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US5028306A Expired / Lapsed US ⏱️ 0.0 years remaining

Process for forming a ceramic-metal adduct

Assignee: Motorola Solutions Inc
•
Filing: 1990-09-04
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Granted: 1991-07-02
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Expires: 2010-09-04
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Abstract

Abstract A ceramic article is treated to increase the adhesion of metals to the ceramic article by placing the ceramic article under at least a partial vacuum. A thin film of metal is then deposited on the ceramic article by sputtering or evaporating. The metallized ceramic article is further bombarded by high energy ions, resulting in the formation of a metal-ceramic compound that renders the article more receptive to further metal deposition.

Inventors

  • 👤 James L. Davis
  • 👤 Ernest G. Garza

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-30 22:10
CPC Classifications
C; C04; C04B; C04B41/00; C04B41/009; C04B41/0027; C04B41/45; C04B41/50; C04B41/51; C04B41/5127; C04B41/53; C04B41/5315; C04B41/80; C04B41/81; C04B41/85; C04B41/88; C04B41/91; C23; C23C; C23C14/00; C23C14/02; C23C14/021; C23C14/022

Claims Analysis

Total Claims: 12
Claim 1
Independent Claim 65 words
A process for treating a ceramic article to increase the adhesion of metal to the ceramic article comprising the following steps in the order named: placing the ceramic article under at least a partial vacuum, depositing a thin film of metal on the ceramic article, exposing the metallized ceramic article to high energy ions so as to react the metal film with the ceramic article.
Claim 2
Dependent Claim 65 words
A process for treating a ceramic article to increase the adhesion of metal to the ceramic article comprising the following steps in the order named: placing the ceramic article under at least a partial vacuum, depositing a thin film of metal on the ceramic article, exposing the metallized ceramic article to high energy ions so as to react the metal film with the ceramic article.
Claim 3
Dependent Claim 25 words
The process of claim 1, wherein the ceramic article is selected from the group consisting of aluminum oxide, titanium nitride, barium titanate, and aluminum nitride.
Claim 4
Dependent Claim 21 words
The process of claim 2, wherein the metal is selected from the group consisting of copper, nickel, silver, gold, and palladium.
Claim 5
Dependent Claim 20 words
The process of claim 3, wherein the high energy ion is selected from the group consisting of the Noble gases.
Claim 6
Dependent Claim 21 words
The process of claim 1, wherein the metal is selected from the group consisting of copper, nickel, silver, gold, and palladium.
Claim 7
Dependent Claim 20 words
The process of claim 1, wherein the high energy ion is selected from the group consisting of the Noble gases.
Claim 8
Dependent Claim 15 words
The process of claim 1, wherein the depositing step comprises depositing the metal by sputtering.
Claim 9
Dependent Claim 15 words
The process of claim 1, wherein the depositing step comprises depositing the metal by evaporating.
Claim 10
Dependent Claim 20 words
The process of claim 1, including the further step of plasma cleaning the ceramic article prior to depositing the metal.
Claim 11
Dependent Claim 80 words
A process for treating an aluminum oxide ceramic article to increase the adhesion of metal to the article comprising the following steps in the order named: placing the aluminum oxide ceramic article under at least a partial vacuum, sputtering or evaporating a thin film of copper on the aluminum oxide ceramic article, and exposing the metallized aluminum oxide ceramic article to a beam of high energy argon ions so as to react the copper with the aluminum oxide ceramic article.
Claim 12
Dependent Claim 80 words
A process for treating an aluminum oxide ceramic article to increase the adhesion of metal to the article comprising the following steps in the order named: placing the aluminum oxide ceramic article under at least a partial vacuum, sputtering or evaporating a thin film of copper on the aluminum oxide ceramic article, and exposing the metallized aluminum oxide ceramic article to a beam of high energy argon ions so as to react the copper with the aluminum oxide ceramic article.

References Cited (Backward Citations)

US4226932A Cited
US4302498A Cited
US4629631A Cited
US4793908A Cited
US4874493A Cited
US4855026A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1994-07-01 1994-12-31 1995-07-02 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1998-07-01 1998-12-31 1999-07-02 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2002-07-01 2002-12-31 2003-07-02 $7700.00 Window Closed / Lapsed

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