US5032893A
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Method for reducing or eliminating interface defects in mismatched semiconductor eiplayers
Assignee: Cornell Research Foundation Inc
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Filing: 1990-07-27
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Granted: 1991-07-16
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Expires: 2010-07-27
Abstract
Abstract The present invention and process relates to crystal lattice mismatched semiconductor composite having a first semiconductor layer and a second semiconductor growth layer deposited thereon to form an interface wherein the growth layer can be deposited at thicknesses in excess of the critical thickness, even up to about 10x critical thickness. Such composite has an interface which is substantially free of interface defects. For example, the size of the growth areas in a mismatched In 0 .05 Ga 0 .95 As/(001)GaAs interface was controlled by fabricating 2-μm high pillars of various lateral geometries and lateral dimensions before the epitaxial deposition of 3500Å of In 0 .05 Ga 0 .95 As. The linear dislocation density at the interface was reduced from >5000 dislocations/cm to about zero for 25-μm lateral dimensions and to less than 800 dislocations/cm for lateral dimensions as large as 100 μm. The fabricated pillars control the lateral dimensions of the growth layer and block the glide of misfit dislocations with the resultant decrease in dislocation density.
Inventors
- 👤 Eugene A. Fitzgerald, Jr.
- 👤 Dieter G. Ast
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 15:09
CPC Classifications
H; H10; H10D; H10D62/00; H10D62/80; H10D62/82; H10D62/824; H10D62/826; H10P; H10P14/00; H10P14/20; H10P14/29; H10P14/2901; H10P14/2907; H10P14/2911; H10P14/2924; H10P14/2925; H10P14/32; H10P14/3202; H10P14/3214; H10P14/3221; H10P14/34; H10P14/3402; H10P14/3414; H10P14/3421; H10P14/36
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
109 words
A semiconductor material composite structure formed from crystal lattice mismatched semiconductor materials which comprises: a first semiconductor material layer having a multiplicity of pillars and adjacent wells; and a second semiconductor material layer deposited discontinuously on said first semiconductor pillars and wells to form an interface therewith; wherein said pillars, wells and said discontinuous layer have a lateral dimension from about 2μm to about 5000μm; and wherein the second semiconductor is deposited on the pillars and wells in excess of the critical thickness defined as the thickness at which a comparable composite having a lateral measurement of greater than 5000μm exceeds a dislocation density of 100 dislocations per centimeter.
Claim 2
Dependent Claim
109 words
A semiconductor material composite structure formed from crystal lattice mismatched semiconductor materials which comprises: a first semiconductor material layer having a multiplicity of pillars and adjacent wells; and a second semiconductor material layer deposited discontinuously on said first semiconductor pillars and wells to form an interface therewith; wherein said pillars, wells and said discontinuous layer have a lateral dimension from about 2μm to about 5000μm; and wherein the second semiconductor is deposited on the pillars and wells in excess of the critical thickness defined as the thickness at which a comparable composite having a lateral measurement of greater than 5000μm exceeds a dislocation density of 100 dislocations per centimeter.
Claim 3
Dependent Claim
79 words
The mismatched structure of claim 1 having a pillar height of from about 10Å to about 500 μm and a second semiconductor having a thickness up to about ten times the critical thickness, and where the density of dislocations at the interface between the first semiconductor layer and the second semiconductor layer is from about 0 to substantially less than the value of the dislocation density for a mismatched structure having a lateral dimension of at least 5000 μm.
Claim 4
Dependent Claim
34 words
The mismatched structure of claim 2 wherein the number of dislocations at the interface between the first semiconductor material and the second semiconductor layer is from about 0 to about 1000 dislocations per centimeter.
Claim 5
Dependent Claim
76 words
The composite of claim 2 wherein the height of said pillar is sufficient to accept the second semiconductor deposit on the pillar and well in a thickness up to about 1-5 times the critical thickness; wherein the pillars are fabricated in a design to provide a discontinuity in the deposited second semiconductor layer thus controlling the defect density at the interface by limiting the lateral dimension of the deposited semiconductor layer on the pillar and well.
Claim 6
Dependent Claim
33 words
The composite of claim 4 wherein the pillar height is from about 10Å to 2 μm and the lateral dimension of the pillar and well is from about 15 to about 200 μm.
Claim 7
Dependent Claim
10 words
The structure of claim 4 where the pillars are cylindrical.
Claim 8
Dependent Claim
37 words
The structure of claim 6 wherein the pillars have a top planar section, and sloping side walls that undercut the top portion of the pillar in a manner sufficient to effect the discontinuity of the applied layer.
Claim 9
Dependent Claim
23 words
The structure of claim 7 wherein the lateral dimension of the discontinuous applied layer is from about 15 μm to about 100 μm.
Claim 10
Dependent Claim
138 words
The structure of claim 3 wherein the crystal lattice semiconductor composite is represented by the formulas: M 1 x M 2 1-x M 3 y M 4 1-y /M 5 z M 6 1 -z M 7 w M 8 1-w ;M 1 x M 2 1-x M 3 y M 4 1-y /M 9 ; and M 9 x M 10 1-x /M 10 or their inverse counterpart where M 1 , M 2 , M 5 and M 6 are elements of Group IIIA and Group IIB; M 3 , M 4 , M 7 and M 8 are elements of Group VA and Group VIA and M 9 and M 10 are elements of Group IVA of the periodic table of elements and where W, X, Y and Z are values from 0 to 1.
Claim 11
Dependent Claim
15 words
The structure of claim 10 where the composite comprises In 95 As/GaAs or its inverse.
Claim 12
Dependent Claim
74 words
The structure of claim 3 wherein the crystal lattice semiconductor composite is represented by the formulas M 1 x M 2 1-x M 3 y M 4 1-y /M 9 and M 9 /M 10 wherein M 1 , M 2 are elements of Group IIIA; M 3 , M 4 are elements of Group VA; and where M 9 and M 10 are elements of Group IV of the periodic table of elements.
Claim 13
Dependent Claim
29 words
The structure of claim 1 wherein the mismatched composite comprises In x Ga 1-x As/(001) GaAs or its inverse and where x has a value from 0 to 1.
Claim 14
Dependent Claim
15 words
The structure of claim 1 where the composite comprises GaAs on Si or its inverse.
Claim 15
Dependent Claim
37 words
The structure of claim 1 where the composite comprises In x Ga 1-x As on In y Ga 1-y As where x and y have values from 0 to 1 and x is not equal to y.
Claim 16
Dependent Claim
27 words
The structure of claim 1 where the composite comprises Si x Ge 1-x on Si or its inverse, where x is a value from 0 to 1.
Claim 17
Dependent Claim
27 words
The structure of claim 1 where the composite comprises GaAs on Si x Ge 1-x or its inverse, where x has a value between 0 and 1.
Claim 18
Dependent Claim
14 words
The structure of claim 1 where the composite comprises layers of ZnSe and GaAs.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-07-15 | 1995-01-14 | 1995-07-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-07-15 | 1999-01-14 | 1999-07-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-07-15 | 2003-01-14 | 2003-07-16 | $7700.00 | Window Closed / Lapsed |