US5049775A — Integrated micromechanical piezoelectric motor

Claim 1

Independent Claim 113 words

A piezoelectric actuation machine for displacing rigid objects comprising: first and second cantilever beams extending from a frame, the beams comprising a piezoelectric material such that application of an electric potential across the material of each beam rotationally displaces the first and second beams relative to each other; and an actuating member secured between displaceable surfaces on the first and second beams and extending orthogonally from a plane through the beams such that relative displacement of the first and second beams displaces a portion of the member in a direction orthogonal to beam displacement and translates a rigid object contacting the displaced portion of the member relative to the member and the frame.

Claim 2

Dependent Claim 113 words

A piezoelectric actuation machine for displacing rigid objects comprising: first and second cantilever beams extending from a frame, the beams comprising a piezoelectric material such that application of an electric potential across the material of each beam rotationally displaces the first and second beams relative to each other; and an actuating member secured between displaceable surfaces on the first and second beams and extending orthogonally from a plane through the beams such that relative displacement of the first and second beams displaces a portion of the member in a direction orthogonal to beam displacement and translates a rigid object contacting the displaced portion of the member relative to the member and the frame.

Claim 3

Dependent Claim 18 words

The piezoelectric machine in claim 1 wherein the first and second beams are parallel in a undisplaced position.

Claim 4

Dependent Claim 15 words

The piezoelectric machine of claim 1 wherein said member is hingably attached to each beam.

Claim 5

Dependent Claim 23 words

The piezoelectric machine of claim 1 wherein said member has a rest position and a plurality of displaced positions in the orthogonal direction.

Claim 6

Dependent Claim 48 words

The piezoelectric machine of claim 1 wherein said member comprises first and second extensions, the extensions being joined at one end extending out of the plane through the beams, the first extension being secured to the first beam and the second extension being secured to the second beam.

Claim 7

Dependent Claim 12 words

The piezoelectric machine of claim 4 wherein said member drives a wheel.

Claim 8

Dependent Claim 16 words

The piezoelectric machine of claim 4 wherein said first and second beams are comprised of silicon.

Claim 9

Dependent Claim 56 words

The piezoelectric machine of claim 1 further comprising third and fourth piezoelectrically driven beams, a first gripping member secured to the actuating member and a second gripping member secured to a second actuating member between the third and fourth beams such that the gripping members can be brought together and separated to grasp and release objects.

Claim 10

Dependent Claim 32 words

The piezoelectric machine of claim 1 further comprising a cutting surface mounted on the actuating members such that movement of the first and second beams displaces the cutting surface to cut objects.

Claim 11

Dependent Claim 80 words

A piezoelectric machine comprising a plurality of piezoelectrically driven members that support the machine that is positioned on a support surface such that correlated movement of the members displaces the machine relative to the support surface, each piezoelectrically driven member comprising a first beam secured to the machine and having a piezoelectric material covering a surface of the first beam, and a second beam secured to the machine and having a piezoelectric material covering a surface of the second beam.

Claim 12

Dependent Claim 80 words

A piezoelectric machine comprising a plurality of piezoelectrically driven members that support the machine that is positioned on a support surface such that correlated movement of the members displaces the machine relative to the support surface, each piezoelectrically driven member comprising a first beam secured to the machine and having a piezoelectric material covering a surface of the first beam, and a second beam secured to the machine and having a piezoelectric material covering a surface of the second beam.

Claim 13

Dependent Claim 24 words

The piezoelectric machine of claim 10 further comprising a power sources on the machine for providing an electric potential to the piezoelectrically driven members.

Claim 14

Dependent Claim 22 words

The piezoelectric machine of claim 11 further comprising a control circuit for controlling the application of the electric potential to each member.

Claim 15

Dependent Claim 19 words

The piezoelectric machine of claim 10 further comprising a memory for recording a sequence of movements for the members.

Claim 16

Dependent Claim 21 words

The piezoelectric machine of claim 10 further comprising a transducer to transmit a signal to the machine from an external source.

Claim 17

Dependent Claim 30 words

The piezoelectric machine of claim 10 further comprising a coupling member secured to a displaceable surface of each beam and having a frictional surface to frictionally engage the support surface.

Claim 18

Dependent Claim 20 words

The piezoelectric machine of claim 10 further comprising a gripping device secured to the machine to grasp and transport objects.

Claim 19

Dependent Claim 18 words

The piezoelectric machine of claim 10 further comprising a cutting device secured to the machine to cut objects.

Claim 20

Dependent Claim 59 words

A piezoelectric micromachine comprising: a support frame from which a flexible semiconductor structure extends; a rigid object in contact with the flexible structure; and a piezoelectric material secured to the semiconductor structure such that application of an electric field across the material causes a displacement of the flexible structure to actuate movement of the object relative to the frame.

