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Method of producing micromechanical sensors for the AFM/STM profilometry and micromechanical AFM/STM sensor head

Assignee: International Business Machines Corp

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Filing: 1990-08-16

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Granted: 1991-09-24

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Expires: 2010-08-16

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Abstract

Abstract A method and apparatus is described for a micromechanical sensor for the AFM/STM profilometry, which consist of a cantilever beam with a tip at its end and a mounting block at the opposite end. The method incorporated the steps of coating a wafer substrate; producing a mask for the desired cantilever beam pattern on the top side of the wafer; and a mask on the bottom side of the wafer; planarizing said cantilever beam pattern with photoresist; producing a mask for the desired tip in the area of the cantilever beam pattern producing the desired tip using an etching step, and simultaneously transferring the cantilever beam pattern from the upper to the lower part of the layer; and removing the supporting wafer material by etching through the bottom side mask. A mask for the desired cantilever beam pattern and the tip pattern contains all relevant information for a subsequent substrate etching process is described for etching step by step into a silicon substrate.

Inventors

👤 Thomas Bayer
👤 Johann Greschner
👤 Georg Kraus
👤 Helga Weiss
👤 Olaf Wolter

Bibliographic Details

Application Number —

Jurisdiction US

Data Source google_patents

Last Synchronized 2026-10-29 04:50

CPC Classifications

G; G01; G01Q; G01Q60/00; G01Q60/10; G01Q60/16; B; B82; B82Y; B82Y35/00; G01Q60/02; G01Q60/04; G01Q60/24; G01Q60/38

Claims Analysis

Total Claims: 22

Claim 1

Independent Claim 140 words

Method of producing micromechanical sensors for the AFM/STM profilometry, which consist of a cantilever beam with a tip at its end and a mounting block at the opposite, comprising the following steps: bilaterally coating a wafer substrate with a layer of inorganic material; producing a mask for the desired cantilever beam pattern on the top side of the wafer and in the upper part of said layer; and a mask in said layer on the bottom side of the wafer; planarizing said cantilever beam pattern with photoresist; producing a mask for the desired tip in the area of the cantilever beam pattern, producing the desired tip using an etching step, and simultaneously transferring the cantilever beam pattern from the upper to the lower part of said layer; and removing the supporting wafer material by etching through the bottom side mask.

Claim 2

Dependent Claim 140 words

Claim 3

Dependent Claim 196 words

Method of producing micromechanical sensors for the AFM/STM profilometry, which consist of a cantilever beam with a tip at its end and a mounting block at the opposite, comprising the following steps: bilaterally coating a wafer substrate with a layer of inorganic material; producing a cantilever beam mask for the desired cantilever beam pattern on the top side of the wafer and in the upper part of said layer, and a mask in said layer on the bottom side of the wafer; producing a tip mask for the desired tip pattern in the area of the cantilever beam pattern and simultaneously transferring the cantilever beam pattern into a deeper level of said layer; transferring the cantilever beam pattern and tip pattern into the wafer substrate by: a) etching said layer to such a depth, that the areas of said layer abutting said cantilever beam mask are removed; b) anisotropic wet etching of the wafer substrate to a depth which corresponds to the desired cantilever beam thickness; c) removing of said cantilever beam mask and remaining areas of said layer by etching; and d) shaping a tip by anisotropic wet and undercut etching of said tip mask.

Claim 4

Dependent Claim 196 words

Method of producing micromechanical sensors for the AFM/STM profilometry, which consist of a cantilever beam with a tip at its end and a mounting block at the opposite, comprising the following steps: bilaterally coating a wafer substrate with a layer of inorganic material; producing a cantilever beam mask for the desired cantilever beam pattern on the top side of the wafer and in the upper part of said layer, and a mask in said layer on the bottom side of the wafer; producing a tip mask for the desired tip pattern in the area of the cantilever beam pattern and simultaneously transferring the cantilever beam pattern into a deeper level of said layer; transferring the cantilever beam pattern and tip pattern into the wafer substrate by: a) etching said layer to such a depth, that the areas of said layer abutting said cantilever beam mask are removed; b) anisotropic wet etching of the wafer substrate to a depth which corresponds to the desired cantilever beam thickness; c) removing of said cantilever beam mask and remaining areas of said layer by etching; and d) shaping a tip by anisotropic wet and undercut etching of said tip mask.

Claim 5

Dependent Claim 44 words

Method of claim 1, wherein the wafer substrate consists of monocrystalline silicon, and the layer on the top side of said wafer substrate is selected from the group consisting of silicon dioxide, silicon nitride, silicon carbide, diamond-like carbon, doped monocrystalline silicon and polycrystalline silicon.

Claim 6

Dependent Claim 63 words

Method of claim 1, wherein a silicon dioxide layer is thermally grown or deposited by chemical vapor deposition (CVD) to a layer thickness of about 10 μm on the top side of a silicon wafer and the respective silicon dioxide layer on the bottom side of said wafer is thermally grown to a layer thickness of about 1 to 2 μ m .

Claim 7

Dependent Claim 87 words

Method of claim 1, wherein an about 3 μm thick photoresist layer is applied to a silicon dioxide layer on the top side of said wafer, and, using a first photolithographic step, the desired cantilever beam pattern is defined in said photoresist layer, and the resulting pattern is transferred into the upper part of the silicon dioxide layer by reactive ion etching to a depth of about 3 μm with CF4 as etch gas and with a pressure in the range of about 1 to 10 μbar.

Claim 8

Dependent Claim 32 words

Method of claim 5, wherein with said first photolithographic step and the reactive ion etching rectangular openings are simultaneously made in the silicon dioxide layer on the bottom side of the wafer.

