Patent US5026437A successfully refreshed from Google Patents.
US5026437A
Expired / Lapsed
US
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Cantilevered microtip manufacturing by ion implantation and etching
Assignee: Tencor Instruments Inc
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Filing: 1990-01-22
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Granted: 1991-06-25
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Expires: 2010-01-22
Abstract
Abstract A method for fabricating a microtip, cantilevered from a base and having a controllably high aspect ratio, for use in microprobe microscopy to probe variations in materials at the atomic level. A two-layer semiconductor material structure is provided, one layer being n type and the other layer being p type. A thin pencil of ions of n type is implanted through the n type layer into the p type layer, through a small aperture in a mask layer that overlies the n type layer. The p type material is then etched away, leaving the n type ion profile and the n type layer as a cantilevered microtip. The n type semiconductor layer may be replaced by a layer of any material that resists etching by the selected etchant.
Inventors
- 👤 Armand P. Neukermans
- 👤 Josef Berger
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-10 02:06
CPC Classifications
G; G01; G01Q; G01Q70/00; G01Q70/16; G01Q70/08; G01Q70/10; G01Q70/14; H; H10; H10P; H10P50/00; H10P50/60; H10P50/64; H10P50/642; H10P50/644; Y; Y10; Y10S; Y10S438/00; Y10S438/914; Y10S438/924
Claims Analysis
Total Claims: 43
Claim 1
Independent Claim
185 words
A method of producing a cantilevered microtip, the method comprising the steps of: providing a two-layer structure of materials, having a first layer that is resistant to etching by a selected etchant, adjacent to a second layer of semiconductor material with doping of a first electrical conductivity type, where the first layer has an exposed surface and where the second layer of material is rapidly etched by the selected etchant; providing an ion implant mask adjacent to the exposed surface of the first layer, the mask having at least one aperture therein that exposes a small area of the adjacent exposed surface; implanting ions, formed from an element of a second electrical conductivity type, of predetermined kinetic energy into the two-layer structure through the mask in a predetermined direction so that the ions implanted form an ion profile with a controllable aspect ratio in the second layer; removing the mask material; and removing the portion of the second layer that is not implanted with ions by etching with the selected etchant, to expose the ion profile and the first layer as a single connected unit.
Claim 2
Independent Claim
185 words
A method of producing a cantilevered microtip, the method comprising the steps of: providing a two-layer structure of materials, having a first layer that is resistant to etching by a selected etchant, adjacent to a second layer of semiconductor material with doping of a first electrical conductivity type, where the first layer has an exposed surface and where the second layer of material is rapidly etched by the selected etchant; providing an ion implant mask adjacent to the exposed surface of the first layer, the mask having at least one aperture therein that exposes a small area of the adjacent exposed surface; implanting ions, formed from an element of a second electrical conductivity type, of predetermined kinetic energy into the two-layer structure through the mask in a predetermined direction so that the ions implanted form an ion profile with a controllable aspect ratio in the second layer; removing the mask material; and removing the portion of the second layer that is not implanted with ions by etching with the selected etchant, to expose the ion profile and the first layer as a single connected unit.
Claim 3
Dependent Claim
33 words
The method of claim 1, further comprising the step of orienting said second layer so that said predetermined direction of ion implantation approximately coincides with an ion channeling direction in said second layer.
Claim 4
Dependent Claim
32 words
The method of claim 2, further comprising the step of providing said ion channeling direction from the class consisting of the <110>, <111>, and <100> directions in said second layer of material.
Claim 5
Dependent Claim
31 words
The material of claim 1, further comprising the step of providing said ions for implantation from the class of p type elements consisting of beryllium, boron, magnesium, aluminum, gallium and indium.
Claim 6
Dependent Claim
32 words
The method of claim 1, further comprising the step of providing said ions for implantation from the class of n type elements consisting of nitrogen, oxygen, phosphorous, sulfur, arsenic, selenium, and antimony.
Claim 7
Dependent Claim
49 words
The method of claim 5, wherein said step of removing said portion of said second semiconductor layer that is not implanted with said ions comprises etching said portion with said selected etchant, which is chosen to be 8 HNO 3 :1 HF:1 HC 2 H 3 O 2 .
Claim 8
Dependent Claim
17 words
The method of claim 1, further comprising the step of subjecting said ion profile to ion bombardment.
Claim 9
Dependent Claim
18 words
The method of claim 1, further comprising the step of subjecting said ion profile to reactive ion etching.
Claim 10
Dependent Claim
9 words
A product produced by the method of claim 1.
Claim 11
Dependent Claim
33 words
The method of claim 1, further comprising the step of choosing the concentration of said doping of said second layer so that said ion profile has an aspect ratio of at least 5.
