Method of manufacturing ion current recording head

Claim 1

A method of manufacturing an ion current recording head having a plurality of small through holes for allowing passage of ions and adapted to control an ion current flowing through the respective small through holes by controlling an electric field in the respective small through holes, comprising the following steps in the sequence of: forming first and second thin metal films on opposite surfaces of a solid insulating body; forming a plurality of small holes in said first and second thin metal films so as to oppose each other through said solid insulating body; radiating an excimer laser beam onto one of said first and second thin metal films to form the small through holes in the solid insulating body which each allow passage therethrough of the ion current; and patterning said thin metal films.

Claim 2

A method of manufacturing an ion current recording head having a plurality of small through holes for allowing passage of ions and adapted to control an ion current flowing through the respective small through holes by controlling an electric field in the respective small through holes, comprising the following steps in the sequence of: forming first and second thin metal films on opposite surfaces of a solid insulating body; forming a plurality of small holes in said first and second thin metal films so as to oppose each other through said solid insulating body; radiating an excimer laser beam onto one of said first and second thin metal films to form the small through holes in the solid insulating body which each allow passage therethrough of the ion current; and patterning said thin metal films.

Claim 3

A method of manufacturing an ion current recording head having a large number of small holes for allowing passage of an ion current therethrough and adapted to control the ion current flowing through the respective small holes by controlling an electric field in the respective small holes, comprising the steps of: providing an insulating tape with a pattern of a plurality of electrodes formed on opposite surfaces of said tape, said pattern being placed at predetermined intervals along the length of said tape; positioning an excimer laser and a lens system for focusing a beam from the excimer laser on said tape; placing a mask between the tape and the laser, said mask having a plurality of openings aligned so as to pass said beam to said electrodes in the pattern; selectively radiating the excimer laser beam through the slit and on the insulating tape; and forming a plurality of through holes in the insulating tape with small holes of the electrodes as a mask pattern for the excimer laser beam radiating on said tape.

Claim 4

A method of manufacturing an ion current recording head having a large number of small holes for allowing passage of an ion current therethrough and adapted to control the ion current flowing through the respective small holes by controlling an electric field in the respective small holes, comprising the steps of: providing an insulating tape with a pattern of a plurality of electrodes formed on opposite surfaces of said tape, said pattern being placed at predetermined intervals along the length of said tape; positioning an excimer laser and a lens system for focusing a beam from the excimer laser on said tape; placing a mask between the tape and the laser, said mask having a plurality of openings aligned so as to pass said beam to said electrodes in the pattern; selectively radiating the excimer laser beam through the slit and on the insulating tape; and forming a plurality of through holes in the insulating tape with small holes of the electrodes as a mask pattern for the excimer laser beam radiating on said tape.