Claim 21

Dependent Claim 59 words

A piezoelectric micromachine comprising: a support frame from which a flexible semiconductor structure extends; a rigid object in contact with the flexible structure; and a piezoelectric material secured to the semiconductor structure such that application of an electric field across the material causes a displacement of the flexible structure to actuate movement of the object relative to the frame.

Claim 22

Dependent Claim 107 words

A piezoelectrically driven member comprising: a silicon support frame having a silicon member with one end integral with the frame and a second end displaceable relative to the frame; piezoelectric material secured to a surface of the silicon member such that an expansion or contraction of the material displaces the second end of the member; a rigid body to be contacted by the displaceable end of the member; and an electrical contact grid formed adjacent to the piezoelectric material to provide an electric potential across the material such that the application of an electric potential displaces the rigid body contacting the silicon member relative to the frame.

Claim 23

Dependent Claim 107 words

A piezoelectrically driven member comprising: a silicon support frame having a silicon member with one end integral with the frame and a second end displaceable relative to the frame; piezoelectric material secured to a surface of the silicon member such that an expansion or contraction of the material displaces the second end of the member; a rigid body to be contacted by the displaceable end of the member; and an electrical contact grid formed adjacent to the piezoelectric material to provide an electric potential across the material such that the application of an electric potential displaces the rigid body contacting the silicon member relative to the frame.

Claim 24

Dependent Claim 22 words

The piezoelectrically driven member of claim 19 further comprising at least one additional piezoelectrically driven silicon member formed adjacent the first member.

Claim 25

Dependent Claim 17 words

The piezoelectric micromachine of claim 18 wherein the semiconductor material is integrally formed with the support frame.

Claim 26

Dependent Claim 28 words

The piezoelectric micromachine of claim 18 wherein the object comprises a support surface such that actuated movement of the semiconductor structure translates the machine across the support surface.

Claim 27

Dependent Claim 24 words

The piezoelectric micromachine of claim 18 further comprising a plurality of flexible semiconductor structures extending from the frame having a piezoelectric material secured thereto.

Claim 28

Dependent Claim 19 words

The piezoelectric micromachine of claim 23 further comprising a member secured to displaceable portion of two of the structures.

Claim 29

Dependent Claim 16 words

The piezoelectric micromachine of claim 24 wherein said member contacts the rigid body to be actuated.

Claim 30

Dependent Claim 15 words

The piezoelectric micromachine of claim 18 wherein the semiconductor structure further comprises an electrical circuit.

Claim 31

Dependent Claim 30 words

The piezoelectrically driven member of claim 19 further comprising a control circuit in conductive contact with the piezoelectric material to control displacement of the silicon member relative to the frame.

Claim 32

Dependent Claim 17 words

The piezoelectrically driven member of claim 19 wherein the rigid body is unattached to the silicon member.

Claim 33

Dependent Claim 34 words

The piezoelectrically driven member of claim 19 further comprising a second piezoelectrically driven silicon member and a coupling member such that the displaceable ends of the silicon members are coupled by the coupling member.

Claim 34

Dependent Claim 70 words

A piezoelectrically driven machine comprising: a semiconductor member having a plurality of flexible piezoelectrically driven arms that support the member relative to a support surface; and a control circuit on the semiconductor member to control the application of an electric field to each of the piezoelectrically driven arms to produce correlated movement of the arms such that the semiconductor member is displaced relative to the support surface by the arms.

Claim 35

Dependent Claim 70 words

A piezoelectrically driven machine comprising: a semiconductor member having a plurality of flexible piezoelectrically driven arms that support the member relative to a support surface; and a control circuit on the semiconductor member to control the application of an electric field to each of the piezoelectrically driven arms to produce correlated movement of the arms such that the semiconductor member is displaced relative to the support surface by the arms.

Claim 36

Dependent Claim 14 words

The machine of claim 30 further comprising a power source on the semiconductor member.

Claim 37

Dependent Claim 13 words

The machine of claim 30 further comprising a memory on the semiconductor member.

Claim 38

Dependent Claim 13 words

The machine of claim 32 further comprising a transducer for programming the memory.

Claim 39

Dependent Claim 13 words

The machine of claim 30 wherein each arm comprises first and second bimorphs.

Claim 40

Dependent Claim 14 words

The machine of claim 30 wherein the arms are integrally formed with the member.

Claim 41

Dependent Claim 19 words

The machine of claim 35 wherein at least a portion of the circuit is formed on or the arms.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	1994-09-16	1995-03-18	1995-09-17	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	1998-09-16	1999-03-18	1999-09-17	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	2002-09-16	2003-03-18	2003-09-17	$7700.00	Window Closed / Lapsed

Integrated micromechanical piezoelectric motor

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