MOSFET transistor

Claim 1

A MOSFET transistor, comprising: a semiconductor substrate having a first conductivity type; source and drain regions formed at a certain distance away from each other in a surface area of the substrate, said source and drain regions having a second conductivity type opposite to the first conductivity type; a gate electrode formed on a surface of the substrate through a gate insulating film formed thereon between the source and drain regions, the gate electrode including a central gate member formed in a central portion of the gate electrode and side gate members formed in both side end portions of the gate electrode, the central gate member being selected from the group consisting of an undoped semiconductor film, a metal and a metallic silicide, the side gate members being a semiconductor film having the second conductivity type; and a channel region located in the surface area of the substrate between the source and drain regions being composed of different concentration regions, the channel region including a low concentration channel region formed in a central portion and high concentration channel regions formed in side end portions, the central gate member being located above the low concentration channel region and the side gate members being located above the high concentration channel regions adjacent to the source and drain regions so that a threshold voltage of the high concentration channel regions is lower than that of the low concentration channel region.