US5028561A
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Method of growing p-type group II-VI material
Assignee: The AT&T MVPD Group LLC
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Filing: 1989-06-15
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Granted: 1991-07-02
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Expires: 2009-06-15
Abstract
Abstract P-type doping of a molecular beam epitaxy (MBE) grown substrate composed of a Group II-VI combination is accomplished by forming a flux from a Group II-V combination, and applying the flux to the substrate at a pressure less than about 10 -6 atmosphere. The Group II material is selected from Zn, Cd, Hg and Mg, the Group V material from As, Sb and P, and the Group VI material from S, Se and Te. The Group II-V dopant combination is preferably provided as a compound formed predominantly from the Group II material, and having the formulation X 3 Y 2 , where X is the Group II material and Y is the Group V material. The doping concentration is controlled by controlling the temperature of the Group II-V combination. Metal vacancies in the lattice structure are tied up by the Group II constituent of the dopant combination, leaving the Group V dopant available to enter the Group VI sublattice and produce a p-type doping.
Inventors
- 👤 G. Sanjiv Kamath
- 👤 Owen K. Wu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 02:40
CPC Classifications
C; C30; C30B; C30B23/00; C30B23/02; C30B23/002; C30B29/00; C30B29/10; C30B29/46; C30B29/48; H; H10; H10P; H10P14/00; H10P14/20; H10P14/22; H10P14/34; H10P14/3402; H10P14/3424; H10P14/3432; H10P14/3438; H10P14/3441; H10P14/3442; H10P14/3444; Y; Y10; Y10S; Y10S148/00; Y10S148/041; Y10S148/064; Y10S148/169; Y10S438/00; Y10S438/914; Y10S438/925; Y10S438/971
Claims Analysis
Total Claims: 27
Claim 1
Independent Claim
161 words
A method of p-type doping a substance formed from a combination of at least one Group II material selected from the group consisting of Zn, Cd, Hg and Mg and a group VI material selected from the group consisting of S, Se and Te, the substance having a lattice structure with metal vacancies and a Group VI sublattice structure, comprising: forming a flux from a combination of Group II and Group V materials, the Group II material being selected from the group consisting of Zn, Ce, Hg and Mg and the Group V material being selected from the group consisting of As, Sb and P, and applying said flux to the substance at a pressure less than about 10 -6 atmosphere, the Group II material being present in the flux in a quantity sufficient to occupy metal vacancies in the lattice structure so that the Group V material in the flux enters the Group VI sublattice and establishes a p-type doping.
Claim 2
Independent Claim
161 words
A method of p-type doping a substance formed from a combination of at least one Group II material selected from the group consisting of Zn, Cd, Hg and Mg and a group VI material selected from the group consisting of S, Se and Te, the substance having a lattice structure with metal vacancies and a Group VI sublattice structure, comprising: forming a flux from a combination of Group II and Group V materials, the Group II material being selected from the group consisting of Zn, Ce, Hg and Mg and the Group V material being selected from the group consisting of As, Sb and P, and applying said flux to the substance at a pressure less than about 10 -6 atmosphere, the Group II material being present in the flux in a quantity sufficient to occupy metal vacancies in the lattice structure so that the Group V material in the flux enters the Group VI sublattice and establishes a p-type doping.
Claim 3
Dependent Claim
29 words
The method of claim 1, wherein the substrate comprises HgCdTe, and the flux is formed from a compound consisting of HgCd combined with one of said Group V materials.
Claim 4
Dependent Claim
47 words
The method of claim 2, wherein the combined proportion of Hg and Cd in the flux compound is substantially equal to the proportion of Te, the relative proportion of Hg is in the range 0>x<1 and the relative proportion 1-x of Cd is in the range 1<1-x>0.
Claim 5
Independent Claim
129 words
A method of p-type doping a substance formed from a combination of at least one Group II material selected from the group consisting of Zn, Cd, Hg and Mg and a Group VI material selected from the group consisting of S, Se and Te, comprising: forming a flux from a combination of Group II and Group V materials, the Group II material being selected from the group consisting of Zn, Cd, Hg and Mg and the Group V material being selected from the group consisting of As, Sb and P, said combination of Group II and Group V materials being provided as a compound which is formed predominantly from the Group II material, and applying said flux to the substance at a pressure less than about 10 -6 atmosphere.