Claim 9

Dependent Claim 76 words

Method of claim 1, wherein an about 5 μm thick photoresist layer is applied to a structured silicon dioxide layer on the top side of the wafer, and using a second photolithographic step, the mask pattern for the tip is defined in said photoresist layer and using said mask pattern, the tip is shaped by reactive ion etching with CF 4 as etch gas and with a pressure in the range of about 100 .sup.μ bar.

Claim 10

Dependent Claim 46 words

Method of claim 7, wherein concurrently with the shaping of the tip, using the photoresist mask, the cantilever beam pattern is transferred into the lower part of silicon dioxide layer, using the cantilever beam pattern in the upper part of said layer as an `intermediate mask`.

Claim 11

Dependent Claim 29 words

Method of claim 1, wherein the supporting silicon wafer material is removed from the bottom side by anisotropic wet etching through the bottom side mask with aqueous KOH solution.

Claim 12

Dependent Claim 15 words

Method of claim 1, wherein the tip is sharpened in an argon ion milling process.

Claim 13

Dependent Claim 31 words

Method of claim 2, wherein a silicon dioxide layer is thermally grown on both sides of a monocrystalline (100) silicon wafer substrate to a layer thickness of about 3 .sup.μ m.

Claim 14

Dependent Claim 51 words

Method of claim 2, wherein the cantilever beam pattern defined in a first photolithographic step in a photoresist layer on silicon dioxide layer is transferred into the upper part of said silicon dioxide layer (43) by wet etching with 5:1 buffered hydrofluoric acid to a depth of about 0.3 .sup.μ m.

Claim 15

Dependent Claim 61 words

Method of claim 2, wherein concurrently with the etching of the silicon dioxide layer on the top side rectangular patterns are etched to the corresponding depth into the silicon dioxide layer on the bottom side, and, after protecting the top side by a photoresist layer, the silicon dioxide remaining in said areas is removed by etching in 5:1 buffered hydrofluoric acid.

Claim 16

Dependent Claim 58 words

Method of claim 2, wherein the tip pattern defined in a second photolithographic step in a photoresist layer within the area of cantilever beam pattern is transferred into the silicon dioxide layer in said area by wet etching with 5:1 buffered hydrofluoric acid, and the cantilever beam pattern is simultaneously transferred into a deeper level of said layer.

Claim 17

Dependent Claim 45 words

Method of claim 2, wherein after removal of the silicon dioxide in the areas by wet etching with 5:1 buffered hydrofluoric acid the cantilever beam is anisotropically etched into the silicon wafer substrate using said mask and an aqueous KOH solution at about 80° C.

Claim 18

Dependent Claim 62 words

Method of claim 2, wherein subsequently to the etching of the silicon cantilever beam the silicon dioxide cantilever beam mask is removed by etching with 5:1 buffered hydrofluoric acid, and next the tip 410 is anisotropically etched into the silicon wafer substrate within the area of the cantilever beam using the tip mask and an aqueous KOH solution at about 60° C.

Claim 19

Dependent Claim 66 words

Method of claim 2, further comprising the steps of thinning down the silicon wafer substrate prior to the mask structure transfer into said silicon wafer substrate, and further during the etching of the silicon cantilever beam and the silicon tip by anisotropic etching from the bottom side of the wafer using the bottom side mask and an aqueous KOH solution at about 60° to 80° C.

Claim 20

Dependent Claim 51 words

Method of claim 2, wherein the silicon membrane remaining in the areas is removed from the bottom side of the wafer by reactive ion etching with CF 4 as etch gas and a pressure of about 10 ubar, thereby exposing the silicon cantilever beam with the tip as an integral part.

Claim 21

Dependent Claim 191 words

Method of claim 2, further comprising the steps of: defining discs of a first diameter in a silicon dioxide layer on the top side of a silicon wafer substrate, which discs are to form the masks for the etching of pedestals into the silicon wafer substrate, using a first photolithographic step and etching; defining discs of a second smaller diameter in the silicon dioxide layer overlying said discs of a first diameter and within the area or said discs, which discs are to form the masks for the etching of tips into the silicon wafer substrate, using a second photolithographic step and etching; anisotropically etching the pedestals into the silicon wafer substrate, using the discs of the first diameter as masks and an aqueous solution of KOH (37.5 wt %) at about 60° C.; removing the level of the masks for etching the pedestals by isotropic etching with 5:1 buffered hydrofluoric acid or by anisotropic reactive ion etching; anisotropically etching the tips into the already existing silicon pedestals, using the discs of the second smaller diameter as masks and an aqueous solution of KOH (37.5 wt %) at about 60° C.

Claim 22

Dependent Claim 79 words

Method of claim 19, wherein discs of a diameter of 500 μm and subsequently discs of a diameter of 80 μm are defined in the silicon dioxide layer; and pedestals are etched into the silicon wafer substrate to a depth of about 150 μm, using said 500 μm discs as masks, and subsequently tips into the pedestals, using said 80 μm discs as masks, and for a time sufficient for the complete undercut of said 80 .sup.μ m discs.

References Cited (Backward Citations)

US4668865A Cited

EP0223918A2 Cited

US4806755A Cited

US4883959A Cited

US4906840A Cited

US4998016A Cited

US4943719A Cited

US4968585A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	1994-09-23	1995-03-25	1995-09-24	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	1998-09-23	1999-03-25	1999-09-24	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	2002-09-23	2003-03-25	2003-09-24	$7700.00	Window Closed / Lapsed

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