US4598249A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method using surface photovoltage (SPV) measurements for revealing heavy metal contamination of semiconductor material
Assignee: Intersil Corp
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Filing: 1984-02-29
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Granted: 1986-07-01
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Expires: 2004-02-29
Abstract
Abstract A method for revealing the presence of heavy metal impurities that may have been introduced during the formation of a layer, such as the deposition of an epitaxial layer on a semiconductor substrate, uses the constant-magnitude steady-state surface photovoltage (SPV) method for determining the minority-carrier diffusion length by essentially two determination steps. A large ratio of the respective diffusion lengths determined before (actually measured or based on a priori knowledge of similar material) and after the epitaxial deposition step is indicative of the presence of a heavy metal impurity in the epitaxial layer. The method is based on the fact that the contaminating metal distributes itself substantially uniformly not only through the epitaxial layer but also throughout the substrate.
Inventors
- 👤 Lawrence A. Goodman
- 👤 Alvin M. Goodman
- 👤 Herman F. Gossenberger
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 21:18
CPC Classifications
H; H02; H02S; H02S50/00; H02S50/10; Y; Y02; Y02E; Y02E10/00; Y02E10/50
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
179 words
A method for revealing the presence of heavy metal impurities introduced during a processing step on a body of semiconductor material having a surface layer with a thickness t, said body having two major surfaces comprising the steps: (a) determining by the constant-magnitude steady-state surface photovoltage (SPV) method a first minority-carrier diffusion length (L 0 ) of said body formed of semiconductor material by illuminating either of said major surfaces at a step prior to forming said layer, where length (L 0 ) is at least as great as thickness t; (b) forming said layer on one of said major surfaces of said body; (c) heating said body and layer to a temperature sufficient to diffuse heavy metals present from said surface layer into said body; and (d) determining by said SPV method a second minority-carrier diffusion length (L 1 ) of said body by illuminating said major surface opposite from said surface layer, whereby a large ratio of length L 0 to length L 1 is indicative of the presence of a heavy metal impurity in said layer.
Claim 2
Independent Claim
179 words
A method for revealing the presence of heavy metal impurities introduced during a processing step on a body of semiconductor material having a surface layer with a thickness t, said body having two major surfaces comprising the steps: (a) determining by the constant-magnitude steady-state surface photovoltage (SPV) method a first minority-carrier diffusion length (L 0 ) of said body formed of semiconductor material by illuminating either of said major surfaces at a step prior to forming said layer, where length (L 0 ) is at least as great as thickness t; (b) forming said layer on one of said major surfaces of said body; (c) heating said body and layer to a temperature sufficient to diffuse heavy metals present from said surface layer into said body; and (d) determining by said SPV method a second minority-carrier diffusion length (L 1 ) of said body by illuminating said major surface opposite from said surface layer, whereby a large ratio of length L 0 to length L 1 is indicative of the presence of a heavy metal impurity in said layer.
Claim 3
Dependent Claim
18 words
The method of claim 1 further comprising the step of forming said body of float-zone (FZ) semiconductor material.
Claim 4
Dependent Claim
28 words
The method of claim 1 wherein said layer forming and heating step comprise forming said layer by epitaxial deposition on one of said major surfaces of said body.
Claim 5
Dependent Claim
23 words
The method of claim 1 wherein said layer forming step comprises diffusing dopant atoms into said body to define thereby said surface layer.
Claim 6
Dependent Claim
61 words
The method of claim 1 wherein additional processing steps to said layer are performed including heating said body to a temperature sufficient to diffuse any heavy metals that may have appeared on said surface layer; and then determining the minority-carrier diffusion length (L 1 ) of said body to reveal the presence of a heavy metal impurity according to step (d).
Claim 7
Dependent Claim
66 words
The method of claim 1 wherein said layer is further processed by doping it with material containing dopant atoms; heating said body to a temperature sufficient to diffuse heavy metals that may be present on said surface layer into said layer; and determining the minority-carrier diffusion length (L 1 ) of said body to reveal the presence of a heavy metal impurity according to step (d).
Claim 8
Dependent Claim
75 words
The method of claim 1 wherein said layer is further processed by depositing a layer of passivating material on said body; subsequently heating said body to a temperature sufficient to diffuse heavy metals into said layer and said body that may be present on said surface layer; thereafter removing said layer of passivant and determining the carrier diffusion length of said body according to step (d) to reveal the presence of a heavy metal impurity.
Claim 9
Dependent Claim
18 words
The method of claim 1 wherein the ratio of L 0 to L 1 is 20 or greater.