Claim 6
Independent Claim
129 words
A method of p-type doping a substance formed from a combination of at least one Group II material selected from the group consisting of Zn, Cd, Hg and Mg and a Group VI material selected from the group consisting of S, Se and Te, comprising: forming a flux from a combination of Group II and Group V materials, the Group II material being selected from the group consisting of Zn, Cd, Hg and Mg and the Group V material being selected from the group consisting of As, Sb and P, said combination of Group II and Group V materials being provided as a compound which is formed predominantly from the Group II material, and applying said flux to the substance at a pressure less than about 10 -6 atmosphere.
Claim 7
Dependent Claim
30 words
The method of claim 4, wherein said compound has the formulation X 3 Y 2 , where X is the Group II material and Y is the Group V material.
Claim 8
Independent Claim
124 words
A method of p-type doping a substance formed from a combination of at least one Group II material selected from the group consisting of Zn, Cd, Hg and Mg and a Group VI material selected from the group consisting of S, Se and Te, comprising: forming a flux from a combination of Group II and Group V materials, the Group II material being selected from the group consisting of Zn, Cd, Hg and Mg and the Group V material being selected from the group consisting of As, Sb and P, applying said flux to the substance at a pressure less than about 10 -6 atmosphere, and controlling the temperature of said combination of Group II and Group V materials to control the doping concentration.
Claim 9
Independent Claim
124 words
A method of p-type doping a substance formed from a combination of at least one Group II material selected from the group consisting of Zn, Cd, Hg and Mg and a Group VI material selected from the group consisting of S, Se and Te, comprising: forming a flux from a combination of Group II and Group V materials, the Group II material being selected from the group consisting of Zn, Cd, Hg and Mg and the Group V material being selected from the group consisting of As, Sb and P, applying said flux to the substance at a pressure less than about 10 -6 atmosphere, and controlling the temperature of said combination of Group II and Group V materials to control the doping concentration.
Claim 10
Independent Claim
179 words
A method of growing p-doped Group II-VI material, the material comprising a combination of at least one Group II material selected from the group consisting of Zn, Cd, Hg and Mg and a Group VI material selected from the group consisting of S, Se and Te, comprising: growing a layer of the Group II-VI material by molecular beam epitaxy (MBE), said layer having a lattice structure with metal vacancies and a Group VI sublattice structure, forming a flux from a combination of Group II and Group V materials, the Group II material being selected from the group consisting of Zn, Cd, Hg and Mg and the Group V material being selected from the group consisting of As, Sb and P, and applying said flux to the layer of Group II-VI material simultaneously with the MBE growth of said layer, the Group II material being present in the flux in a quantity sufficient to occupy metal vacancies in the lattice structure so that the group V material in the flux enters the Group VI sublattice and establishes a p-type doping.
Claim 11
Independent Claim
179 words
A method of growing p-doped Group II-VI material, the material comprising a combination of at least one Group II material selected from the group consisting of Zn, Cd, Hg and Mg and a Group VI material selected from the group consisting of S, Se and Te, comprising: growing a layer of the Group II-VI material by molecular beam epitaxy (MBE), said layer having a lattice structure with metal vacancies and a Group VI sublattice structure, forming a flux from a combination of Group II and Group V materials, the Group II material being selected from the group consisting of Zn, Cd, Hg and Mg and the Group V material being selected from the group consisting of As, Sb and P, and applying said flux to the layer of Group II-VI material simultaneously with the MBE growth of said layer, the Group II material being present in the flux in a quantity sufficient to occupy metal vacancies in the lattice structure so that the group V material in the flux enters the Group VI sublattice and establishes a p-type doping.
Claim 12
Dependent Claim
31 words
The method of claim 7, wherein the Group II-VI material comprises HgCdTe, and the flux is formed from a compound consisting of HgCd combined with one of said Group V materials.
Claim 13
Dependent Claim
47 words
The method of claim 8, wherein the combined proportion of Hg and Cd in the flux compound is substantially equal to the proportion of Te, the relative proportion of Hg is in the range 0>x<1 and the relative proportion 1-x of Cd is in the range 1<1-x>0.
