US4376482A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Wafer orientation system
Assignee: Tencor Instruments Inc
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Filing: 1981-05-19
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Granted: 1983-03-15
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Expires: 2001-05-19
Abstract
Abstract A wafer orienting apparatus having inwardly biased rollers, spaced about the circumferential edge of a wafer in contact with the edge. Two of the rollers are spaced apart a distance less than the dimension of a primary flat registration edge and are mounted to follow the wafer edge upon rotation of the wafer. When a flat registration edge passes these closely spaced rollers they move inwardly, activating switches associated with a coincidence circuit. When both switches are simultaneously activated, the coincidence circuit produces a signal which stops wafer rotation, thereby orienting the wafer. The rollers are mounted so that they can be moved from the path of wafer travel after wafer orientation, permitting a queue of wafers to be oriented, one after the other.
Inventors
- 👤 William R. Wheeler
- 👤 George J. Kren
- 👤 David D. Clementson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 23:45
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/50; B; B65; B65G; B65G47/00; B65G47/22; B65G47/24; B65G47/244
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
140 words
Apparatus for orienting a wafer or the like having a primary flat registration edge along the wafer circumference comprising, a plurality of rollers spaced about the circumferential edge of a wafer and in friction contact therewith, with a first and second of said rollers spaced apart a distance less than the dimension of a primary flat registration edge, said first and second rollers inwardly biased against the wafer edge, and a third roller, powered by a motor, causing wafer rotation, means for sensing significant radial displacement of the first and second rollers upon rotation of the wafer, said displacement indicating contact with a flat registration edge, and means for stopping wafer rotation upon sensing of significant radial displacement of the first and second rollers, thereby orienting a wafer with the registration edge in contact with the first and second rollers.
Claim 2
Dependent Claim
140 words
Apparatus for orienting a wafer or the like having a primary flat registration edge along the wafer circumference comprising, a plurality of rollers spaced about the circumferential edge of a wafer and in friction contact therewith, with a first and second of said rollers spaced apart a distance less than the dimension of a primary flat registration edge, said first and second rollers inwardly biased against the wafer edge, and a third roller, powered by a motor, causing wafer rotation, means for sensing significant radial displacement of the first and second rollers upon rotation of the wafer, said displacement indicating contact with a flat registration edge, and means for stopping wafer rotation upon sensing of significant radial displacement of the first and second rollers, thereby orienting a wafer with the registration edge in contact with the first and second rollers.
Claim 3
Dependent Claim
139 words
Apparatus for determining orientation of a wafer or the like, having a primary flat registration edge, along the wafer circumference, comprising: means for supporting a wafer, a first set of two rollers spaced apart at a distance less than the dimension of a primary flat registration edge, said two rollers radially inwardly biased against the wafer edge, a second set of rollers inwardly biased in a configuration defining circumferential contacts for a wafer circumferential edge within the configuration with said rollers in friction contact with the wafer edge, means for rotating the wafer within the configuration of the second set of rollers, and means for signalling coincident radial displacement in the same direction of the first set of rollers upon rotation of the wafer, said displacement of the first set of rollers indicating contact with a flat registration edge.
Claim 4
Dependent Claim
139 words
Apparatus for determining orientation of a wafer or the like, having a primary flat registration edge, along the wafer circumference, comprising: means for supporting a wafer, a first set of two rollers spaced apart at a distance less than the dimension of a primary flat registration edge, said two rollers radially inwardly biased against the wafer edge, a second set of rollers inwardly biased in a configuration defining circumferential contacts for a wafer circumferential edge within the configuration with said rollers in friction contact with the wafer edge, means for rotating the wafer within the configuration of the second set of rollers, and means for signalling coincident radial displacement in the same direction of the first set of rollers upon rotation of the wafer, said displacement of the first set of rollers indicating contact with a flat registration edge.
Claim 5
Dependent Claim
179 words
Apparatus for determining orientation of a wafer or the like, having a major flat registration edge along the wafer circumference comprising: a dual band conveyor for transporting wafers, a vertically movable bed supporting a first set of two rollers at changeable elevations above and below said conveyor, said two rollers spaced apart at a distance less than the dimension of a major flat registration edge, said two rollers radially inwardly biased against the wafer edge, a second set of rollers mounted for positioning at changeable elevations above and below said conveyor, said second set of rollers spaced in a configuration at the upper elevation defining a desired position for a wafer circumferential edge within the configuration with said rollers in friction contact with the wafer edge, means for rotating the wafer within the configuration of the second set of rollers at the upper elevation, and means for signalling coincident radially outward displacement of the first set of rollers upon rotation of the wafer, said outward displacement of the first set of rollers indicating contact with a flat registration edge.
Claim 6
Dependent Claim
179 words
Apparatus for determining orientation of a wafer or the like, having a major flat registration edge along the wafer circumference comprising: a dual band conveyor for transporting wafers, a vertically movable bed supporting a first set of two rollers at changeable elevations above and below said conveyor, said two rollers spaced apart at a distance less than the dimension of a major flat registration edge, said two rollers radially inwardly biased against the wafer edge, a second set of rollers mounted for positioning at changeable elevations above and below said conveyor, said second set of rollers spaced in a configuration at the upper elevation defining a desired position for a wafer circumferential edge within the configuration with said rollers in friction contact with the wafer edge, means for rotating the wafer within the configuration of the second set of rollers at the upper elevation, and means for signalling coincident radially outward displacement of the first set of rollers upon rotation of the wafer, said outward displacement of the first set of rollers indicating contact with a flat registration edge.
Claim 7
Dependent Claim
43 words
The apparatus of claim 2 or 3 further defined by a means for changing the position of the first set of rollers along a wafer edge whereby a primary reference edge may be distinguished from a secondary reference edge for various size wafers.
Claim 8
Dependent Claim
25 words
The apparatus of claim 2 or 3 wherein said first set of rollers are mounted on pivoting upright posts having switch activating means connected thereto.
Claim 9
Dependent Claim
39 words
The apparatus of claim 2 or 3 wherein said means for signalling coincident radial inward displacement of said first set of rollers comprises a pair of switches operated by said switch activating means connected to said pivoting upright posts.
Claim 10
Dependent Claim
26 words
The apparatus of claim 6 further defined by a coincidence detection circuit connected to said pair of switches for detecting simultaneous pivoting of said upright posts.
Claim 11
Dependent Claim
36 words
The apparatus of claim 7 further including circuit means connected to the coincidence detection circuit for stopping wafer rotation upon detection of simultaneous pivoting of the upright posts thereby orienting said wafers in a known position.
Claim 12
Dependent Claim
24 words
The apparatus of claim 2 or 3 wherein said second set of rollers comprises a drive roller, powered by a motor, and idler rollers.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1986-03-14 | 1986-09-13 | 1987-03-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1990-03-14 | 1990-09-13 | 1991-03-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1994-03-14 | 1994-09-13 | 1995-03-15 | $7700.00 | Window Closed / Lapsed |