Claim 10
Dependent Claim
108 words
The method of claim 1 wherein said layer is formed of material whereby a junction region is formed between said layer and said body, wherein the potential barrier (Φ B ) across said junction is greater than 2kT wherein k is Boltzman's constant and T is the temperature in degrees Kelvin, further comprising the steps of: removing said layer, and thereafter measuring said length (L 1 ) by illuminating said major surface exposed by the removal of said layer, whereby a small value of the diffusion length L 1 compared to the diffusion length L 0 , is indicative that heavy metal contaminants were present in said layer.
Claim 11
Independent Claim
164 words
A method for revealing the presence of heavy metal impurities introduced during a processing step on a body of semiconductor material having a surface layer with a thickness t, said body having two major surfaces comprising the steps: (a) selecting said body formed of semiconductor material having a known minority-carrier diffusion length (L 0 ), where length (L 0 ) is at least as great as thickness t; (b) forming a layer on one of said major surfaces of said body; and (c) heating said body and layer to a temperature sufficient to diffuse heavy metals into said body from said surface layer; and (d) determined by the constant-magnitude steady-state surface photovoltage (SPV) method the actual minority-carrier diffusion length (L 1 ) of said body by illuminating said major surface opposite from said surface layer, whereby a large ratio of the known length L 0 to the actual length L 1 is indicative of the presence of a heavy metal impurity in said layer.
Claim 12
Independent Claim
164 words
A method for revealing the presence of heavy metal impurities introduced during a processing step on a body of semiconductor material having a surface layer with a thickness t, said body having two major surfaces comprising the steps: (a) selecting said body formed of semiconductor material having a known minority-carrier diffusion length (L 0 ), where length (L 0 ) is at least as great as thickness t; (b) forming a layer on one of said major surfaces of said body; and (c) heating said body and layer to a temperature sufficient to diffuse heavy metals into said body from said surface layer; and (d) determined by the constant-magnitude steady-state surface photovoltage (SPV) method the actual minority-carrier diffusion length (L 1 ) of said body by illuminating said major surface opposite from said surface layer, whereby a large ratio of the known length L 0 to the actual length L 1 is indicative of the presence of a heavy metal impurity in said layer.
Claim 13
Dependent Claim
18 words
The method of claim 10 further comprising the step of forming said body of float-zone (FZ) semiconductor material.
Claim 14
Dependent Claim
28 words
The method of claim 10 wherein said layer forming and heating step comprise forming said layer by epitaxial deposition on one of said major surfaces of said body.
Claim 15
Dependent Claim
23 words
The method of claim 10 wherein said layer forming step comprises diffusing dopant atoms into said body to define thereby said surface layer.
Claim 16
Dependent Claim
61 words
The method of claim 10 wherein additional processing steps to said layer are performed including heating said body to a temperature sufficient to diffuse any heavy metals that may have appeared on said surface layer; and then determining the minority-carrier diffusion length (L 1 ) of said body to reveal the presence of a heavy metal impurity according to step (d).
Claim 17
Dependent Claim
61 words
The method of claim 10 wherein said layer is further processed by doping it with material containing dopant atoms; heating said body to a temperature sufficient to diffuse heavy metals into said layer and said body; and determining the minority-carrier diffusion length (L 1 ) of said body to determine the presence of a heavy metal impurity according to step (d).
Claim 18
Dependent Claim
73 words
The method of claim 10 wherein said layer is further processed by depositing a layer of passivating material on said body; subsequently heating said body to a temperature sufficient to diffuse heavy metals that may be present on said surface layer into said layer; and thereafter removing said layer of passivant and determining the carrier diffusion length of said body according to step (d) to reveal the presence of a heavy metal impurity.
Claim 19
Dependent Claim
18 words
The method of claim 10 wherein the ratio of L 0 to L 1 is 20 or greater.
Claim 20
Dependent Claim
108 words
The method of claim 10 wherein said layer is formed of material whereby a junction region is formed between said layer and said body, wherein the potential barrier (Φ B ) across said junction is greater than 2kT wherein k is Boltzman's constant and T is the temperature in degrees Kelvin, further comprising the steps of: removing said layer, and thereafter measuring said length (L 1 ) by illuminating said major surface exposed by the removal of said layer, whereby a small value of the diffusion length L 1 compared to the diffusion length L 0 , is indicative that heavy metal contaminants were present in said layer.
References Cited (Backward Citations)
US4333051A
Cited
US4420722A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1989-06-30 | 1989-12-30 | 1990-07-01 | $2000.00 | Window Closed / Lapsed |
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