Claim 14
Independent Claim
147 words
A method of growing p-doped Group II-VI material, the material comprising a combination of at least one Group II material selected from the group consisting of Zn, Cd, Hg and Mg and a Group VI material selected from the group consisting of S, Se and Te, comprising: growing a layer of the Group II-VI material by molecular beam epitaxy (MBE), forming a flux from a combination of Group II and Group V materials, the Group II material being selected from the group consisting of Zn, Cd, Hg and Mg and the Group V material being selected from the group consisting of As, Sb and P, said combination of Group II and Group V materials being provided as a compound which is formed predominantly from the Group II material, and applying said flux to the layer of Group II-VI material simultaneously with the MBE growth of said layer.
Claim 15
Independent Claim
147 words
A method of growing p-doped Group II-VI material, the material comprising a combination of at least one Group II material selected from the group consisting of Zn, Cd, Hg and Mg and a Group VI material selected from the group consisting of S, Se and Te, comprising: growing a layer of the Group II-VI material by molecular beam epitaxy (MBE), forming a flux from a combination of Group II and Group V materials, the Group II material being selected from the group consisting of Zn, Cd, Hg and Mg and the Group V material being selected from the group consisting of As, Sb and P, said combination of Group II and Group V materials being provided as a compound which is formed predominantly from the Group II material, and applying said flux to the layer of Group II-VI material simultaneously with the MBE growth of said layer.
Claim 16
Dependent Claim
30 words
The method of claim 10, wherein said compound has the formulation X 3 Y 2 , where X is the Group II material and Y is the Group V material.
Claim 17
Independent Claim
142 words
The method of growing p-doped Group II-VI material, the material comprising a combination of at least one Group II material selected from the group consisting of Zn, Cd, Hg and Mg and a Group VI material selected from the group consisting of S, Se and Te, comprising: growing a layer of the Group II-VI material by molecular beam epitaxy (MBE), forming a flux from a combination of Group II and Group V materials, the Group II material being selected from the group consisting of Zn, Cd, Hg and Mg and the Group V material being selected from the group consisting of As, Sb and P, applying said flux to the layer of Group II-VI material simultaneously with the MBE growth of said layer, and controlling the temperature of said combination of Group II and Group V materials to control the doping concentration.
Claim 18
Independent Claim
142 words
The method of growing p-doped Group II-VI material, the material comprising a combination of at least one Group II material selected from the group consisting of Zn, Cd, Hg and Mg and a Group VI material selected from the group consisting of S, Se and Te, comprising: growing a layer of the Group II-VI material by molecular beam epitaxy (MBE), forming a flux from a combination of Group II and Group V materials, the Group II material being selected from the group consisting of Zn, Cd, Hg and Mg and the Group V material being selected from the group consisting of As, Sb and P, applying said flux to the layer of Group II-VI material simultaneously with the MBE growth of said layer, and controlling the temperature of said combination of Group II and Group V materials to control the doping concentration.
Claim 19
Independent Claim
215 words
A method of forming a p-n junction device from a device material consisting of a combination of at least one Group II material selected from the group consisting of Zn, Cd, Hg and Mg and a Group VI material selected from the group consisting of S, Se and Te, comprising: a) forming an n-doped layer of the device material with a lattice structure having metal vacancies and a Group VI sublattice structure, and b) forming a p-doped layer of the device material adjacent to said n-doped layer by: i) growing a layer of the device material by molecular beam epitaxy (MBE), ii) forming a flux from a combination of Group II and Group V materials, the Group II material being selected from the group consisting of Zn, Cd, Hg and Mg and the Group V material being selected from the group consisting of As, Sb and P, and iii) applying said flux to said layer of device material simultaneously with the MBE growth of said layer, the Group II material being present in the flux in a quantity sufficient to occupy metal vacancies in the lattice structure so that the Group V material in the flux enters the Group VI sublattice and establishes a p-type doping, said n-doped and p-doped layers meeting at a junction.
Claim 20
Independent Claim
215 words
A method of forming a p-n junction device from a device material consisting of a combination of at least one Group II material selected from the group consisting of Zn, Cd, Hg and Mg and a Group VI material selected from the group consisting of S, Se and Te, comprising: a) forming an n-doped layer of the device material with a lattice structure having metal vacancies and a Group VI sublattice structure, and b) forming a p-doped layer of the device material adjacent to said n-doped layer by: i) growing a layer of the device material by molecular beam epitaxy (MBE), ii) forming a flux from a combination of Group II and Group V materials, the Group II material being selected from the group consisting of Zn, Cd, Hg and Mg and the Group V material being selected from the group consisting of As, Sb and P, and iii) applying said flux to said layer of device material simultaneously with the MBE growth of said layer, the Group II material being present in the flux in a quantity sufficient to occupy metal vacancies in the lattice structure so that the Group V material in the flux enters the Group VI sublattice and establishes a p-type doping, said n-doped and p-doped layers meeting at a junction.