Claim 12
Independent Claim
167 words
A method of producing a cantilevered microtip, the method comprising the steps of: providing a two-layer structure of semiconductor materials that has a first layer with doping of a first electrical conductivity type adjacent to a second layer with doping of a second electrical conductivity type, where the first layer has an exposed surface; providing an ion implant mask adjacent to the exposed surface of the first semiconductor layer, the mask having at least one small aperture therein that exposes a small area of the adjacent exposed surface; implanting ions, formed from an element of first electrical conductivity type, of predetermined kinetic energy into the semiconductor material through the mask in a predetermined direction so that the ions implanted form an ion profile with a controllable aspect ratio in the second semiconductor layer; and removing the mask material and the portion of the second semiconductor layer that is not implanted with ions, to expose the ion profile and the first semiconductor layer as a single connected unit.
Claim 13
Independent Claim
167 words
A method of producing a cantilevered microtip, the method comprising the steps of: providing a two-layer structure of semiconductor materials that has a first layer with doping of a first electrical conductivity type adjacent to a second layer with doping of a second electrical conductivity type, where the first layer has an exposed surface; providing an ion implant mask adjacent to the exposed surface of the first semiconductor layer, the mask having at least one small aperture therein that exposes a small area of the adjacent exposed surface; implanting ions, formed from an element of first electrical conductivity type, of predetermined kinetic energy into the semiconductor material through the mask in a predetermined direction so that the ions implanted form an ion profile with a controllable aspect ratio in the second semiconductor layer; and removing the mask material and the portion of the second semiconductor layer that is not implanted with ions, to expose the ion profile and the first semiconductor layer as a single connected unit.
Claim 14
Dependent Claim
35 words
The method of claim 11, further comprising the step of orienting said second semiconductor layer so that said predetermined direction of ion implantation approximately coincides with an ion channeling direction in said second semiconductor layer.
Claim 15
Dependent Claim
31 words
The method of claim 12, further comprising the step of providing said ion channeling direction from the class consisting of the <110>, <111>, and <100> directions in said second semiconductor material.
Claim 16
Dependent Claim
31 words
The material of claim 11, further comprising the step of providing said ions for implantation from the class of p type elements consisting of beryllium, boron, magnesium, aluminum, gallium and indium.
Claim 17
Dependent Claim
32 words
The method of claim 11, further comprising the step of choosing the concentration-of said doping of said second layer so that said ion profile has an aspect ratio of at least 5.
Claim 18
Dependent Claim
32 words
The method of claim 11, further comprising the step of providing said ions for implantation from the class of n type elements consisting of nitrogen, oxygen, phosphorous, sulfur, arsenic, selenium, and antimony.
Claim 19
Dependent Claim
17 words
The method of claim 11, further comprising the step of subjecting said ion profile to ion bombardment.
Claim 20
Dependent Claim
18 words
The method of claim 11, further comprising the step of subjecting said ion profile to reactive ion etching.
Claim 21
Dependent Claim
9 words
A product produced by the method of claim 11.
Claim 22
Independent Claim
234 words
A method of producing a cantilevered microtip with a high aspect ratio, the method comprising the steps of: providing a three-layer structure of materials having a first layer of semiconductor material with doping of a first electrical conductivity type, a second layer of semiconductor material with doping of first electrical conductivity type, with a third layer that is resistant to etching by a selected etchant, the third layer being positioned between the first and second layers, where the first layer has an exposed surface and lies between this exposed surface and the third layer and where the first and second layers of material are rapidly etched by the selected etchant; providing an ion implant mask adjacent to the exposed surface of the first layer, the mask having at least one aperture therein that exposes a small area of the adjacent exposed surface; implanting ions, formed from an element of second electrical conductivity type of predetermined kinetic energy into the first and third layers through the aperture in the mask in a predetermined direction so that the ions implanted form an ion profile with a controllable aspect ratio in the first layer; and removing the mask material; and removing the second layer and the portion of the first layer that is not implanted with ions by etching with the selected etchant, to expose the ion profile and the third layer as a single connected unit.
Claim 23
Independent Claim
234 words
A method of producing a cantilevered microtip with a high aspect ratio, the method comprising the steps of: providing a three-layer structure of materials having a first layer of semiconductor material with doping of a first electrical conductivity type, a second layer of semiconductor material with doping of first electrical conductivity type, with a third layer that is resistant to etching by a selected etchant, the third layer being positioned between the first and second layers, where the first layer has an exposed surface and lies between this exposed surface and the third layer and where the first and second layers of material are rapidly etched by the selected etchant; providing an ion implant mask adjacent to the exposed surface of the first layer, the mask having at least one aperture therein that exposes a small area of the adjacent exposed surface; implanting ions, formed from an element of second electrical conductivity type of predetermined kinetic energy into the first and third layers through the aperture in the mask in a predetermined direction so that the ions implanted form an ion profile with a controllable aspect ratio in the first layer; and removing the mask material; and removing the second layer and the portion of the first layer that is not implanted with ions by etching with the selected etchant, to expose the ion profile and the third layer as a single connected unit.
Claim 24
Dependent Claim
33 words
The method of claim 20, further comprising the step of orienting said first layer so that said predetermined direction of ion implantation approximately coincides with an ion channeling direction in said first layer.
