the tapered rollers and semiconductor wafer until a flat of the semiconductor wafer is over a photo cell; stopping the rotating wafer; and moving flat finder rollers against the flat of the semiconductor wafer to establish its centered orientation, the flat finder rollers being moved into engagement with the flat due to the action of a second motor.
Claim 12
Independent Claim
147 words
A device for centering and orienting a semiconductor wafer having an orientation flat on its edge, comprising: a housing; a plurality of rotating tapered rollers extending above the housing; at least one drive motor for rotating the tapered rollers; a photo cell for detecting the orientation flat on the semiconductor wafer; a pair of flat finder rollers which are drawn against the flat when the semiconductor wafer flat is adjacent the photo cell; a second photo cell and a second pair of flat finder rollers to reduce the time required to orientate the semiconductor wafer; and a second drive motor and a cam, wherein when the photo cell detects a flat, the said at least one drive motor stops and the second drive motor turns said cam allowing the flat finder rollers which are adjacent the flat to be drawn against the flat of the semiconductor wafer.
Claim 13
Independent Claim
147 words
A device for centering and orienting a semiconductor wafer having an orientation flat on its edge, comprising: a housing; a plurality of rotating tapered rollers extending above the housing; at least one drive motor for rotating the tapered rollers; a photo cell for detecting the orientation flat on the semiconductor wafer; a pair of flat finder rollers which are drawn against the flat when the semiconductor wafer flat is adjacent the photo cell; a second photo cell and a second pair of flat finder rollers to reduce the time required to orientate the semiconductor wafer; and a second drive motor and a cam, wherein when the photo cell detects a flat, the said at least one drive motor stops and the second drive motor turns said cam allowing the flat finder rollers which are adjacent the flat to be drawn against the flat of the semiconductor wafer.
Claim 14
Dependent Claim
51 words
The device according to claim 9, wherein the tapered rollers have a first tapered surface and a second tapered surface, the first tapered surface guiding the semiconductor wafer to the second tapered surface causing it to be centered during rotation of the tapered rollers and the semiconductor wafer for orientation purposes.
Claim 15
Dependent Claim
54 words
The device according to claim 9, wherein said housing has a top surface and said rotating tapered rollers each rotate about a shaft and are spaced above the top surface of the housing in a circle that has a diameter slightly larger than the diameter of the semiconductor wafer to be centered and orientated.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-09-30 | 1995-04-01 | 1995-10-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-09-30 | 1999-04-01 | 1999-10-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-09-30 | 2003-04-01 | 2003-10-01 | $7700.00 | Window Closed / Lapsed |