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US5025145A
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Method and apparatus for determining the minority carrier diffusion length from linear constant photon flux photovoltage measurements
Assignee: Individual
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Filing: 1988-08-23
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Granted: 1991-06-18
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Expires: 2008-08-23
Abstract
Abstract This invention relates to the measurement of the minority carrier diffusion length of a semiconductor sample to evaluate the contaminant impurities which reduce the carrier lifetime.
Inventors
- 👤 Jacek J. Lagowski
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 05:24
CPC Classifications
G; G01; G01R; G01R31/00; G01R31/26; G01R31/265; G01R31/2656
Claims Analysis
Total Claims: 28
Claim 1
Independent Claim
147 words
A method for determining the minority carrier diffusion length of a sample of a semiconductor material comprising the steps of: selecting a photon flux for determining said minority carrier diffusion length by illuminating a surface of said semiconductor with beams of radiation having at least two different photon flux values to induce photovoltages, detecting and analyzing said photovoltages as a function of photon flux and; selecting a photon flux based on said analysis; determining said minority carrier diffusion length by illuminating a surface of said semiconductor successively with beams of monochromatic radiation having different photon energies to induce surface photovoltages; said radiation at said different photon energies having a photon flux being substantially equal to said selected photon flux; detecting said photovoltages and; analyzing said photovoltages as a function of the absorption coefficients of said photon energies for said semiconductor to deduce said minority carrier diffusion length.
Claim 2
Independent Claim
147 words
A method for determining the minority carrier diffusion length of a sample of a semiconductor material comprising the steps of: selecting a photon flux for determining said minority carrier diffusion length by illuminating a surface of said semiconductor with beams of radiation having at least two different photon flux values to induce photovoltages, detecting and analyzing said photovoltages as a function of photon flux and; selecting a photon flux based on said analysis; determining said minority carrier diffusion length by illuminating a surface of said semiconductor successively with beams of monochromatic radiation having different photon energies to induce surface photovoltages; said radiation at said different photon energies having a photon flux being substantially equal to said selected photon flux; detecting said photovoltages and; analyzing said photovoltages as a function of the absorption coefficients of said photon energies for said semiconductor to deduce said minority carrier diffusion length.
Claim 3
Dependent Claim
28 words
The method of claim 1 further comprising the step of selecting said photon flux from a range in which said photovoltage is a linear function of photon flux.
Claim 4
Dependent Claim
50 words
The method of claim 1 wherein said selecting further comprises the step of impinging a white light beam upon said semiconductor, for at least two different levels of photon flux, detecting photovoltages induced by said white light beam at said two levels, and comparing said voltages to said two fluxes.
Claim 5
Dependent Claim
25 words
The method of claim 3 wherein said comparing includes comparing at least one ratio of said voltages to at least one ratio of said fluxes.
Claim 6
Dependent Claim
29 words
The method of claim 4 wherein said photon flux is selected when at least one said ratio of said voltages are substantially equal to said ratio of said fluxes.
Claim 7
Independent Claim
53 words
The method of any one of claims 1-5 wherein said determining said minority carrier diffusion length further comprises the steps of analyzing said photovoltages as a function of said photon energies and excluding said photovoltages which do not fall on a monotonically increasing plot of photovoltage versus said photon energy of said wavelengths.
Claim 8
Dependent Claim
51 words
The method of claim 6 wherein said analyzing of said photovoltages includes comparing a first said photovoltage to a second said photovoltage, said first photovoltage being induced by a lower photon energy than said second photovoltage and excluding said second photovoltage if said second photovoltage is less than said first photovoltage.
Claim 9
Dependent Claim
20 words
The method of claim 7 wherein said second photovoltage is excluded if said first and second photovoltages are substantially equal.