Claim 21
Dependent Claim
30 words
The method of claim 13, wherein the device material comprises HgCdTe, and the flux is formed from a compound consisting of HgCd combined with one of said Group V materials.
Claim 22
Dependent Claim
53 words
The method of claim 14, wherein the combined proportion of Hg and Cd in said flux is substantially equal to the proportion of Te, the relative proportion X of Hg is in the range 0>x<1 in each layer and the relative proportion 1-x of Cd is in the range 1<1-x>0 in each layer.
Claim 23
Independent Claim
185 words
A method of forming a p-n junction device from a device material consisting of a combination of at least one Group II material selected from the group consisting of Zn, Cd, Hg and Mg and a Group VI material selected from the group consisting of S, Se and Te, comprising: a) forming an n-doped layer of the device material, and b) forming an p-doped layer of the device material adjacent to said n-doped layer by: i) growing a layer of the device material by molecular beam epitaxy (MBE), ii) forming a flux from a combination of Group II and Group V materials, the Group II material being selected from the group consisting of Zn, Cd, Hg and Mg and the Group V material being selected from the group consisting of As, Sb and P, and iii) applying said flux to said layer of device material simultaneously with the MBE growth of said layer, said combination of Group II and Group V materials being provided as a compound which is formed predominantly from the Group II material, said n-doped and p-doped layers meeting at a junction.
Claim 24
Independent Claim
185 words
A method of forming a p-n junction device from a device material consisting of a combination of at least one Group II material selected from the group consisting of Zn, Cd, Hg and Mg and a Group VI material selected from the group consisting of S, Se and Te, comprising: a) forming an n-doped layer of the device material, and b) forming an p-doped layer of the device material adjacent to said n-doped layer by: i) growing a layer of the device material by molecular beam epitaxy (MBE), ii) forming a flux from a combination of Group II and Group V materials, the Group II material being selected from the group consisting of Zn, Cd, Hg and Mg and the Group V material being selected from the group consisting of As, Sb and P, and iii) applying said flux to said layer of device material simultaneously with the MBE growth of said layer, said combination of Group II and Group V materials being provided as a compound which is formed predominantly from the Group II material, said n-doped and p-doped layers meeting at a junction.
Claim 25
Dependent Claim
30 words
The method of claim 16, wherein said compound has the formulation X 3 Y 2 , where X is the Group II material and Y is the Group V material.
Claim 26
Independent Claim
174 words
A method of forming a p-n junction device from a device material consisting of a combination of at least one Group II material selected from the group consisting of Zn, Cd, Hg and Mg and a Group VI material selected from the group consisting of S, Se and Te, comprising: a) forming an n-doped layer of the device material, and b) forming an p-doped layer of the device material adjacent to said n-doped layer by: i) growing a layer of the device material by molecular beam epitaxy (MBE), ii) forming a flux from a combination of Group II and Group V materials, the Group II material being selected from the group consisting of Zn, Cd, Hg and Mg and the Group V material being selected from the group consisting of As, Sb and P, iii) applying said flux to said layer of device material simultaneously with the MBE growth of said layer, and iv) controlling the temperature of the compound to control the doping concentration, said n-doped and p-doped layers meeting at a junction.
Claim 27
Independent Claim
174 words
A method of forming a p-n junction device from a device material consisting of a combination of at least one Group II material selected from the group consisting of Zn, Cd, Hg and Mg and a Group VI material selected from the group consisting of S, Se and Te, comprising: a) forming an n-doped layer of the device material, and b) forming an p-doped layer of the device material adjacent to said n-doped layer by: i) growing a layer of the device material by molecular beam epitaxy (MBE), ii) forming a flux from a combination of Group II and Group V materials, the Group II material being selected from the group consisting of Zn, Cd, Hg and Mg and the Group V material being selected from the group consisting of As, Sb and P, iii) applying said flux to said layer of device material simultaneously with the MBE growth of said layer, and iv) controlling the temperature of the compound to control the doping concentration, said n-doped and p-doped layers meeting at a junction.
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