Claim 25
Dependent Claim
30 words
The method of claim 21, further comprising the step of providing said ion channeling direction from the class consisting of the <110>, <111>, and <100> directions in said first layer.
Claim 26
Dependent Claim
31 words
The method of claim 20, further comprising the step of providing said ions for implantation from the class of p type elements consisting of beryllium, boron, magnesium, aluminum, gallium and indium.
Claim 27
Dependent Claim
32 words
The method of claim 20, further comprising the step of providing said ions for implantation from the class of n type elements consisting of nitrogen, oxygen, phosphorous, sulfur, arsenic, selenium and antimony.
Claim 28
Dependent Claim
48 words
The method of claim 24, wherein said step of removing said portion of said first layer that is not implanted with said ions comprises etching said portion with said selected etchant, which is chosen as 8 HNO 3 :1 HF: 1 HC 2 H 3 O 2 .
Claim 29
Dependent Claim
17 words
The method of claim 20, further comprising the step of subjecting said ion profile to ion bombardment.
Claim 30
Dependent Claim
18 words
The method of claim 20, further comprising the step of subjecting said ion profile to reactive ion etching.
Claim 31
Dependent Claim
9 words
A product produced by the method of claim 21.
Claim 32
Dependent Claim
33 words
The method of claim 20, further comprising the step of choosing the concentration of said doping of said first layer so that said ion profile has an aspect ratio of at least 5.
Claim 33
Independent Claim
210 words
A method of producing a cantilevered microtip with a high aspect ratio, the method comprising the steps of: providing a three-layer structure of semiconductor materials that has a first layer with doping of a first electrical conductivity type, a second layer with doping of first electrical conductivity type, with a third layer with doping of a second electrical conductivity type being positioned between the first and second semiconductor layers, where the first layer has an exposed surface and lies between this exposed surface and the third semiconductor layer; providing an ion implant mask adjacent to the exposed surface of the first semiconductor layer, the mask having at least one aperture therein that exposes a small area of the adjacent exposed surface; implanting ions, formed from an element of second electrical conductivity type of predetermined kinetic energy into the first and third semiconductor layers through the aperture in the mask in a predetermined direction so that the ions implanted form an ion profile with a controllable aspect ratio in the first semiconductor layer; and removing the mask material, the second semiconductor layer and the portion of the first semiconductor layer that is not implanted with ions, to expose the ion profile and the third semiconductor layer as a single connected unit.
Claim 34
Independent Claim
210 words
A method of producing a cantilevered microtip with a high aspect ratio, the method comprising the steps of: providing a three-layer structure of semiconductor materials that has a first layer with doping of a first electrical conductivity type, a second layer with doping of first electrical conductivity type, with a third layer with doping of a second electrical conductivity type being positioned between the first and second semiconductor layers, where the first layer has an exposed surface and lies between this exposed surface and the third semiconductor layer; providing an ion implant mask adjacent to the exposed surface of the first semiconductor layer, the mask having at least one aperture therein that exposes a small area of the adjacent exposed surface; implanting ions, formed from an element of second electrical conductivity type of predetermined kinetic energy into the first and third semiconductor layers through the aperture in the mask in a predetermined direction so that the ions implanted form an ion profile with a controllable aspect ratio in the first semiconductor layer; and removing the mask material, the second semiconductor layer and the portion of the first semiconductor layer that is not implanted with ions, to expose the ion profile and the third semiconductor layer as a single connected unit.
Claim 35
Dependent Claim
35 words
The method of claim 30, further comprising the step of orienting said first semiconductor layer so that said predetermined direction of ion implantation approximately coincides with an ion channeling direction in said first semiconductor layer.
Claim 36
Dependent Claim
31 words
The method of claim 31, further comprising the step of providing said ion channeling direction from the class consisting of the <110>, <111>, and <100> directions in said first semiconductor layer.
Claim 37
Dependent Claim
31 words
The method of claim 30, further comprising the step of providing said ions for implantation from the class of p type elements consisting of beryllium, boron, magnesium, aluminum, gallium and indium.
Claim 38
Dependent Claim
32 words
The method of claim 30, further comprising the step of providing said ions for implantation from the class of n type elements consisting of nitrogen, oxygen, phosphorous, sulfur, arsenic, selenium and antimony.
Claim 39
Dependent Claim
48 words
The method of claim 34, wherein said step of removing said portion of said first semiconductor layer that is not implanted with said ions comprises etching said portion with an electrolytic etchant, which is chosen as 8 HNO 3 :1 HF:1 HC 2 H 3 O 2 .
Claim 40
Dependent Claim
17 words
The method of claim 30, further comprising the step of subjecting said ion profile to ion bombardment.
Claim 41
Dependent Claim
18 words
The method of claim 30, further comprising the step of subjecting said ion profile to reactive ion etching.
Claim 42
Dependent Claim
9 words
The product produced by the method of claim 31.
Claim 43
Dependent Claim
33 words
The method of claim 30, further comprising the step of choosing the concentration of said doping of said first layer so that said ion profile has an aspect ratio of at least 5.
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