Claim 10
Independent Claim
215 words
An apparatus for determining the minority carrier diffusion length of a sample of a semiconductor material, comprising: illuminating means for illuminating at least a portion of a surface of said semiconductor with radiation to induce photovoltages; detecting means for detecting said photovoltages; and analyzing means for analyzing said photovoltages; said apparatus being adapted to enable selection of a photon flux for determining said minority carrier diffusion length, wherein said illuminating means is adapted to illuminate said surface of said semiconductor with beams of radiation having at least two different photon flux values to induce photovoltages, and said analyzing means is adapted to analyze said photovoltages as a function of said photon flux and enable selection of said photon flux based on said analysis; said apparatus being further adapted to determine said minority carrier diffusion length, wherein said illuminating means is further adapted to successively illuminate said surface of said semiconductor with beams of monochromatic radiation having different photon energies to induce surface photovoltages; said illuminating means being capable of providing said radiation at said different photon energies at said selected photon flux; and said analyzing means being further adapted to analyze said photovoltages as a function of the absorption coefficients of said different photon energies for said semiconductor to deduce said minority carrier diffusion lengths.
Claim 11
Independent Claim
215 words
An apparatus for determining the minority carrier diffusion length of a sample of a semiconductor material, comprising: illuminating means for illuminating at least a portion of a surface of said semiconductor with radiation to induce photovoltages; detecting means for detecting said photovoltages; and analyzing means for analyzing said photovoltages; said apparatus being adapted to enable selection of a photon flux for determining said minority carrier diffusion length, wherein said illuminating means is adapted to illuminate said surface of said semiconductor with beams of radiation having at least two different photon flux values to induce photovoltages, and said analyzing means is adapted to analyze said photovoltages as a function of said photon flux and enable selection of said photon flux based on said analysis; said apparatus being further adapted to determine said minority carrier diffusion length, wherein said illuminating means is further adapted to successively illuminate said surface of said semiconductor with beams of monochromatic radiation having different photon energies to induce surface photovoltages; said illuminating means being capable of providing said radiation at said different photon energies at said selected photon flux; and said analyzing means being further adapted to analyze said photovoltages as a function of the absorption coefficients of said different photon energies for said semiconductor to deduce said minority carrier diffusion lengths.
Claim 12
Dependent Claim
21 words
The apparatus of claim 9 wherein said illuminating means includes fiber optic cables for directing said radiation to said semiconductor material.
Claim 13
Dependent Claim
26 words
The apparatus of claim 9 wherein said photon flux is selected from a range in which said photovoltage is a linear function of said photon flux.
Claim 14
Dependent Claim
59 words
The apparatus of claim 10 wherein said illuminating means is arranged to impinge a white light beam upon said semiconductor for at least two levels of photon flux, said detecting means is arranged to detect said photovoltages induced by said white light beam at said levels and said analyzing means is arranged to compare said voltages to said fluxes.
Claim 15
Dependent Claim
25 words
The apparatus of claim 12 wherein said comparing includes comparing at least one ratio of said voltages to at least one ratio of said fluxes.
Claim 16
Dependent Claim
26 words
The apparatus of claim 13 wherein said photon flux is selected if said ratio of said voltages are substantially equal to said ratio of said fluxes.
Claim 17
Dependent Claim
145 words
The apparatus of claim 9 or 11 wherein said detecting means comprises: a housing formed from material nontransparent to radiation, said housing including a first side distal from said substrate with an aperture for accepting light from a source; a second side proximal to said semiconductor surface with a second aperture for directing said light to said semiconductor surface; said second side including a proximal end having a flexible, transparent electrode disposed across said second aperture and a hollowed region about said second aperture to accept said flexible electrode such that said electrode is flush with said proximal end when said proximal end is positioned upon said substrate to measure said photovoltages; said proximal end further being of substantially larger outer diameter than said second aperture for effectively blocking ambient radiation from that area of the substrate exposed to said radiation from said second aperture.
Claim 18
Dependent Claim
38 words
The apparatus of claim 15 wherein said flexible electrode comprises a first layer of a plastic film and a second layer of a conducting material, said second layer coming in contact with said semiconductor during said photovoltage measurement.
Claim 19
Dependent Claim
35 words
The apparatus of claim 9 further comprising means for measuring said minority carrier diffusion length at a plurality of positions upon said surface of said semiconductor sample to map said diffusion length of said sample.
Claim 20
Independent Claim
134 words
A device for measuring photovoltages at a semiconductor sample surface comprising: a first side distal from said sample with an aperture for accepting light from a desired source; a second side proximal to said sample surface with a second aperture for directing said light to said semiconductor surface; said second side including a proximal end having a flexible, transparent electrode disposed across said second aperture and a hollowed region about said second aperture to accept said flexible electrode such that said electrode is flush with said proximal end when said proximal end is positioned upon said sample to measure said photovoltages; said proximal end further being of substantially larger outer diameter than said second aperture for effectively blocking ambient radiation from that area of the substrate exposed to said radiation from said second aperture.
Claim 21
Independent Claim
134 words
A device for measuring photovoltages at a semiconductor sample surface comprising: a first side distal from said sample with an aperture for accepting light from a desired source; a second side proximal to said sample surface with a second aperture for directing said light to said semiconductor surface; said second side including a proximal end having a flexible, transparent electrode disposed across said second aperture and a hollowed region about said second aperture to accept said flexible electrode such that said electrode is flush with said proximal end when said proximal end is positioned upon said sample to measure said photovoltages; said proximal end further being of substantially larger outer diameter than said second aperture for effectively blocking ambient radiation from that area of the substrate exposed to said radiation from said second aperture.
Claim 22
Dependent Claim
38 words
The apparatus of claim 18 wherein said flexible electrode comprises a first layer of a plastic film and a second layer of a conducting material, said second layer coming in contact with said semiconductor during said photovoltage measurement.
Claim 23
Independent Claim
112 words
A method for determining the minority carrier diffusion length of a sample of a semiconductor material comprising the steps of: illuminating a surface of said semiconductor successively with beams of monochromatic radiation having different photon energies to induce surface photovoltages; said radiation at said different photon energies being of substantially equal photon flux; detecting said photovoltages; analyzing said photovoltages as a function of said photon energies and excluding said photovoltages which do not fall on a monotonically increasing plot of photovoltage versus said photon energy, and; analyzing said monotonically increasing photovoltages as a function of the absorption coefficients of said photon energies for said semiconductor to deduce said minority carrier diffusion length.
Claim 24
Independent Claim
112 words
A method for determining the minority carrier diffusion length of a sample of a semiconductor material comprising the steps of: illuminating a surface of said semiconductor successively with beams of monochromatic radiation having different photon energies to induce surface photovoltages; said radiation at said different photon energies being of substantially equal photon flux; detecting said photovoltages; analyzing said photovoltages as a function of said photon energies and excluding said photovoltages which do not fall on a monotonically increasing plot of photovoltage versus said photon energy, and; analyzing said monotonically increasing photovoltages as a function of the absorption coefficients of said photon energies for said semiconductor to deduce said minority carrier diffusion length.
Claim 25
Dependent Claim
38 words
The method of claim 1 or 20 further comprising the step of measuring said minority carrier diffusion length at a plurality of positions upon said surface of said semiconductor sample to map said diffusion length of said sample.
Claim 26
Dependent Claim
61 words
The method of claim 1 or 20 further comprising the steps of measuring induced photovoltages for a semiconductor sample of known short diffusion length, analyzing said photovoltages as a function of the absorption coefficients corresponding to said photon energies for said semiconductors sample of known diffusion length, and determining the validity of said minority carrier diffusion length measurements from said analysis.
Claim 27
Dependent Claim
27 words
The method of claim 22 wherein said determining includes, excluding said coefficients which do not produce a substantially linear plot of said photovoltage versus said absorption coefficients.
Claim 28
Dependent Claim
27 words
The method of claim 22 or 23 wherein said determining includes, rejecting said photon flux if said photovoltages are not a linear function of said absorption coefficient.
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